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A broadband grating-coupled silicon nitride waveguide for the mid-IR: characterization and sensitive measurements using an external cavity quantum cascade laser

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Abstract

We present the design and fabrication of a single-mode slab waveguide structure for mid-infrared spectroscopy optimized for broadband coupling. The sensor uses grating couplers for robust off-axis coupling and a silicon nitride guiding layer for mechanical robustness. An external cavity quantum cascade laser-based transmission method is introduced for characterizing the structure’s broadband coupling behavior. Light from an external cavity quantum cascade laser with a spectral range of 0.5 μm around 6 μm was coupled into the waveguide without the need for moving parts. First spectra taken with this sensor are presented.

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Acknowledgments

The authors want to thank Stefan Clara for the fruitful discussions concerning waveguide fabrication. Financial support provided by the Austrian research funding association (FFG) under the scope of the COMET programme within the research network “Process Analytical Chemistry (PAC)” (Contract No. 825340) is gratefully acknowledged.

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Authors and Affiliations

  1. Institute of Chemical Technologies and Analytics, Vienna University of Technology, Getreidemarkt 9/164AC, 1060, Vienna, Austria

    Georg Ramer, Markus Brandstetter & Bernhard Lendl

  2. RECENDT GmbH, Science Park 2, Altenberger Straße 69, 4040, Linz, Austria

    Jürgen Kasberger

  3. Institute for Microelectronics and Microsensors, Johannes Kepler University, Altenberger Straße 69, 4040, Linz, Austria

    Ahmed Saeed & Bernhard Jakoby

Authors
  1. Georg Ramer
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  2. Jürgen Kasberger
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  3. Markus Brandstetter
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  4. Ahmed Saeed
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  5. Bernhard Jakoby
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  6. Bernhard Lendl
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Correspondence to Bernhard Lendl.

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Ramer, G., Kasberger, J., Brandstetter, M. et al. A broadband grating-coupled silicon nitride waveguide for the mid-IR: characterization and sensitive measurements using an external cavity quantum cascade laser. Appl. Phys. B 116, 325–332 (2014). https://doi.org/10.1007/s00340-013-5695-8

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  • DOI: https://doi.org/10.1007/s00340-013-5695-8

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