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Characteristics Analysis of Hydrogen Sensors Using SnO2 Thin Film Fabricated by Using Electron Beam Evaporation

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Abstract

In today’s society, hydrogen energy is emerging as a future eco-friendly energy source to mitigate environmental pollution and resource depletion problems. Particularly, eco-friendly hydrogen electric vehicles and hydrogen fuel cells have been developed rapidly. As there is a risk of explosion from leakage of hydrogen gas during usage, research on sensors that can detect hydrogen gas is imperative. In this paper, a basic research was conducted on the application of hydrogen sensor adopting SnO2 thin film with excellent hydrogen detection characteristics. The SnO2 thin film was deposited on a hydrogen sensor to study optical properties. The SnO2 thin film was deposited with 50 nm thickness using Electron Beam Evaporation and analyzed by applying SEM, EDS, AFM, and spectrum methods. To study hydrogen detection characteristics of the sensor, spectrum characteristics were analyzed in 4% hydrogen and 96% nitrogen. As a result, spectral characteristic was changed from −34.6 dB wavelength before hydrogen injection to –34.2 dB wavelength after hydrogen injection. This confirms that the SnO2 thin film can be applied to a hydrogen sensor for hydrogen gas detection.

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References

  1. J.H. Lee, E.S. Woo, G.J. Lee, Y.W. Cheon, E.B. Lee, T.O. Kim, M.H. Hwang, J.E. Lee, Analysis of financial risk and ventilation effect in the hydrogen fuel cell system. KRMS 23, 114 (2012)

    Google Scholar 

  2. G. Eranna, B.C. Joshi, D.P. Runthala, R.P. Gupta, Oxide materials for development of integrated gas sensors—a comprehensive review. Crit. Rev. Solid State Mater. Sci. 29, 111–118 (2004)

    Article  CAS  Google Scholar 

  3. L. Promsong, M. Sriyudthsak, Thin tin-oxide film alcohol-gas sensor. Sens. Actuat. B Chem. 25, 504–506 (1995)

    Article  CAS  Google Scholar 

  4. S.J. Kim, The effect on the gas selectivity of CNT-based gas sensors by binder in SWNT/Silane sol solution. IEEE Sens. J. 10, 173–177 (2010)

    Article  CAS  Google Scholar 

  5. J. Kanungo, H. Saha, S. Basu, Effect of porosity on the performance of surface modified porous silicon hydrogen sensors. Sens. Actuat. B Chem. 147, 145–151 (2010)

    Article  CAS  Google Scholar 

  6. T. Hübert, L. Boon-Brett, G. Black, U. Banach, Hydrogen sensors–a review. Sens. Actuat. B Chem. 157(2), 329–352 (2011)

    Article  Google Scholar 

  7. J.P. Hirth, Effects of hydrogen on the properties of iron and steel. Metall. Trans. 11, 861–890 (1980)

    Article  Google Scholar 

  8. I. Glassman, R.A. Yetter, N.G. Glumac, Combustion (Academic press, London, 2014)

    Google Scholar 

  9. T.J. Park, C.H. Lee, E.H. Jung, Influence of different inert gases on hydrogen permeation through metal alloy membrane. New Renew. Energy 212–212, 1 (2021)

    Google Scholar 

  10. T. Hübert, L. Boon-Brett, V. Palmisano, M.A. Bader, Developments in gas sensor technology for hydrogen safety. Int. J. Hydrog. Energy 39(35), 20474–20483 (2014)

    Article  Google Scholar 

Download references

Acknowledgements

This paper has been revised and supplemented with the first author's master's thesis.

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Authors and Affiliations

  1. Department of Electron Electronic Engineering, Graduate School, Dongshin University, Naju, 58245, Korea

    Han-Byeol Kim

  2. Department of Health Administration, Dongshin University, Naju, 58245, Korea

    Min-Woo Cheon

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  1. Han-Byeol Kim
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  2. Min-Woo Cheon
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Correspondence to Min-Woo Cheon.

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Kim, HB., Cheon, MW. Characteristics Analysis of Hydrogen Sensors Using SnO2 Thin Film Fabricated by Using Electron Beam Evaporation. Trans. Electr. Electron. Mater. 23, 313–317 (2022). https://doi.org/10.1007/s42341-022-00393-w

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  • DOI: https://doi.org/10.1007/s42341-022-00393-w

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