Abstract
Due to the unique properties of femtosecond laser in precision machining, femtosecond laser was utilized for irradiation on SiC/SiC composites. Effects of different processing parameters, including the spot overlap ratio, helical line overlap ratio, laser processing power, as well as processing steps, were discussed in detail. The results indicated that the parameters above had significant effect on machining of SiC/SiC composites. The surface morphology and geometry of the micro-holes were investigated under different parameters, and the corresponding formation mechanism was discussed in detail. It was believed that both the spot and helical line overlap ratio had great effect on the quality of the micro-holes and would be responsible to the depth of micro-holes. Besides, it is indicated that the higher processing power will lead to a better quality of surface morphology and machining results. In micro-hole drilling process, debris and fragments were observed within the micro-holes, and XPS analysis showed that there existed Si-O bonds and Si-C bonds, indicating that the oxidation during processing was incomplete. In addition, the effect of feeding speeds on geometry and depth of the micro-holes were discussed as well.
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References
Nathal MV, Levine SR (1992) Development of alternative engine materials. J. Superalloys:329–340
Piellisch RJ (1991) Composites move into jet engine design. J Aerosp. Am.(USA) 29(7):18–21
Krenkel W. C/C-Sic Composites for Hot Structures and Advanced Friction Systems[C]//27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: B: Ceramic Engineering and Science Proceedings, Volume 24, Issue 4. John Wiley & Sons, Inc., 2003: 583-592
Xu Y, Cheng L, Zhang L et al (2001) Mechanical properties of 3D fiber reinforced C/SiC composites. J. Mater. Sci. Eng. A 300(1):196–202
Van de Voorde M H, Nedele M R. CMCs: Research in Europe and the Future Potential of CMCs in Industry[C]//Proceedings of the 20th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B: Ceramic Engineering and Science Proceedings, Volume 17, Issue 4. John Wiley & Sons, Inc., 1996: 2-21.
Karnik SR, Gaitonde VN, Rubio JC et al (2008) Delamination analysis in high speed drilling of carbon fiber reinforced plastics (CFRP) using artificial neural network model. J. Mater. Des. 29(9):1768–1776
Jianxin D, Taichiu L (2000) Surface integrity in electro-discharge machining, ultrasonic machining, and diamond saw cutting of ceramic composites. Ceramics International 26(8):825–830
Kovacevic R, Hashish M, Mohan R et al (1997) State of the art of research and development in abrasive waterjet machining. J. Manuf. Sci. Eng. 119(4B):776–785
Li ZC, Jiao Y, Deines TW et al (2005) Rotary ultrasonic machining of ceramic matrix composites: feasibility study and designed experiments. Int. J. Mach. Tools Manuf. 45(12):1402–1411
Davim JP, Reis P (2005) Damage and dimensional precision on milling carbon fiber-reinforced plastics using design experiments. J. Mater. Process. Technol. 160(2):160–167
Yilbas BS, Sami M (1996) Study into the effect of beam waist position on hole formation in the laser drilling process. Proc. Inst. Mech. Eng. B J. Eng. Manuf. 210(3):271–277
Von Allmen M (1976) Laser drilling velocity in metals. J. Appl. Physics 47(12):5460–5463
Chichkov BN, Momma C, Nolte S et al (1996) Femtosecond, picosecond and nanosecond laser ablation of solids. Applied Physics A 63(2):109–115
Hirayama Y, Obara M (2002) Heat effects of metals ablated with femtosecond laser pulses. Appl. Surf. Sci. 197:741–745
Rudolph P, Brzezinka KW, Wäsche R (2003) Physical chemistry of the femtosecond and nanosecond laser–material interaction with SiC and α-SiC–TiC–TiB2 composite ceramic compound. Appl. Surf. Sci. 208:285–291
Dong Y, Molian P (2003) Femtosecond pulsed laser ablation of 3C-SiC thin film on silicon. Appl. Physics A 77(6):839–846
Pronko PP, Dutta SK, Squier J (1995) Machining of sub-micron holes using a femtosecond laser at 800 nm. Opt. Commun. 114(1):106–110
Jeschke HO, Garcia ME, Lenzner M (2002) Laser ablation thresholds of silicon for different pulse durations: theory and experiment. Appl. Surf. Sci. 197:839–844
Jorge D, Luis R (2003) Developments to manufacture structural aeronautical parts in carbon fiber reinforced thermo plastic materials. J Mater Process Technol 143-144:342–346
Naslain R (2004) Design, preparation and properties of non-oxide CMCs for application in engines and nuclear reactors: an overview. Compos Sci Technol 64:155–170
Rudolph P, Brzezinka KW, Wäsche R, Kautek W (2003) Physical chemistry of the femtosecond and nanosecond laser-material interaction with SiC and a SiC-TiC-TiB2 composite ceramic compound. Applied Surface Science. 208-209:285–291
Liu YS, Wang CH, Li WN, Yang XJ, Zhang Q, Cheng LF, Zhang LT (2014) Effect of energy density on the machining character of C/SiC composites by picosecond laser. Appl. Phys. A 116:1221–1228
Liu YS, Wang CH, Li WN, Zhang LT, Yang XJ, Cheng GH, Zhang Q (2014) Effect of energy density and feeding speed on micro-hole drilling in C/SiC composites by picosecond laser. J. Mater. Process. Technol 214:3131–3140
Wang CH, Zhang LT, Liu YS, Cheng GH, Zhang Q, Hua K (2013) Ultra-short pulse laser deep drilling of C/SiC composites in air. Appl Phys A-Mater 111:1213–1221
Zhang RH, Li WN, Liu YS, Wang CH (2015) Machining parameter optimization of C/SiC composites using high power picosecond laser. Applied Surface Science 330:321–331
Fenici AJ, Frias Rebelo RH, Jones A, Kohyama L, Snead L (1998) Current status of SiC/SiC composites R&D. J. Nucl. Mater.:258, 215–263, 225
Hasegawa A, Kohyama A, Jones RH (2000) Critical issues and current status of SiC/SiC composites for fusion. J. Nucl. Mater.:283, 128–287, 137
Filsinger D, Műnz S, Schulz A, Wittig S (2001) Experimental assessment of fiber-reinforced ceramics for combustor walls. J. Eng. Gas Turbines Power 123:271–276
Zhang LT, Cheng LF, Process XYD (2003) in research work of new CMC-SiC, Aeronautical Manufacturing. Technology 1:24–32
Funding
The authors acknowledge the support of the Chinese National Foundation for Natural Sciences (under contract nos. 51472201, 51672217, 51602257, 51602258), Shaanxi International Cooperation and Exchange of Scientific Projects (no. 2015KW-015), International S&T Cooperation Program of China (ISTCP-no. 2014DFA50240), the State Key Laboratory of Advanced Refractories (201501), and the Research Fund of the State Key Laboratory of Solidification Processing (grant no. 120-TZ-2015).
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Liu, Y., Zhang, R., Li, W. et al. Effect of machining parameter on femtosecond laser drilling processing on SiC/SiC composites. Int J Adv Manuf Technol 96, 1795–1811 (2018). https://doi.org/10.1007/s00170-017-1163-7
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DOI: https://doi.org/10.1007/s00170-017-1163-7