Skip to main content
SpringerLink
Log in

Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

Si nanorod arrays exhibit promising potential applications in many fields compared with the bulk counterpart. Therefore, development of a facile and cost-effective method for the fabrication of this kind of nanostructures is essential to enabling a wide range of advanced technologies in electronics and optics. In this paper, a simple and low cost method is presented and the fabrication process includes a combination of polystyrene sphere lithography and metal-assisted chemical etching. Compared with previously reported polystyrene sphere lithography methods, present fabrication has the advantage of simplicity. In addition, the fabrication involves no reactive ion etching equipment or noble metal deposition facilities. Based on the experimental results, a plausible mechanism is proposed to explain the formation of Si nanorod arrays.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

References

  1. F. Wang, X. Zhang, L. Wang, Y. Jiang, C. Wei, Y. Zhao, J. Power Source 293, 698 (2015)

    Article  Google Scholar 

  2. A.G. Nassiopoulou, V. Gianneta, C. Katsogridakis, Nanoscale Res. Lett. 6, 597 (2011)

    Article  Google Scholar 

  3. R. Liu, F. Zhang, C. Con, B. Cui, B. Sun, Nanoscale Res. Lett. 8, 155 (2013)

    Article  Google Scholar 

  4. Y. Liu, W. Sun, Y. Jiang, X.Z. Zhao, Mater. Lett. 139, 437 (2015)

    Article  Google Scholar 

  5. J. Yeom, D. Ratchford, C.R. Field, T.H. Brintlinger, P.E. Pehrsson, Adv. Funct. Mater. 24, 106 (2014)

    Article  Google Scholar 

  6. J. Zhao, M.T. Sun, Z. Liu, B.G. Quan, C.Z. Gu, J.J. Li, Sci. Rep. 5, 16019 (2015)

    Article  Google Scholar 

  7. L. Wang, F. Wang, X. Zhang, N. Wang, Y. Jiang, Q. Hao, Y. Zhao, J. Power Sources 268, 619 (2014)

    Article  Google Scholar 

  8. M. Rosa, M. Allegrezza, M. Canino, C. Summonte, A. Desalvo, Sol. Energy Mater. Sol. Cells 95, 2987 (2011)

    Google Scholar 

  9. H. Asoh, K. Uchibori, S. Ono, Semicond. Sci. Technol. 26, 102001 (2011)

    Google Scholar 

  10. Y. Wang, L. Yang, Y. Liu, Z. Mei, W. Chen, J. Li, H. Liang, A. Kuznetsov, X.L. Du, Sci. Rep. 5, 10843 (2015)

    Article  Google Scholar 

  11. Y. Lee, H. Kim, S.Q. Hussain, S. Han, N. Balaji, Y.J. Lee, J. Lee, J. Yi, Mater. Sci. Semicond. Process. 40, 391 (2015)

    Article  Google Scholar 

  12. J. Cichoszewski, M. Reuter, F. Schwerdt, J. Werner, Electrochim. Acta 109, 333 (2013)

    Article  Google Scholar 

  13. X. Li, Y. Xiao, C. Yan, J.W. Song, V. Talalaev, S.L. Schweizer, K. Piekielska, A. Sprafke, J.H. Lee, R.B. Wehrspohn, Electrochim. Acta 94, 57 (2013)

    Article  Google Scholar 

  14. H. Asoh, K. Fujihara, S. Ono, Nanoscale Res. Lett. 8, 1 (2013)

    Article  Google Scholar 

  15. H. Song, W. Zhang, C. Cheng, Y. Tang, L. Luo, X. Chen, C. Luan, X. Meng, J. Zapien, N. Wang, Cryst. Growth Des. 11, 147 (2010)

    Article  Google Scholar 

  16. M. Geissler, Y. Xia, Adv. Mater. 16, 1249 (2004)

    Article  Google Scholar 

  17. L.J. Guo, Adv. Mater. 19, 495 (2007)

    Article  Google Scholar 

  18. B. Mikhael, B. Elise, M. Xavier, S. Sebastian, M. Johann, P. Laetitia, A.C.S. Appl, Mater. Interfaces 3, 3866 (2011)

    Article  Google Scholar 

  19. P.R. Pudasaini, F. Ruiz-Zepeda, M. Sharma, D. Elam, A. Ponce, A.A. Ayon, A.C.S. Appl, Mater. Interfaces 5, 9620 (2013)

    Article  Google Scholar 

  20. K. Peng, M. Zhang, A. Lu, N.B. Wong, R. Zhang, S.T. Lee, Appl. Phys. Lett. 90, 163123 (2007)

    Article  Google Scholar 

  21. Z. Huang, N. Geyer, P. Werner, J. De Boor, U. Gösele, Adv. Mater. 23, 285 (2011)

    Article  Google Scholar 

  22. K. Peng, H. Fang, J. Hu, Y. Wu, J. Zhu, Y. Yan, S. Lee, Chem. Eur. J. 12, 7942 (2006)

    Article  Google Scholar 

Download references

Acknowledgments

This work was partially supported by the National Natural Science Foundation of China (51202081).

Author information

Authors and Affiliations

  1. Jiangsu Provincial Key Lab for Interventional Medical Devices, Huaiyin Institute of Technology, Huaian, 223003, China

    Y. F. Zhu, C. J. Pan, X. Guo, F. Gu & H. L. Wang

  2. Faculty of Mathematics and Physics, Huaiyin Institute of Technology, Huaian, 223003, China

    L. Zhou

  3. Department of Materials Science and Engineering, University of Delaware, Newark, DE, 19716, USA

    C. Ni

Authors
  1. Y. F. Zhu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. L. Zhou
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C. J. Pan
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. X. Guo
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. F. Gu
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. H. L. Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. C. Ni
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Y. F. Zhu.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zhu, Y.F., Zhou, L., Pan, C.J. et al. Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method. J Mater Sci: Mater Electron 27, 5833–5838 (2016). https://doi.org/10.1007/s10854-016-4499-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10854-016-4499-0

Keywords

Search

Navigation