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Modeling of a three-axes MEMS gyroscope with feedforward PI quadrature compensation

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Advances on Mechanics, Design Engineering and Manufacturing

Part of the book series: Lecture Notes in Mechanical Engineering ((LNME))

Abstract

The present paper is focused on the theoretical and experimental analysis of a three-axes MEMS gyroscope, developed by ST Microelectronics, implementing an innovative feedforward PI quadrature compensation architecture. The gyroscopes structure is explained and equations of motion are written; modal shapes and frequencies are obtained by finite element simulations. Electrostatic quadrature compensation strategy is explained focusing on the design of quadrature cancellation electrodes. A new quadrature compensation strategy based on feedforward PI architecture is introduced in this device to take into account variations of device parameters during lifetime. Obtained results show a significant reduction of the quadrature error resulting in a improved performance of the device. Fabrication and test results conclude the work.

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Author information

Authors and Affiliations

  1. Department of Engineering “Enzo Ferrari”, University of Modena and Reggio Emilia, Modena, Italy

    D. Marano

  2. Dipartimento Ingegneria Civile e Architettura, University of Catania, Catania, Italy

    A. Cammarata, G. Fichera & R. Sinatra

  3. ST Microelectronics, Catania, Italy

    D. Prati

Authors
  1. D. Marano
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  2. A. Cammarata
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  3. G. Fichera
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  4. R. Sinatra
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  5. D. Prati
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Corresponding author

Correspondence to A. Cammarata .

Editor information

Editors and Affiliations

  1. Université de Technologie de Compiègne , Compiègne, France

    Benoit Eynard

  2. Dip di Ingegneria Chimica, Gest,Info,Mec, Università degli Studi di Palermo Dip di Ingegneria Chimica, Gest,Info,Mec, Palermo, Italy

    Vincenzo Nigrelli

  3. Dip di Ing, Elet, e Elet, Inform (DIEEI), Università degli Studi di Catania Dip di Ing, Elet, e Elet, Inform (DIEEI), Catania, Italy

    Salvatore Massimo Oliveri

  4. Camino De Vera S/N, Universidad Politecnica de Valencia Camino De Vera S/N, Valencia, Spain

    Guillermo Peris-Fajarnes

  5. Dept of Mechanical Energy and Management, University of Calabria Dept of Mechanical Energy and Management, Rende (Cosenza), Italy

    Sergio Rizzuti

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Marano, D., Cammarata, A., Fichera, G., Sinatra, R., Prati, D. (2017). Modeling of a three-axes MEMS gyroscope with feedforward PI quadrature compensation. In: Eynard, B., Nigrelli, V., Oliveri, S., Peris-Fajarnes, G., Rizzuti, S. (eds) Advances on Mechanics, Design Engineering and Manufacturing . Lecture Notes in Mechanical Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-45781-9_8

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  • DOI: https://doi.org/10.1007/978-3-319-45781-9_8

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-45780-2

  • Online ISBN: 978-3-319-45781-9

  • eBook Packages: EngineeringEngineering (R0)

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