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Oxidation behaviour of composite CrN/(Cr,V)N coatings with different contents of vanadium induced by UV nanosecond laser pulses

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Abstract

The oxidation behaviour and morphological modification of CrN/(Cr,V)N coatings on Si wafers were studied after UV nanosecond laser (wavelength 248 nm, pulse duration 25 ns) processing in ambient air. The evolution of the surface composition and microstructure with the number of accumulated/subsequent pulses was systematically analysed depending on the initial content of vanadium in the as-deposited coatings. Irradiation of CrN/(Cr,V)N coatings with different content of vanadium was carried out at a fluence of 0.17 J cm−2 with different number of pulses. The concentration of metallic components was fairly homogeneous distributed throughout the sample. However, on surface and in sub-surface regions the contents of Cr and V are diminished due to laser-induced oxidation. The composition and thickness of forming oxides mixture, Cr2O3 and V2O5, are depending on the number of applied laser pulses and the initial vanadium content. The asymmetric progress of surface morphology is characterized by the formation of grainy structures at peripheries and the appearance of cracks and irregular closed shapes in the centre of the irradiation area.

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Acknowledgements

The research was sponsored by the Ministry of Education, Science and Technological Development of the Republic Serbia through Projects Nos. III 45016 and OI 172019. Romanian co-authors acknowledge the financial support of the work by the National Authority for Research and Innovation in the frame of Nucleus programme—contracts ID 304/2011 and 4N/2016. We also acknowledge the support from European Community, COST Action. Project No. MP1208.

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Authors and Affiliations

  1. Vinča Institute of Nuclear Sciences, University of Belgrade, P. O. Box 522, Belgrade, 11001, Serbia

    Suzana Petrović & B. Gaković

  2. Jožef Stefan Institute, Jamova 39, 1000, Ljubljana, Slovenia

    P. Panjan & J. Kovač

  3. Institute of Physics Belgrade, University of Belgrade, Pregrevica 118, Belgrade, 11080, Serbia

    V. Lazović

  4. National Institute for Lasers, Plasma and Radiation Physics, Magurele, Ilfov, P. O. Box MG-36, 077125, Romania

    C. Ristoscu, I. Negut & I. N. Mihailescu

  5. Faculty of Physics, University of Bucharest, 077125, Magurele, Ilfov, Romania

    I. Negut

Authors
  1. Suzana Petrović
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  2. B. Gaković
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  3. P. Panjan
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  4. J. Kovač
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  5. V. Lazović
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  6. C. Ristoscu
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  7. I. Negut
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  8. I. N. Mihailescu
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Corresponding author

Correspondence to B. Gaković.

Additional information

This article is part of the Topical Collection on Focus on Optics and Bio-photonics, Photonica 2017.

Guest Edited by Jelena Radovanovic, Aleksandar Krmpot, Marina Lekic, Trevor Benson, Mauro Pereira, Marian Marciniak.

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Petrović, S., Gaković, B., Panjan, P. et al. Oxidation behaviour of composite CrN/(Cr,V)N coatings with different contents of vanadium induced by UV nanosecond laser pulses. Opt Quant Electron 50, 208 (2018). https://doi.org/10.1007/s11082-018-1475-3

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  • DOI: https://doi.org/10.1007/s11082-018-1475-3

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