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Development of an Efficient and Controllable Nano-porous Copper with Good Wettability and Capillary Performance for Wicks of Vapor Chamber

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Abstract

To meet the heat dissipation requirements of microelectronic devices, it is urgent to develop an efficient method to fabricate a controllable micro/nano structure for the wick in vapor chamber, which is widely investigated for its high thermal conductivity and small size. This work proposed a controllable fabrication of nano-porous copper (NPC) with high efficiency, which includes electrodeposition and dealloying. A uniform Cu–Zn alloy with single phase was prepared as the precursor for dealloying through electrodeposition. An innovative solution system for dealloying was developed for the fabrication of the bi-continuous NPC, in which the efficiency was improved ten times compared to the conventional acid solution. In addition, the effects of dealloying parameters on the NPC morphology and the process efficiency have also been studied systematically. Based on the above method, both good wettability and capillary performance were achieved by NPC with tunable pore size, which indicates its great application prospects in wicks for high-performance vapor chamber.

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Acknowledgements

The authors would like to thank supports from the Shanghai Professional Technical Service Platform for Non-Silicon Micro-Nano Integrated Manufacturing. This work is supported by the National Key Research and Development Program of China (No. 2021YFB2011800) and the National Natural Science Foundation of China (No. 62104141).

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Authors and Affiliations

  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai, 200240, People’s Republic of China

    Sizhen Chen, Han Cai, Yahui Li, Qi Zhang, Yunna Sun & Guifu Ding

  2. Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, People’s Republic of China

    Sizhen Chen, Han Cai, Yahui Li & Qi Zhang

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  1. Sizhen Chen
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Correspondence to Guifu Ding.

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Chen, S., Cai, H., Li, Y. et al. Development of an Efficient and Controllable Nano-porous Copper with Good Wettability and Capillary Performance for Wicks of Vapor Chamber. Electron. Mater. Lett. 18, 465–474 (2022). https://doi.org/10.1007/s13391-022-00357-5

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