Skip to main content
SpringerLink
Log in

Deposition Behavior of Boron-Doped Diamond with Varying Amount of Acetone by Hot Filament Chemical Vapor Deposition

  • Original Article - Nanomaterials
  • Published:
Electronic Materials Letters Aims and scope Submit manuscript

Abstract

As a carbon source for hot filament chemical vapor deposition of boron-doped diamond (BDD), cost-effective acetone (C3H6O) was used instead of commonly used methane gas. In this case, tantalum filaments turned out to be more suitable than tungsten filaments because tantalum is more oxidation-resistant and can be heated to much higher temperature without evaporation than tungsten. As the acetone flux was varied, the hydrogen flux was also varied so that the mixture of acetone and hydrogen fluxes was fixed at 500 standard cubic centimeter per minute (sccm). Trimethyl borate (TMB) was used as a boron source. As the acetone flux was varied, the TMB flux was also varied so that the boron doping of 11,400 ppm was maintained. As the flux of acetone was increased from 90 to 170 sccm, the grain size and the film thickness of BDD increased. In this range of acetone fluxes, the films showed well-defined (111) facets, indicating that the high quality diamond was deposited. When the acetone flux was increased to 210 sccm, the grain size decreased abruptly and the film thickness, which represents the deposition rate, decreased also. When the acetone flux was increased to 250 sccm, the grain size further decreased, producing a cauliflower structure and the film thickness further decreased. The potential window, which is measured as electrochemical properties of BDD, increased as the acetone flux increased from 90 to 170 sccm and did not change much between 170 and 250 sccm. From this experiment, it was confirmed that varying the flux of acetone could control the morphology, the growth rate and the electrochemical properties of the BDD film.

Graphical Abstract

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  1. Li, Y., Li, Y.D., Wang, Y., Zhang, J., Song, M.S., She, Y.C., Chen, X.Z.: Synthesis of large diamond single crystals under high pressure and high temperature through effective utilization of the synthesis cavity. CrystEngComm 20, 4127–4132 (2018)

    Article  Google Scholar 

  2. May, P.W., Mankelevich, Y.A.: From ultrananocrystalline diamond to single crystal diamond growth in hot filament and microwave plasma-enhanced CVD reactors: a unified model for growth rates and grain sizes. J. Phys. Chem. C 112, 12432–12441 (2008)

    Article  Google Scholar 

  3. Palyanov, Y.N., Kupriyanov, I.N., Borzdov, Y.M.: High-pressure synthesis and characterization of Sn-doped single crystal diamond. Carbon 143, 769–775 (2019)

    Article  Google Scholar 

  4. Wang, Y.K., Yin, S., Lei, L., Wang, Q.M., Wang, W.D., Chen, H.Y., Zhang, Y., Liu, F.M., Hu, Y., Liu, J., Gao, S.P., Peng, F., He, X.J., He, D.W.: Enhanced hardness of CVD diamond after high pressure and high-temperature treatments. High Press. Res. 35, 363–371 (2015)

    Article  Google Scholar 

  5. Amaral, M., Fernandes, A.J.S., Vila, M., Oliveira, F.J., Silva, R.F.: Growth rate improvements in the hot-filament CVD deposition of nanocrystalline diamond. Diam. Relat. Mater. 15, 1822–1827 (2006)

    Article  Google Scholar 

  6. Chen, L.C., Miao, X.Y., Ma, H.A., Guo, L.S., Wang, Z.K., Yang, Z.Q., Fang, C., Jia, X.P.: Synthesis and characterization of diamonds with different nitrogen concentrations under high pressure and high temperature conditions. CrystEngComm 20, 7164–7169 (2018)

    Article  Google Scholar 

  7. Hirmke, J., Schwarz, S., Rottmair, C., Rosiwal, S.M., Singer, R.F.: Diamond single crystal growth in hot filament CVD. Diam. Relat. Mater. 15, 536–541 (2006)

    Article  Google Scholar 

  8. Konoplyuk, S., Abe, T., Takagi, T., Uchimoto, T.: Hot filament CVD diamond coating of TiC sliders. Diam. Relat. Mater. 16, 609–615 (2007)

    Article  Google Scholar 

  9. Gomez-Ruiz, B., Gomez-Lavin, S., Diban, N., Boiteux, V., Colin, A., Dauchy, X., Urtiaga, A.: Boron doped diamond electrooxidation of 6:2 fluorotelomers and perfluorocarboxylic acids. Application to industrial wastewaters treatment. J. Electroanal. Chem. 798, 51–57 (2017)

    Article  Google Scholar 

  10. Vasilie, S., Manea, F., Baciu, A., Pop, A.: Dual use of boron-doped diamond electrode in antibiotics-containing water treatment and process control. Process Saf. Environ. 117, 446–453 (2018)

    Article  Google Scholar 

  11. Jevtic, S., Stefanovic, A., Stankovic, D.M., Pergal, M.V., Ivanovic, A.T., Jokic, A., Petkovic, B.B.: Boron-doped diamond electrode—a prestigious unmodified carbon electrode for simple and fast determination of bentazone in river water samples. Diam. Relat. Mater. 81, 133–137 (2018)

    Article  Google Scholar 

  12. Song, C.W., Lee, Y.H., Heo, S.Y., Hwang, N.M., Choi, S., Kim, K.H.: Computer simulation of temperature parameter for diamond formation by using hot-filament chemical vapor deposition. Coatings 8, 15 (2018)

    Article  Google Scholar 

  13. Song, C.W., Lee, Y.H., Choi, S., Hwang, N.M., Kim, K.H.: Temperature simulation and diamond deposition behavior with distance between filament and susceptor during hot-filament chemical vapor deposition. Nanosci. Nanotechnol. Lett. 10, 761–766 (2018)

    Article  Google Scholar 

  14. Amaral, M., Silva, D.J., Fernandes, A.J.S., Costa, F.M., Oliveira, F.J., Silva, R.F.: Surface activation pre-treatments for NCD films grown by HFCVD. Vacuum 83, 1228–1232 (2009)

    Article  Google Scholar 

  15. Amaral, M., Almeida, F., Fernandes, A.J.S., Costa, F.M., Oliveira, F.J., Silva, R.F.: The role of surface activation prior to seeding on CVD diamond adhesion. Surf. Coat. Technol. 204, 3585–3591 (2010)

    Article  Google Scholar 

  16. Yang, T.M., Wei, Q.P., Qi, Y., Yu, Z.M.: The diffusion behavior of carbon in sputtered tungsten film and sintered tungsten block and its effect on diamond nucleation and growth. Diam. Relat. Mater. 52, 49–58 (2015)

    Article  Google Scholar 

  17. Nasieka, I., Strelchuk, V., Naseka, V., Stubrov, Y., Dudnik, S., Gritsina, V., Opalev, O., Koshevoy, K., Strel’nitskij, V., Tkach, V., Boyko, M., Antypov, I.: An analysis of the specificity of defects embedded into (100) and (111) faceted CVD diamond microcrystals grown on Si and Mo substrates by using E/H field discharge. J. Cryst. Growth 491, 103–110 (2018)

    Article  Google Scholar 

  18. Tang, C.J., Fernandes, A.J.S., Costa, F., Pinto, J.L.: Effect of microwave power and nitrogen addition on the formation of 100 faceted diamond from microcrystalline to nanocrystalline. Vacuum 85, 1130–1134 (2011)

    Article  Google Scholar 

  19. Ushizawa, K., Watanabe, K., Ando, T., Sakaguchi, I., Nishitani-Gamo, M., Sato, Y., Kanda, H.: Boron concentration dependence of Raman spectra on 100 and 111 facets of B-doped CVD diamond. Diam. Relat. Mater. 7, 1719–1722 (1998)

    Article  Google Scholar 

  20. Hartmann, P., Bohr, S., Haubner, R., Lux, B., Wurzinger, P., Griesser, M., Bergmaier, A., Dollinger, G., Sternschulte, H., Sauer, R.: Diamond growth with boron addition. Int. J. Refract. Met. Hard Mater. 16, 223–232 (1998)

    Article  Google Scholar 

  21. Badzian, A.R., Badzian, T., Roy, R., Messier, R., Spear, K.E.: Crystallization of diamond crystals and films by microwave assisted CVD. 2. Mater. Res. Bull. 23, 531–548 (1988)

    Article  Google Scholar 

  22. Salvadori, M.C., Brewer, M.A., Ager, J.W., Krishnan, K.M., Brown, I.G.: The effect of a graphite holder on diamond synthesis by microwave plasma chemical vapor-deposition. J. Electrochem. Soc. 139, 558–560 (1992)

    Article  Google Scholar 

  23. Jeon, J.D., Park, C.J., Kim, D.Y., Hwang, N.M.: Experimental confirmation of charged carbon clusters in the hot filament diamond reactor. J. Cryst. Growth 213, 79–82 (2000)

    Article  Google Scholar 

  24. Jeon, I.D., Park, C.J., Kim, D.Y., Hwang, N.M.: Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process. J. Cryst. Growth 223, 6–14 (2001)

    Article  Google Scholar 

  25. Park, J.W., Kim, K.S., Hwang, N.M.: Gas phase generation of diamond nanoparticles in the hot filament chemical vapor deposition reactor. Carbon 106, 289–294 (2016)

    Article  Google Scholar 

  26. Ahn, H.-S., Park, H.-M., Kim, D.-Y., Hwang, N.M.: Observation of carbon clusters of a few nanometers in the oxyacetylene diamond CVD process. J. Cryst. Growth 234, 399–403 (2002)

    Article  Google Scholar 

  27. Mortet, V., Taylor, A., Zivcova, Z.V., Machon, D., Frank, O., Hubik, P., Tremouilles, D., Kavan, L.: Analysis of heavily boron-doped diamond Raman spectrum. Diam. Relat. Mater. 88, 163–166 (2018)

    Article  Google Scholar 

  28. Long, H.Y., Luo, H., Luo, J.Q., Xie, Y.N., Deng, Z.J., Zhang, X.W., Wang, Y.J., Wei, Q.P., Yu, Z.M.: The concentration gradient of boron along the growth direction in boron doped chemical vapor deposited diamond. Mater. Lett. 157, 34–37 (2015)

    Article  Google Scholar 

  29. Mortet, V., Zivcova, Z.V., Taylor, A., Frank, O., Hubik, P., Tremouilles, D., Jomard, F., Barjon, J., Kavan, L.: Insight into boron-doped diamond Raman spectra characteristic features. Carbon 115, 279–284 (2017)

    Article  Google Scholar 

  30. Liu, Z.L., Li, H.J., Li, M.J., Li, C.P., Qian, L.R., Su, L., Yang, B.H.: Preparation of polycrystalline BDD/Ta electrodes for electrochemical oxidation of organic matter. Electrochim. Acta 290, 109–117 (2018)

    Article  Google Scholar 

  31. Son, M.J., Zhang, T.F., Jo, Y.J., Kim, K.H.: Enhanced electrochemical properties of the DLC films with an arc interlayer, nitrogen doping and annealing. Surf. Coat. Technol. 329, 77–85 (2017)

    Article  Google Scholar 

  32. Jo, Y.J., Zhang, T.F., Son, M.J., Kim, K.H.: Synthesis and electrochemical properties of Ti-doped DLC films by a hybrid PVD/PECVD process. Appl. Surf. Sci. 433, 1184–1191 (2018)

    Article  Google Scholar 

Download references

Acknowledgements

This work was supported by the Global Frontier R&D Program (2013M3A6B1078874) of the Center for Hybrid Interface Materials (HIM) funded by the Ministry of Science, ICT & Future Planning.

Author information

Authors and Affiliations

  1. School of Materials Science and Engineering, Pusan National University, Busan, South Korea

    Chang Weon Song & Kwang Ho Kim

  2. School of Convergence Science, Pusan National University, Busan, South Korea

    Rongguang Jin

  3. Department of Materials Science and Engineering, Seoul National University, Seoul, South Korea

    Nong-Moon Hwang

  4. Global Frontier R&D Center for Hybrid Interface Materials, Pusan National University, Busan, South Korea

    Kwang Ho Kim

Authors
  1. Chang Weon Song
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Rongguang Jin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Nong-Moon Hwang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Kwang Ho Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding authors

Correspondence to Nong-Moon Hwang or Kwang Ho Kim.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Song, C.W., Jin, R., Hwang, NM. et al. Deposition Behavior of Boron-Doped Diamond with Varying Amount of Acetone by Hot Filament Chemical Vapor Deposition. Electron. Mater. Lett. 15, 630–638 (2019). https://doi.org/10.1007/s13391-019-00152-9

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s13391-019-00152-9

Keywords

Search

Navigation