Abstract
We propose a novel electron emission type infrared light sensor, which is constructed with a PZT ceramics plate and an Al electrode. A quartz plate separated the Al electrode and a PZT plate. The distance between the Al electrode and the PZT plate kept about 10µm. The PZT plate acts as an infrared light detector and a cathode electrode. The Al electrode is an anode. As the PZT plate was irradiated by infrared light in a vacuum chamber, an anode current was observed, and the anode current was lineally proportional to the incident infrared light power. From these fundamental experiments, the principle of this sensor was confirmed. Using this principle, we fabricated prototype infrared imager. This imager was constructed with the PZT photocathode, a multichannel plate and a fluorescent substrate. An infrared light source was successively taken by this imager.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Reference
M. Niigaki et al, Appl. Phys. Lett, 71, 2493 (1997).
C.A. Spindt et al., IEEE Trans. Electron Devices, 36, 225 (1988).
H.F. Gray et al., Technical Digest of IEDM, 776 (1986).
N. Egami et al., Proceedings of the 2nd International Display Workshop, 1, 11 (1995).
K. Sawada et al., IEEE Trans. Electron Devices, 45, 321 (1998).
A. Ting et al., Technical Digest of 4th Int. Vacuum Microelectronics Conf. (Nagahama, Japan) 200 (1991).
K. Yokoo et al., J. Vac. Sci & Technol. B13, 491 (1995).
T. Hirano et al., J. Vac. Sci & Technol. B14, 3357 (1996).
S. Kanemaru et al., Jpn. J.Appl. Phys., part 1 69, 1577 (1996).
K. Tomita et al., Trans. The institute of Electrical Engineers of Japan, 121-E, (2001) (in press)
G. Rosenman and I. Rez: J. Appl. Phys., 73, 1904 (1993).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2001 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Tomita, K., Takamuro, D., Sawada, K., Ishida, M. (2001). Electron Emission Type Infrared Imaging Sensor Using Ferroelectric Thin Plate. In: Obermeier, E. (eds) Transducers ’01 Eurosensors XV. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_138
Download citation
DOI: https://doi.org/10.1007/978-3-642-59497-7_138
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-42150-4
Online ISBN: 978-3-642-59497-7
eBook Packages: Springer Book Archive