Abstract
In this study, the etching of indium tin oxide (ITO) films with various acidic solutions are studied and the activation energies for etching calculated. On the basis of the etching data, a diluent hydrochloric acid is selected for further investigation. The surface morphology of the HCl-etched films are examined. Pinholes resulted from enhanced etching of the grain boundaries are found. Films with larger grains exhibit coarser etched surfaces. The opto-electrical properties of the films are studied and the figure of merits for these films evaluated.
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R. LATZ, K. MICHAEL and M. SCHERER, Jpn. J. Appl. Phys. 30 (1991) L149.
I. HAMBERG, A. HJORTSBERG and C. G. GRANQVIST, Appl. Phys. Lett. 40 (1982) 362.
A. HJORTSBERG, I. HAMBERG and C. G. GRANQVIST, Thin Solid Films 90 (1982) 323.
G. FRANK, E. KAUER and H. KöSTLIN, ibid. Thin Solid Films 77 (1981) 107.
D. K. Schroder, IEEE Trans. Electron Devices ED-25 (1978) 90.
M. HOHEISEL, A. MITWALSKY and C. MROTZEK, Phys. Status Solidi (a) 123 (1991) 461.
B. S. CHIOU and S. T. HSIEH, Thin Solid Films 229 (1993) 146.
W. F. WU and B. S. CHIOU, Appl. Surf. Sci., 68 (1993) 497.
B. S. CHIOU, S. T. HSIEH and W. F. WU, J. Amer. Ceram. Soc. 77 (1994) 1740.
J. ECHIGOYA, S. KATO and H. ENOKI, J. Mater. Sci. Mater. Elec. 3 (1992) 168.
Y. SHIGESATO, S. TAKAKI and T. HARANOU, Appl. Surf. Sci. 48/49 (1991) 269.
M. A. MARTINEZ, J. HERRERO and M. T. GUTIERREZ, Sol. Energy Mater. 26 (1992) 309.
C. V. R. Vasant KUMAR and Abhai MANSINGH, J. Appl. Phys. 65 (1989) 1270.
T. KARASAWA and Y. MIYATA, Thin Solid Films 223 (1993) 135.
B. L. GEHMAN, S. JONSSON, T. RUDOLPH, M. WEIGERT and R. WERNER, ibid. Thin Solid Films 220 (1992) 333.
N. BALASUBRAMANIAN and A. SUBRAHMANYAM, J. Phys. D: Appl. Phys. 22 (1989) 206.
N. MORI, J. Appl. Phys. 73 (1993) 1327.
S. ASHOK, P. P. SHARMA and S. J. FONASH, IEEE Trans. Electron Devices, ED-27 1980) 725.
B. BESSAÏS, N. MLIKI and R. BENNACEUR, Semicond. Sci. Technol. 8 (1993) 116.
M. INOUE, T. MATSUOKA, Y. FUJITA, and A. ABE, Jpn. J. Appl. Phys. 2 (1989) 274.
T. RATCHEVA and M. NANVA, Thin Solid Films 141 (1986) L87.
M. HOHEISEL, A. MITWALSKY and C. MROTZEK, Phys. Stat. Sol. (a) 123 (1991) 461.
Z. CALAHORRA, E. MINAMI, R. M. WHITE and R. S. MULLER, J. Electrochem. Soc. 136 (1989) 1839.
W. F. WU and B. S. CHIOU, Thin Solid Films 247 (1994) 201.
H. NANTO, T. MINAMI, S. ORITO and S. TAKATA, J. Appl. Phys. 63 (1988) 2711.
M. BUCHANAN, J. B. WEBB and D. F. WILLIAMS, Appl. Phys. Lett. 37 (1981) 213.
S. RAY, R. BENERJEE, N. BASU, A. K. BABABYAL and A. K. BARU, J. Appl. Phys. 54 (1983) 3497.
A. MUKHERJEE, Vacuum, 39 (1989) 537.
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Chiou, BS., Lee, JH. Etching of r.f. magnetron-sputtered indium tin oxide films. J Mater Sci: Mater Electron 7, 241–246 (1996). https://doi.org/10.1007/BF00133122
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DOI: https://doi.org/10.1007/BF00133122