Abstract
Micro-stereolithography is a novel micro-manufacturing process that fabricates 3D microstructures by solidifying the photopolymer using a UV laser in a layer-by-layer fashion. In this paper, variation in the photopolymer solidification pattern due to the scanning pattern and pitch of a focused laser beam was investigated experimentally. Also, experiments were conducted to determine the effects of the layer thickness on the solidification width and depth in multi-layer solidification. The experimental results were compared to numerical simulations. The results showed that a zigzag-shaped scanning pattern was faster and more stable than a crank-shaped pattern. It was also determined that the scanning pitch should be selected according to solidification depth and width for a given scanning pattern, and that the layer thickness has little effect on the solidification depth. Based on the results, several microstructures were successfully fabricated, such as a micro-tube with a helical separation wall and a microlink.
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Abbreviations
- P L :
-
The power of the laser beam
- λ :
-
The wavelength of the laser beam
- f :
-
The focal length of the focusing lens
- z :
-
The depth from the surface of photopolymer
- V S :
-
The scanning feed of the laser beam
- W 0(z):
-
The Gaussian half-width of the focused laser beam at a given depth z
- E C :
-
The critical exposure of the photopolymer
- D P :
-
The penetration depth of the photopolymer
- W 0 min :
-
The Gaussian half-width at the focal point
- R :
-
The Gaussian half-width of the laser beam that passes into the focusing lens
- w :
-
The scanning width of the laser beam
- L :
-
The solidified width of the photopolymer
- h :
-
The solidified depth of the photopolymer
- D 1 :
-
The layer thickness
- D 2 :
-
The total solidified depth in a multi-layer solidification
References
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Acknowledgements
This research was supported by the Intelligent Microsystem Centre (IMC; http://www.microsystem.re.kr), which performs one of the 21st Century's Frontier R&D projects; this research was also sponsored by the Korean Ministry of Science and Technology, under the contract project code MS-01-321-01, and sponsored by the Next-Generation New Technology Development Project of the Ministry Of Commerce, Industry and Energy of Korea.
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Lee, I.H., Cho, DW. Micro-stereolithography photopolymer solidification patterns for various laser beam exposure conditions. Int J Adv Manuf Technol 22, 410–416 (2003). https://doi.org/10.1007/s00170-003-1538-9
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DOI: https://doi.org/10.1007/s00170-003-1538-9