Abstract
This paper presents a comprehensive modal analysis of Z-shaped beam electrothermal microactuators for the first time. Both longitudinal and lateral vibrations are taken into account to obtain the vibration equations of the unique geometric feature: a Z-shaped beam with a shuttle in the middle. The natural frequencies and the associated mode shapes of the Z-shaped beams are calculated based on the vibration equations subjected to both boundary and continuity conditions. Finite element simulations are performed using ANSYS software to verify the analytically calculated natural frequencies and mode shapes of the Z-shaped beams. Based on the modal analysis, this paper also investigates the relationship between the natural frequencies and volume scale of the Z-shaped beam electrothermal microactuators. In addition, comprehensive parameter analysis is conducted to provide insights and guidance on designing and optimization of the Z-shaped beam electrothermal microactuators.
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This work was supported by National Natural Science Foundation of China (No. 51575006).
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Zhang, Z., Yu, Y. & Zhang, X. Theoretical modal analysis and parameter study of Z-shaped electrothermal microactuators. Microsyst Technol 24, 3149–3160 (2018). https://doi.org/10.1007/s00542-018-3709-5
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DOI: https://doi.org/10.1007/s00542-018-3709-5