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Study of (111)-oriented PZT thin films prepared by a modified sol–gel method

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Abstract

In this paper, Pb(Zr0.52Ti0.48)O3 thin films were successfully deposited on platinized silicon substrates and silicon substrates with PbTiO3 seed layer by a modified sol–gel processing. The results show that the films were more likely to grow on platinum substrate, and the PbTiO3 seed layer promoted the grain growth and influenced the crystal orientation of the films. With the annealing temperature and sintering time rising (from 600 °C for 1 h to 700 °C for 2 h) in the new method, the crystal orientation of PZT deposited on Pt substrate with PbTiO3 seed layer changed from (100) to (111), and the grain size increased from dozens to hundreds of nanometer. Meanwhile, its ferroelectric and dielectric properties were greatly improved with 2Pr from 10.78 to 42.12 μC/cm2and εr from 348 to 978, respectively.

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References

  1. J.P.B. Silva, S.A.S. Rodrigues, K.C. Sekhar et al., J. Mater. Sci.: Mater. Electron. 24(12), 5097 (2013)

    Google Scholar 

  2. N. Setter, J. Eur. Ceram. Soc. 21(10), 1279 (2001)

    Article  Google Scholar 

  3. M. Khodaei, S.A.S Ebrahimi, Y.J. Park et al., J. Mater. Sci. Mater. Electron. 24(12), 24(10), 3736 (2013)

  4. L.H. Parker, A.F. Tasch, Circuits and devices magazine. IEEE 6(1), 17 (1990)

    Google Scholar 

  5. H.B. Fang, J.Q. Liu, Z.Y. Xu et al., Microelectron. J. 37(11), 1280 (2006)

    Article  Google Scholar 

  6. J. Zeng, M. Zhang, L. Wang et al., J. Phys.: Condens. Matter 11(4), 1139 (1999)

    Google Scholar 

  7. K. Iijima, Y. Tomita, R. Takayama et al., J. Appl. Phys. 60(1), 361 (1986)

    Article  Google Scholar 

  8. H. Guo, D. Bao, Y. Zhang, Ultrasonics Symposium, 2008. IUS 2008. IEEE, 2130 (2008)

  9. J. Li, C. Wang, J. Ma et al., Microsyst. Technol. 19(2), 211 (2013)

    Article  Google Scholar 

  10. H. Brunckova, Ľ. Medvecký, Ceramics-Silikáty 55(1), 36 (2011)

    Google Scholar 

  11. B.H. Chen, L. Wu, M.C. Chure et al., SPAWDA, 2010 Symposium on. IEEE, 310 (2010)

  12. X.J. Meng, J.G. Cheng, J.L. Sun et al., Thin Solid Films 368(1), 22 (2000)

    Article  Google Scholar 

  13. Z. Chen, C. Yang, B. Li et al., J. Cryst. Growth 285(4), 627 (2005)

    Article  Google Scholar 

  14. J.F. Scott, C.A. Araujo, B.M. Melnick et al., J. Appl. Phys. 70(1), 382 (1991)

    Article  Google Scholar 

  15. K. Wasa, T. Matsushima, Joint UFFC, EFTF and PFM Symposium (2013)

  16. Y.S. Jeong, H.U. Lee, S.A. Lee et al., Curr. Appl. Phys. 9(1), 115 (2009)

    Article  Google Scholar 

  17. D. Kaewchinda, T. Chairaungsri, M. Naksata et al., J. Eur. Ceram. Soc. 20(9), 1277 (2000)

    Article  Google Scholar 

  18. S.B. Majumder, Y.N. Mohapatra, D.C. Agrawal, Ferroelectrics 21(1), 1 (1998)

    Article  Google Scholar 

  19. A. Etin, G.E. Shter, S. Baltianski et al., J. Am. Ceram. Soc. 89(8), 2387 (2006)

    Article  Google Scholar 

  20. T. Kobayashi, M. Ichiki, J. Tsaur et al., Thin Solid Films 489(1), 74 (2005)

    Article  Google Scholar 

  21. S.Y. Chen, I.W. Chen, Thin Solid Films 77(9), 2332 (1994)

    Google Scholar 

  22. Z. Huang, Q. Zhang, R.W. Whatmore, J. Appl. Phys. 85(10), 7355 (1999)

    Article  Google Scholar 

  23. D.A. Tossell, N.M. Shorrocks, J.S. Obhi et al., TfC16. Ferroelectrics 134(1), 297 (1992)

    Article  Google Scholar 

  24. S.Q. Zhang, W.L. Li, N. Li et al., Phys. B 405(11), 2585 (2010)

    Article  Google Scholar 

  25. S. Mhin, K. Nittala, J. Lee et al., J. Am. Ceram. Soc. 97, 2973 (2014)

    Article  Google Scholar 

  26. M.B. Othman, H. Suzuki, K. Murakami et al., Appl. Ferroelectr. 2, 731–734 (1996)

    Google Scholar 

  27. S.K. Pandey, A.R. James, C. Prakash et al., Mater. Sci. Eng. B-Adv. 112(1), 96 (2004)

    Article  Google Scholar 

  28. G.T. Park, C.S. Park, J.J. Choi et al., J. Am. Ceram. Soc. 89(7), 2314 (2006)

    Google Scholar 

  29. M.J. Lefevre, J.S. Speck, R.W. Schwartz et al., J. Mater. Res. 11(08), 2076 (1996)

    Article  Google Scholar 

  30. M. Yaseen, X. Chen, W. Ren et al., Ceram. Int. 39, S471 (2013)

    Article  Google Scholar 

Download references

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Authors and Affiliations

  1. School of Electronic Information Engineering, Tianjin University, Tianjin, 300072, People’s Republic of China

    Mi Xiao, Shida Li & Zhichun Lei

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  1. Mi Xiao
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  2. Shida Li
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  3. Zhichun Lei
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Correspondence to Mi Xiao.

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Xiao, M., Li, S. & Lei, Z. Study of (111)-oriented PZT thin films prepared by a modified sol–gel method. J Mater Sci: Mater Electron 26, 4031–4037 (2015). https://doi.org/10.1007/s10854-015-2941-3

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  • DOI: https://doi.org/10.1007/s10854-015-2941-3

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