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High-Resolution Electron Microscopy of Semiconductor Heterostructures and Nanostructures

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Semiconductor Research

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 150))

Abstract

This chapter briefly describes the fundamentals of high-resolution electron microscopy techniques. In particular, the Peak Pairs approach for strain mapping with atomic column resolution, and a quantitative procedure to extract atomic column compositional information from Z-contrast high-resolution images are presented. It also reviews the structural, compositional, and strain results obtained by conventional and advanced transmission electron microscopy methods on a number of III–V semiconductor nanostructures and heterostructures.

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Acknowledgements

This work was supported by the European Commission (SANDiE European Network of Excellence NMP4-CT-2004-500101 and COST MP0805), the Spanish MICINN (TEC2005-05781-C03-02/MIC, TEC2008-06756-C03-02/TEC, and CONSOLIDER CSD2009-00013), and the Junta de Andalucía (Ref. P08-TEP-03516 and P09-TEP-5403) with EU-FEDER cofinancing. The authors would like to thank their collaborators and other coauthors of the articles reviewed here (A.G. Taboada, A.J. Papworth, A. Yáñez, B. Alén, D. Fuster, D.G. Morgan, F. de la Pena, J.M. Ripalda, L. González, L. Kirste, M.F. Chisholm, M.H. Du, M.H. Gass, M. Hopkinson, M. Varela, M. Walls, N.D. Browning, O. Ambacher, P.J. Goodhew, Q.M. Ramasse, R. Aidam, S.B. Zhang, S. Hauguth-Frank, S.J. Pennycook, T. Lim, V. Cimalla, V. Lebedev, and Y. González).

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  1. Departamento de Ciencia de los Materiales e I.M. y Q.I., Facultad de Ciencias, Universidad de Cádiz, Campus Río San Pedro, s/n, 11510, Puerto Real, Cádiz, Spain

    David L. Sales, Ana M. Beltrán, Juan G. Lozano, José M. Mánuel, Teresa Ben, Miriam Herrera, Francisco M. Morales, Ana M. Sánchez, David González, Rafael García & Sergio I. Molina

  2. Departamento de Lenguajes y Sistemas Informáticos, Universidad de Cádiz, Campus Río San Pedro, 11510, Puerto Real, Cádiz, Spain

    M. Paz Guerrero-Lebrero, Joaquín Pizarro & Pedro L. Galindo

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  1. David L. Sales
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Correspondence to David L. Sales .

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  1. , School of Physics and Astronomy, The University of Nottingham, University Park, Nottingham, NG7 2RD, Montserrat

    Amalia Patane

  2. , School of Computer Science and, University of Essex, Essex, CO4 3SQ, Montserrat

    Naci Balkan

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Sales, D.L. et al. (2012). High-Resolution Electron Microscopy of Semiconductor Heterostructures and Nanostructures. In: Patane, A., Balkan, N. (eds) Semiconductor Research. Springer Series in Materials Science, vol 150. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-23351-7_2

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