Skip to main content
SpringerLink
Log in

In-situ stitching interferometric test system for large plano optics

  • Published:
Advances in Manufacturing Aims and scope Submit manuscript

Abstract

In-situ testing is an ideal technology for improving the precision and efficiency of fabrication. We developed an in-situ subaperture stitching interferometric test system for large plano optics in the workshop environment with high precision and satisfactory repeatability. In this paper, we provide a brief account of this system and the principle of in-situ subaperture stitching measurement. Several validation tests are presented, which demonstrate that the developed system is capable of realizing in-situ testing. The size of optical flats can be measured is up to 420 mm × 780 mm, and repeatability is smaller than 0.03λ. The paper also discusses the necessary requirements for a suitable workshop environment for ensuring that the tests are stable and reliable.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11

Similar content being viewed by others

References

  1. Nostrand MC, Weiland TL, Luthi RL et al (2004) A large-aperture high-energy laser system for optics and optical component testing. Proc SPIE 5273:325–333

    Article  Google Scholar 

  2. Jia X, Xing T (2015) Absolute testing of surface based on sub-aperture stitching interferometry. Proc SPIE 9449:1–6

    Google Scholar 

  3. Pant KK, Burada DR, Bichra M et al (2015) Subaperture stitching for measurement of freeform wavefront. Appl Opt 54(34):10022–10028

    Article  Google Scholar 

  4. Anderson DS, Burge JH (1995) Swing arm profilometry of aspherics. Proc SPIE 2356:269–279

    Google Scholar 

  5. Su P, Parks RE, Wang Y et al (2012) Swing-arm optical coordinate measuring machine: modal estimation of systematic errors from dual probe shear measurements. Opt Eng 51(4):301–311

    Article  Google Scholar 

  6. Dong Z, Cheng H, Ye X et al (2014) Developing on-machine 3D profile measurement for deterministic fabrication of aspheric mirrors. Appl Opt 53(22):4997–5007

    Article  Google Scholar 

  7. Dong Z, Cheng H, Feng Y et al (2015) Calibrating system errors of large scale three-dimensional profile measurement instruments by subaperture stitching method. Appl Opt 54(19):5962–5969

    Article  Google Scholar 

  8. Ehret G, Schulz M, Quabis S (2016) Small angle deflectometer with submillimeter lateral resolution for flatness measurements of optics. Proc AIP 1741:1–4

  9. Chen M, Cheng W, Wang C (1991) Multi-aperture overlap-scanning technique for large aperture test. Proc SPIE 1553:626–635

    Article  Google Scholar 

  10. Burge JH, Zhao C (2012) Applications of subaperture stitching interferometry for very large mirrors. Int Soc Opt Photonics 8450(4):831–834

    Google Scholar 

  11. Bray M (1997) Stitching interferometer for large plano optics using a standard interferometer. Proc SPIE 3134:39–50

    Article  Google Scholar 

  12. Peng J, Xu H, Yu Y et al (2015) Stitching interferometry for cylindrical optics with large angular aperture. Meas Sci Technol 26(2):1–8

    Article  Google Scholar 

  13. Peng J, Yu Y, Chen D et al (2017) Stitching interferometry of full cylinder by use of the first-order approximation of cylindrical coordinate transformation. Opt Express 25:3092–3103

    Article  Google Scholar 

  14. Fleig J, Dumas P, Murphy PE et al (2003) QED technologies. An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces. Proc SPIE 5188:296–307

    Article  Google Scholar 

  15. Murphy P, Fleig J, Forbes G et al (2006) Subaperture stitching interferometry for testing mild aspheres. Proc SPIE 6293:1–10

    Google Scholar 

  16. Zeeko Products Centre (2000) The Zeeko Ltd register. http://www.zeeko.co.uk/products.html. Accessed 10 Apr 2018

  17. King CW (2014) An automated metrology workstation for the measurement of large convex surfaces. Classical optics 2014, OSA Technical digest (online), paper OTh3B.2

  18. Morris MN (2010) Dynamic interferometry for on-machine metrology. Frontiers in optics/laser science XXVI, OSA technical digest (CD), paper STuA3, pp 1−2

  19. Wang W, Huang H, Yang R et al (2015) Interferometer fine adjusting mechanism with pneumatic locking function. CN Patent 204359280 U, 27 May 2015

  20. Chen S, Xue S, Wang G et al (2017) Subaperture stitching algorithms: a comparison. Opt Commun 390:61–71

    Article  Google Scholar 

  21. Su P, Burge JH, Parks RE (2010) Application of maximum likelihood reconstruction of subaperture data for measurement of large flat mirrors. Appl Opt 49(1):21–31

    Article  Google Scholar 

  22. Chen S, Li S, Dai Y et al (2006) Iterative algorithm for subaperture stitching test with spherical interferometers. J Opt Soc Am A 23(5):1219–1226

    Article  Google Scholar 

  23. Murphy P, DeVries G, Fleig J et al (2009) Measurement of high-departure aspheric surfaces using subaperture stitching with variable null optics. Proc SPIE 7426:1–9

    Google Scholar 

  24. Wu X, Zhang X, Wu X et al (2015) Experimental research of error restraint for dynamic interferometer in optical testing. Proc SPIE 9449:1–8

    Google Scholar 

  25. Golini D, Forbes G, Murphy P (2005) Method for self-calibrated sub-aperture stitching for surface figure measurement. US Patent 6956657 B2, 18 Oct 2005

Download references

Acknowledgements

The authors greatly acknowledge Prof. Ming-Yi Chen from Shanghai University for his enlightening discussions. This work was supported by the National Natural Science Foundation of China (Grant No. 51775326) and the National Key Research and Development Project (Grant No. 2016YFF0101905).

Author information

Authors and Affiliations

  1. College of Mechanical Engineering, Shanghai University of Engineering Science, Shanghai, 201620, People’s Republic of China

    Xin Wu

  2. Department of Precision Mechanical Engineering, Shanghai University, Shanghai, 200072, People’s Republic of China

    Xin Wu, Ying-Jie Yu & Ke-Bing Mou

  3. Shanghai Machine Tool Works Ltd., Shanghai, 200093, People’s Republic of China

    Wei-Rong Wang

Authors
  1. Xin Wu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ying-Jie Yu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Ke-Bing Mou
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Wei-Rong Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ying-Jie Yu.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Wu, X., Yu, YJ., Mou, KB. et al. In-situ stitching interferometric test system for large plano optics. Adv. Manuf. 6, 195–203 (2018). https://doi.org/10.1007/s40436-018-0220-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s40436-018-0220-2

Keywords

Search

Navigation