Abstract
This paper presents the design and analysis of an RF MEMS Shunt switch with low pull-in voltage and good RF performance. The switch includes a vertically deforming beam which includes perforations and meanders. This switch is developed to run at a Radio Frequency (RF) of 35 GHz. The significant accomplishments in this work are the pull in voltage that is minimized to 3.72 V, and the return loss is listed below − 26.6 dB, the insertion loss is listed less than − 0.22 dB and isolation is − 36.4 dB. The up and down capacitance of the switch is 110 fF, 1.58 pF, and the obtained capacitance ratio is 113.5. The product utilized for the CPW line is Gold (Au). The dielectric product utilized in between the beam and the CPW transmission line is Silicon Nitride (Si3N4). We achieved electromechanical analysis through COMSOL software and RF analysis is done using HFSS software.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
R.E. Mihailovich, M. Kim, J.B. Hacker, E.A. Sovero, J. Studer, J.A. Higgins, MEM relay for reconfigurable RF circuits. IEEE Microw. Wirel. Compon. Lett. 11(2), 53–55 (2001)
Hyman D, Lam J, Warneke B, Schmitz A, Hsu TY, Brown J, Schaffner J et al (1999) Surface‐micromachined RF MEMs switches on GaAs substrates. Int. J. RF Microw. Computer‐Aided Eng. Co‐sponsored Center Adv. Manuf. Packag. Microw. Opt. Dig. Electron (CAMPmode) Univ. Colorado Boulder 9(4): 348–361
P.M. Zavracky, N.E. McGruer, R.H. Morrison, D. Potter (1999) Microswitches and microrelays with a view toward microwave applications. Int. J. RF Microw. Computer‐Aided Eng. Co‐sponsored Center Adv. Manuf. Packag. Microw. Opt. Dig. Electron (CAMPmode) Univ. Colorado Boulder 9(4): 338–347
Y. Zhu, H.D. Espinosa, Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis. J. Micromech. Microeng. 14(8), 1270 (2004)
S.P. Pacheco, L.P. Katehi, C.C. Nguyen (2000) Design of low actuation voltage RF MEMS switch, in 2000 IEEE MTT-S international microwave symposium digest (Cat. No. 00CH37017), vol. 1. IEEE, pp. 165–168
E.R. Brown, RF-MEMS switches for reconfigurable integrated circuits. IEEE Trans. Microw. Theory Tech. 46(11), 1868–1880 (1998)
D. Peroulis, S.P. Pacheco, L.P. Katehi, RF MEMS switches with enhanced power-handling capabilities. IEEE Trans. Microw. Theory Tech. 52(1), 59–68 (2004)
S.K. Thakur, K.A. SumithraDevi, I. Ranjitha (2009) Performance of low loss RF MEMS fixed-fixed capacitive switch characterization, in 2009 applied electromagnetics conference (AEMC). IEEE, pp. 1–4
A.K. Ravirala, L.K. Bethapudi, J. Kommareddy, B.S. Thommandru, S. Jasti, P.R. Gorantla, A. Puli, G.S. Karumuri, S.R. Karumuri, Design and performance analysis of uniform meander structured RF MEMS capacitive shunt switch along with perforations. Microsyst. Technolo. 24(2), 901–908 (2018)
M. Angira, K. Rangra, Design and investigation of a low insertion loss, broadband, enhanced self and hold down power RF-MEMS switch. Microsyst. Technol. 21(6), 1173–1178 (2015)
H.R. Ansari, S. Khosroabadi, "Design and simulation of a novel RF MEMS shunt capacitive switch with a unique spring for Ka-band application. Microsyst. Technol. 25(2), 531–540 (2019)
T. Lakshmi Narayana, K. Girija Sravani, K. Srinivasa Rao, Design and analysis of CPW based shunt capacitive RF MEMS switch. Cogent Eng. 4(1), 1363356 (2017)
A. Chakraborty, B. Gupta, B.K. Sarkar, Design, fabrication and characterization of miniature RF MEMS switched capacitor based phase shifter. Microelectron. J. 45(8), 1093–1102 (2014)
T. Lakshmi Narayana, K. Girija Sravani, K.A. Srinivasa Rao, A micro level electrostatically actuated cantilever and metal contact based series RF MEMS switch for multi-band applications. Cogent Eng. 4(1), 1323367 (2017)
X.J. He, B.S. Jin, Q. Wu, J.H. Yin (2006) Time response and dynamic behavior of electrostatic driven RF MEMS capacitive switches for Phase Shifter Applications. in 2006 IEEE antennas and propagation society international symposium. IEEE, pp. 1965–1968
K.G. Sravani, K. Guha, K.S. Rao, Analysis on selection of beam material for novel step structured RF-MEMS switch used for satellite communication applications. Trans. Electr. Electr. Mater. 19(6), 467–474 (2018)
K.G. Sravani, K.S. Rao, Analysis of RF MEMS shunt capacitive switch with uniform and non-uniform meanders. Microsyst. Technol. 24(2), 1309–1315 (2018)
K.S. Rao, C.G. Chand, K.G. Sravani, D. Prathyusha, P. Naveena, G.S. Lakshmi, P.A. Kumar, T.L. Narayana, Design, modeling and analysis of perforated RF MEMS capacitive shunt switch. IEEE Access 7, 74869–74878 (2019)
K.G. Sravani, D. Prathyusha, K.S. Rao, P.A. Kumar, G.S. Lakshmi, C.G. Chand, P. Naveena, L.N. Thalluri, K. Guha, Design and performance analysis of low pull-in voltage of dimple type capacitive RF MEMS shunt switch for Ka-band. IEEE Access 7, 44471–44488 (2019)
K.G. Sravani, D. Prathyusha, G.R. Prasad, C.G. Chand, P.A. Kumar, K. Guha, K.S. Rao, Design of reconfigurable antenna by capacitive type RF MEMS switch for 5G applications. Microsyst. Technol. 7, 1–9 (2020)
Acknowledgements
The Authors would like to thank to National MEMS Design Centre, NIT Silchar, Asam for providing the necessary FEM tool.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Srinivasa Rao, K., Girija Sravani, K., Akhil Chowdary, Y. et al. Design, Analysis and Simulation of RF MEMS Capacitive Shunt Switch with Perforations for Ka-Band Applications. Trans. Electr. Electron. Mater. 23, 382–387 (2022). https://doi.org/10.1007/s42341-021-00353-w
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s42341-021-00353-w