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Silicon Photonic Integrated Circuits

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Abstract

The chapter covers fundamentals of Silicon Photonic ICs including the driving forces, basic physics, technological implementations, current state of the art, ongoing R&D and trends for future research. The treatment includes all relevant devices excluding Silicon Photonics based sources. The chapter comprises specific sections on wavelength selective devices such as delay-line based- and ring resonator-based spectral filters, and covers grating couplers, waveguide-integrated germanium photodetectors, and optical isolators as well. Nonlinear optic devices constitute a more advanced topic, and its coverage includes fundamental aspects and a number of corresponding devices including wavelength converters, all optical amplifiers, phase sensitive amplifiers, and a section on the design of complex Silicon Photonic ICs.

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References

  1. S.E. Miller, Integrated optics: an introduction. Bell Syst. Tech. J. 48(7), 2059–2069 (1969)

    Google Scholar 

  2. R.A. Soref, J.P. Lorenzo, Single-crystal silicon: a new material for 1.3 and 1.6 μm integrated-optical components. Electron. Lett. 21, 953–955 (1985)

    ADS  Google Scholar 

  3. R.A. Soref, B.R. Bennett, Electrooptical effects in silicon. IEEE J. Quantum Electron. 23, 123–129 (1987)

    ADS  Google Scholar 

  4. R.A. Soref, J. Schmidtchen, K. Petermann, Large single-mode rib wave-guides in GeSi–Si and Si-on-SiO2. IEEE J. Quantum Electron. 27(8), 1971–1974 (1991)

    ADS  Google Scholar 

  5. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. Van Thourhout, Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology. J. Lightwave Technol. 23(1), 401–412 (2005)

    ADS  Google Scholar 

  6. S. Selvaraja, P. Jaenen, W. Bogaerts, P. Dumon, D. Van Thourhout, R. Baets, Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193 nm optical lithography. J. Lightwave Technol. 27(18), 4076–4083 (2009)

    ADS  Google Scholar 

  7. S. Selvaraja, P. De Heyn, G. Winroth, P. Ong, G. Lepage, C. Cailler, A. Rigny, K. Bourdelle, W. Bogaerts, D. Van Thourhout, J. Van Campenhout, P. Absil, Highly uniform and low-loss passive silicon photonics devices using a 300 mm CMOS platform, in Opt. Fiber Commun. Conf., (OFC’14), San Francisco, CA, USA (2014), Techn. Digest, paper Th2A.33

    Google Scholar 

  8. W. Bogaerts, P. Dumon, S.K. Selvaraja, D. Van Thourhout, R. Baets, Silicon nanophotonic waveguide circuits and devices, in LEOS Annual Meeting, Newport Beach, CA, USA (2008), paper TuU1

    Google Scholar 

  9. P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, L. Fulbert, Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab. Electron. Lett. 45(12), 581–582 (2009)

    ADS  Google Scholar 

  10. P. Dumon, A. Khanna, Foundry technology and services for Si photonics, in Proc. 18th OptoElectron. Commun. Conf. and Photonics in Switching (OECC/PS), Kyoto, Japan (2013), paper TuN2-3

    Google Scholar 

  11. F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, M. Martinelli, Roughness induced backscattering in optical silicon waveguides. Phys. Rev. Lett. 104(3), 033902 (2010)

    ADS  Google Scholar 

  12. M.A. Webster, R.M. Pafchek, A. Mitchell, T.L. Koch, Width dependence of inherent TM-mode lateral leakage loss in silicon-on-insulator ridge waveguides. IEEE Photonics Technol. Lett. 19(6), 429–431 (2007)

    ADS  Google Scholar 

  13. F. Dell’Olio, V.M. Passaro, Optical sensing by optimized silicon slot waveguides. Opt. Express 15(8), 4977–4993 (2007)

    ADS  Google Scholar 

  14. R. Soref, The past, present, and future of silicon photonics. IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006). doi:10.1109/JSTQE.2006.883151

    Article  ADS  Google Scholar 

  15. M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Mashanovich, G. Roelkens, Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm. Opt. Express 21, 11659–11669 (2013)

    ADS  Google Scholar 

  16. W. Bogaerts, S. Pathak, A. Ruocco, S. Dwivedi, Silicon photonics non-resonant wavelength filters: comparison between AWGs, echelle gratings, and cascaded Mach-Zehnder filters, in Integrated Optics: Devices, Materials, and Technologies XIX (2015). Proc. SPIE, vol. 9365, 93650H

    Google Scholar 

  17. C.K. Madsen, J.H. Zhao, Optical Filter Design and Analysis: A Signal Processing Approach (Wiley, New York, 1999). ISBN 978-0-471-18373-0

    Google Scholar 

  18. K. Yamada, T. Shoji, T. Tsuchizawa, T. Watanabe, J. Takahashi, S. Itabashi, Silicon-wire-based ultrasmall lattice filters with wide free spectral ranges. Opt. Lett. 28, 1663–1664 (2003)

    ADS  Google Scholar 

  19. F. Horst, W.M.J. Green, S. Assefa, S.M. Shank, Y.A. Vlasov, B.J. Offrein, Cascaded Mach-Zehnder wavelength filters in silicon photonics for low loss and flat pass-band WDM (de-)multiplexing. Opt. Express 21(10), 11652–11658 (2013)

    ADS  Google Scholar 

  20. A. Rahim, S. Schwarz, J. Bruns, K. Voigt, G. Winzer, L. Zimmermann, C.G. Schaffer, K. Petermann, Silicon photonic implementation of a scalable O-OFDM demultiplexer. IEEE Photonics Technol. Lett. 25(20), 1977–1980 (2013)

    ADS  Google Scholar 

  21. W. Bogaerts, S.K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, R. Baets, Silicon-on-insulator spectral filters fabricated with CMOS technology. IEEE J. Sel. Top. Quantum Electron. 16(1), 33–44 (2010)

    ADS  Google Scholar 

  22. S. Pathak, P. Dumon, D. Van Thourhout, W. Bogaerts, Comparison of AWGs and echelle gratings for wavelength division multiplexing on silicon-on-insulator. IEEE Photonics J. 6(5), 4900109 (2014)

    Google Scholar 

  23. Q. Fang, T.-Y. Liow, J.F. Song, K.W. Ang, M.B. Yu, G.Q. Lo, D.-L. Kwong, WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability. Opt. Express 18(5), 5106–5113 (2010)

    ADS  Google Scholar 

  24. S. Cheung, S. Tiehui, K. Okamoto, S.J.B. Yoo, Ultra-compact silicon photonic \(512 \times 512\,25\ \mbox{GHz}\) arrayed waveguide grating router. IEEE J. Sel. Top. Quantum Electron. 20(4), 310–316 (2014)

    ADS  Google Scholar 

  25. S. Pathak, D. Van Thourhout, W. Bogaerts, Design trade-offs for silicon-on-insulator-based AWGs for (de)multiplexer applications. Opt. Lett. 38, 2961–2964 (2013)

    ADS  Google Scholar 

  26. K. Okamoto, K. Ishida, Fabrication of silicon reflection-type arrayed-waveguide gratings with distributed Bragg reflectors. Opt. Lett. 38, 3530–3533 (2013)

    ADS  Google Scholar 

  27. K. Okamoto, Wavelength-division multiplexing devices in thin SOI: advances and prospects. IEEE J. Sel. Top. Quantum Electron. 20(4), 248–257 (2014)

    ADS  Google Scholar 

  28. J. Brouckaert, W. Bogaerts, P. Dumon, D. Van Thourhout, R. Baets, Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform. J. Lightwave Technol. 25(5), 1269–1275 (2007)

    ADS  Google Scholar 

  29. F. Horst, W.M.J. Green, B.J. Offrein, Y.A. Vlasov, Silicon-on-insulator echelle grating WDM demultiplexers with two stigmatic points. IEEE Photonics Technol. Lett. 21(23), 1743–1745 (2009)

    ADS  Google Scholar 

  30. J. Brouckaert, W. Bogaerts, S. Selvaraja, P. Dumon, R. Baets, D. Van Thourhout, Planar concave grating demultiplexer with high reflective Bragg reflector facets. IEEE Photonics Technol. Lett. 20(4), 309–311 (2008)

    ADS  Google Scholar 

  31. P. De Heyn, J. De Coster, P. Verheyen, G. Lepage, M. Pantouvaki, P. Absil, W. Bogaerts, J. Van Campenhout, D. Van Thourhout, Fabrication-tolerant four-channel wavelength-division-multiplexing filter based on collectively tuned Si microrings. J. Lightwave Technol. 31(16), 2785–2792 (2013)

    ADS  Google Scholar 

  32. S. Park, K. Kim, I. Kim, G. Kim, Si micro-ring MUX/DeMUX WDM filters. Opt. Express 19, 13531–13539 (2011)

    ADS  Google Scholar 

  33. F. Xia, M. Rooks, L. Sekaric, Y. Vlasov, Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects. Opt. Express 15, 11934–11941 (2007)

    ADS  Google Scholar 

  34. M. Dahlem, C. Holzwarth, A. Khilo, F. Kärtner, H. Smith, E. Ippen, Reconfigurable multi-channel second-order silicon microring-resonator filterbanks for on-chip WDM systems. Opt. Express 19, 306–316 (2011)

    ADS  Google Scholar 

  35. A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, P. De Dobbelaere, A grating-coupler-enabled CMOS photonics platform. IEEE J. Sel. Top. Quantum Electron. 17(3), 597–608 (2011)

    ADS  Google Scholar 

  36. S. Scheerlinck, D. Taillaert, D. Van Thourhout, R. Baets, Flexible metal grating based optical fiber probe for photonic integrated circuits. Appl. Phys. Lett. 92(3), 031104 (2008)

    ADS  Google Scholar 

  37. R. Halir, P. Cheben, S. Janz, D.-X. Xu, Í. Molina-Fernández, J.G. Wangüemert-Pérez, Waveguide grating coupler with subwavelength microstructures. Opt. Lett. 34(9), 1408–1410 (2009)

    ADS  Google Scholar 

  38. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, G. Roelkens, High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform. Opt. Express 18(17), 18278–18283 (2010)

    ADS  Google Scholar 

  39. S.K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. Van Thourhout, R. Baets, Highly efficient grating coupler between optical fiber and silicon photonic circuit, in Conference on Lasers and Electro-Optics (CLEO) Held in Conjunction with the Quantum Electronics and Laser Science Conference (QELS) (2009), paper CTuC6

    Google Scholar 

  40. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T.F. Krauss, R. Baets, Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides. J. Lightwave Technol. 25(1), 151–156 (2007)

    ADS  Google Scholar 

  41. D. Taillaert, P. Bienstman, R. Baets, Compact efficient broadband grating coupler for silicon-on-insulator waveguides. Opt. Lett. 29(23), 2749–2751 (2004)

    ADS  Google Scholar 

  42. L. Caroll, D. Gerace, I. Cristiani, S. Menezo, L.C. Andreani, Broad parameter optimization of polarization-diversity 2D grating couplers for silicon photonics. Opt. Express 21(18), 21556–21568 (2013)

    ADS  Google Scholar 

  43. W. Bogaerts, D. Vermeulen, Off-chip coupling, in Handbook of Silicon Photonics, ed. by L. Vivien, L. Pavesi (CRC–Press, Boca Raton, 2013), pp. 97–138

    Google Scholar 

  44. S. McNab, N. Moll, Y. Vlasov, Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides. Opt. Express 11(22), 2927–2939 (2003)

    ADS  Google Scholar 

  45. T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, Microphotonics devices based on silicon microfabrication technology. IEEE Sel. Top. Quantum Electron. 11(1), 232–240 (2005)

    ADS  Google Scholar 

  46. V.R. Almeida, R.R. Panepucci, M. Lipson, Nanotaper for compact mode conversion. Opt. Lett. 28(15), 1302–1304 (2003)

    ADS  Google Scholar 

  47. G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography. IEEE Photonics Technol. Lett. 17(12), 2613–2615 (2005)

    ADS  Google Scholar 

  48. B. Ben Bakir, A.V. De Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, J.M. Fedeli, Low-Loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers. IEEE Photonics Technol. Lett. 22(11), 739–741 (2010)

    ADS  Google Scholar 

  49. M. Pu, L. Liu, H. Ou, K. Yvind, J.M. Hvam, Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide. Opt. Commun. 283(19), 3678–3682 (2010)

    ADS  Google Scholar 

  50. A. Khilo, M.A. Popović, M. Araghchini, F.X. Kärtner, Efficient planar fiber-to-chip coupler based on two-stage adiabatic evolution. Opt. Express 18(15), 15790–15806 (2010)

    ADS  Google Scholar 

  51. Q. Fang, T.-Y. Liow, J.F. Song, C.W. Tan, M. Bin Yu, G.Q. Lo, D.-L. Kwong, Suspended optical fiber-to-waveguide mode size converter for silicon photonics. Opt. Express 18(8), 7763–7769 (2010)

    ADS  Google Scholar 

  52. P. Sun, R.M. Reano, Cantilever couplers for intra-chip coupling to silicon photonic integrated circuits. Opt. Express 17(6), 4565–4574 (2009)

    ADS  Google Scholar 

  53. M. Wood, P. Sun, R. Reano, Compact cantilever couplers for low-loss fiber coupling to silicon photonic integrated circuits. Opt. Express 20(1), 739–741 (2012)

    Google Scholar 

  54. N. Hatori, T. Shimizu, M. Okano, M. Ishizaka, T. Yamamoto, Y. Urino, M. Mori, T. Nakamura, Y. Arakawa, A hybrid integrated light source on a silicon platform using a trident spot-size converter. J. Lightwave Technol. 32(7), 1329–1336 (2014)

    ADS  Google Scholar 

  55. F.E. Doany, B.G. Lee, S. Assefa, W.M.J. Green, M. Yang, C.L. Schow, C.V. Jahnes, S. Zhang, J. Singer, V.I. Kopp, J.A. Kash, Y.A. Vlasov, Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array. J. Lightwave Technol. 29(4), 475–482 (2011)

    ADS  Google Scholar 

  56. T. Barwicz, Y. Taira, Low-cost interfacing of fibers to nanophotonic waveguides: design for fabrication and assembly tolerances. IEEE Photonics J. 6(4), 6600818 (2014)

    Google Scholar 

  57. I.M. Soganci, A. La Porta, B.J. Offrein, Flip-chip optical couplers with scalable I/O count for silicon photonics. Opt. Express 21(13), 16075–16085 (2013)

    ADS  Google Scholar 

  58. M. Morse, T. Yin, Y. Kang, O. Dosunmu, H.D. Liu, M. Paniccia, G. Sarid, E. Ginsburg, R. Cohen, Y. Saado, R. Shnaiderman, M. Zadka, State of the art Si-based receiver solutions for short reach applications, in Opt. Fiber Commun. Conf. and Nat. Fiber Opt. Eng. Conf. (OFC/NFOEC’09), San Diego, CA, USA (2009), Techn. Digest, paper OMR5

    Google Scholar 

  59. J. Michel, J. Liu, L.C. Kimerling, High performance Ge-on-Si photodetectors. Nat. Photonics 4(8), 527–534 (2010)

    ADS  Google Scholar 

  60. www2.imec.be

  61. R. Loo, G. Wang, L. Souriau, J.C. Lin, S. Takeuchi, G. Brammertz, M. Caymax, High quality Ge virtual substrates on Si wafers with standard STI patterning. J. Electrochem. Soc. 157(1), H13–H21 (2010)

    Google Scholar 

  62. C.T. DeRose, D.C. Trotter, W.A. Zortman, A.L. Starbuck, M. Fisher, M.R. Watts, P.S. Davids, Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current. Opt. Express 19, 24897–24904 (2011)

    ADS  Google Scholar 

  63. S. Liao, N.-N. Feng, D. Feng, P. Dong, R. Shafiiha, C.-C. Kung, H. Liang, W. Qian, Y. Liu, J. Fong, J.E. Cunningham, Y. Luo, M. Asghari, 36 GHz submicron silicon waveguide germanium photodetector. Opt. Express 19, 10967–10972 (2011)

    ADS  Google Scholar 

  64. L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J.M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, J.-M. Fédéli, Zero-bias 40 Gbit/s germanium waveguide photodetector on silicon. Opt. Express 20, 1096–1101 (2012)

    ADS  Google Scholar 

  65. G. Li, Y. Luo, X. Zheng, G. Masini, A. Mekis, S. Sahni, H. Thacker, J. Yao, I. Shubin, K. Raj, J.E. Cunningham, A.V. Krishnamoorthy, Improving CMOS-compatible germanium photodetectors. Opt. Express 20, 26345–26350 (2012)

    ADS  Google Scholar 

  66. P.P. Verheyen, M. Pantouvaki, J. Van Campenhout, P.P. Absil, H. Chen, P. De Heyn, G. Lepage, J. De Coster, P. Dumon, A. Masood, D. Van Thourhout, R. Baets, W. Bogaerts, Highly uniform 25 Gb/s Si photonics platform for high-density, low-power WDM optical interconnects, in Proc. Adv. Photon. Commun, San Diego, CA, USA (2014), paper IW3A.4

    Google Scholar 

  67. Y. Zhang, S. Yang, Y. Yang, M. Gould, N. Ophir, A.E.-J. Lim, G.-Q. Lo, P. Magill, K. Bergman, T. Baehr-Jones, M. Hochberg, A high-responsivity photodetector absent metal-germanium direct contact. Opt. Express 22, 11367–11375 (2014)

    ADS  Google Scholar 

  68. H.-T. Chen, P. Verheyen, P. De Heyn, G. Lepage, J. De Coster, P. Absil, G. Roelkens, J. Van Campenhout, High-responsivity low-voltage 28-Gb/s Ge p–i–n photodetector with silicon contacts. J. Lightwave Technol. 33(4), 820–824 (2015)

    ADS  Google Scholar 

  69. C.R. Doerr, L. Chen, D. Vermeulen, T. Nielsen, S. Azemati, S. Stulz, G. McBrien, X. Xu, B. Mikkelsen, M. Givehchi, C. Rasmussen, S.Y. Park, Single-chip silicon photonics 100-Gb/s coherent transceiver, in Opt. Fiber Commun. Conf. (OFC’14), San Francisco, CA, USA (2014), Techn. Digest, PDP Th5C.1

    Google Scholar 

  70. M. Rakowski, M. Pantouvaki, P. De Heyn, P. Verheyen, M. Ingels, H.-T. Chen, J. De Coster, G. Lepage, B. Snyder, K. De Meyer, M. Steyaert, N. Pavarelli, J.S. Lee, P. O’Brien, P. Absil, J. Van Campenhout, 22.5 a \(4\times20\ \mbox{Gb/s}\) WDM ring-based hybrid CMOS silicon photonics transceiver, in Proc. IEEE Internat. Solid-State Circ. Conf. (ISSCC), San Francisco, CA, USA (2015), pp. 408–409

    Google Scholar 

  71. S. Ghosh, S. Keyvaninia, W. Van Roy, T. Mizumoto, G. Roelkens, R. Baets, A Ce:YIG/silicon-on-insulator waveguide optical isolator realized by adhesive bonding. Opt. Express 20(2), 1839–1848 (2012)

    ADS  Google Scholar 

  72. M.-C. Tien, T. Mizumoto, P. Pintus, H. Kroemer, J.E. Bowers, Silicon ring isolators with bonded nonreciprocal magnetooptic garnets. Opt. Express 19(12), 11740–11745 (2011)

    ADS  Google Scholar 

  73. Y. Shoji, T. Mizumoto, H. Yokoi, I.-W. Hsieh, R.M. Osgood, Magneto-optical isolator with silicon waveguides fabricated by direct bonding. Appl. Phys. Lett. 92(7), 071117 (2008)

    ADS  Google Scholar 

  74. Y. Shoji, M. Ito, Y. Shirato, T. Mizumoto, MZI optical isolator with Si-wire waveguides by surface-activated direct bonding. Opt. Express 20(16), 18440–18448 (2012)

    ADS  Google Scholar 

  75. L. Bi, J. Hu, P. Jiang, D.H. Kim, G.F. Dionne, L.C. Kimerling, C.A. Ross, On-chip optical isolation in monolithically integrated non-reciprocal optical resonators. Nat. Photonics 5, 758–762 (2011)

    ADS  Google Scholar 

  76. C. Doerr, L. Chen, D. Vermeulen, Silicon photonics broadband modulation-based isolator. Opt. Express 22(4), 4493–4498 (2014)

    ADS  Google Scholar 

  77. Z. Yu, S. Fan, Complete optical isolation created by indirect interband photonic transitions. Nat. Photonics 3, 91–94 (2009)

    ADS  Google Scholar 

  78. C. Galland, R. Ding, N. Harris, T. Baehr-Jones, M. Hochberg, Broadband on-chip optical non-reciprocity using phase modulators. Opt. Express 21(12), 14500–14511 (2013)

    ADS  Google Scholar 

  79. B. Peng, S. Ozdemir, F. Lei, F. Monifi, M. Gianfreda, G. Long, S. Fan, F. Nori, C. Bender, L. Yang, Parity-time-symmetric whispering-gallery microcavities. Nat. Phys. 10, 394–398 (2014)

    Google Scholar 

  80. G.P. Agrawal, Nonlinear Fiber Optics, 3rd edn. (Academic Press, San Diego, 2001)

    MATH  Google Scholar 

  81. R.M. Osgood Jr., N.C. Panoiu, J.I. Dadap, X. Liu, X. Chen, I.-W. Hsieh, E. Dulkeith, W.M. Green, Y.A. Vlasov, Engineering nonlinearities in nanoscale optical systems: physics and applications in dispersion-engineered silicon nanophotonic wires. Adv. Opt. Photonics 1(1), 162–235 (2009)

    ADS  Google Scholar 

  82. D.T.H. Tan, K. Ikeda, P.C. Sun, Y. Fainman, Group velocity dispersion and self phase modulation in silicon nitride waveguides. Appl. Phys. Lett. 96(6), 061101 (2010)

    ADS  Google Scholar 

  83. D.J. Moss, R. Morandotti, A.L. Gaeta, M. Lipson, New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics. Nat. Photonics 7, 597–607 (2013)

    ADS  Google Scholar 

  84. M.A. Foster, A.C. Turner, R. Salem, M. Lipson, A.L. Gaeta, Broad-band continuous-wave parametric wavelength conversion in silicon nanowaveguides. Opt. Express 15, 12949–12958 (2007)

    ADS  Google Scholar 

  85. A. Gajda, L. Zimmermann, M. Jazayerifar, G. Winzer, H. Tian, R. Elschner, T. Richter, C. Schubert, B. Tillack, K. Petermann, Highly efficient CW parametric conversion at 1550 nm in SOI waveguides by reverse biased p–i–n junction. Opt. Express 20, 13100–13107 (2012)

    ADS  Google Scholar 

  86. A.C. Turner-Foster, M.A. Foster, J.S. Levy, C.B. Poitras, R. Salem, A.L. Gaeta, M. Lipson, Ultrashort free-carrier lifetime in low-loss silicon nanowaveguides. Opt. Express 18, 3582–3591 (2010)

    ADS  Google Scholar 

  87. M.A. Foster, A.C. Turner, J.E. Sharping, B.S. Schmidt, M. Lipson, A.L. Gaeta, Broad-band optical parametric gain on a silicon photonic chip. Nature 441, 960–963 (2006)

    ADS  Google Scholar 

  88. R. Slavík, F. Parmigiani, J. Kakande, C. Lundström, M. Sjödin, P.A. Andrekson, R. Weerasuriya, S. Sygletos, A.D. Ellis, L. Grüner-Nielsen, D. Jakobsen, S. Herstrom, R. Phelan, J. O’Gorman, A. Bogris, D. Syvridis, S. Dasgupta, P. Petropoulos, D.J. Richardson, All-optical phase and amplitude regenerator for next-generation telecommunications systems. Nat. Photonics 4, 690–695 (2010)

    ADS  Google Scholar 

  89. F.D. Ros, D. Vukovic, A. Gajda, K. Dalgaard, L. Zimmermann, B. Tillack, M. Galili, K. Petermann, C. Peucheret, Phase regeneration of DPSK signals in a silicon waveguide with reverse-biased p–i–n junction. Opt. Express 22, 5029–5036 (2014)

    ADS  Google Scholar 

  90. Y. Zhang, C. Husko, J. Schröder, S. Lefrancois, I. Rey, T. Krauss, B.J. Eggleton, Record 11 dB phase sensitive amplification in sub-millimeter silicon waveguides, in Conf. Lasers Electro-Opt. Pacific Rim (CLEO-PR), Kyoto, Japan (2013), Techn. Digest, paper PD1b-3

    Google Scholar 

  91. S. Clemmen, K. Phan Huy, W. Bogaerts, R.G. Baets, Ph. Emplit, S. Massar, Continuous wave photon pair generation in silicon-on-insulator waveguides and ring resonators. Opt. Express 17(19), 16558–16570 (2009)

    ADS  Google Scholar 

  92. L.K. Oxenløwe, H. Ji, M. Galili, M. Pu, H. Hu, H.C.H. Mulvad, K. Yvind, J.M. Hvam, A. Clausen, P. Jeppesen, Silicon photonics for signal processing of Tbit/s serial data signals. IEEE J. Sel. Top. Quantum Electron. 18(2), 996–1005 (2012)

    ADS  Google Scholar 

  93. F. Li, M. Pelusi, D.X. Xu, A. Densmore, R. Ma, S. Janz, D.J. Moss, Error-free all-optical demultiplexing at 160Gb/s via FWM in a silicon nanowire. Opt. Express 18, 3905–3910 (2010)

    ADS  Google Scholar 

  94. D.J. Moss, R. Morandotti, A.L. Gaeta, M. Lipson, New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics. Nat. Photonics 7, 597–607 (2013)

    ADS  Google Scholar 

  95. H. Jung, C. Xiong, K.Y. Fong, X. Zhang, H.X. Tang, Optical frequency comb generation from aluminum nitride microring resonator. Opt. Lett. 38, 2810–2813 (2013)

    ADS  Google Scholar 

  96. B. Kuyken, S. Clemmen, S.K. Selvaraja, W. Bogaerts, D. Van Thourhout, P. Emplit, S. Massar, G. Roelkens, R. Baets, On-chip parametric amplification with 26.5 dB gain at telecommunication wavelengths using CMOS-compatible hydrogenated amorphous silicon waveguides. Opt. Lett. 36(4), 552–554 (2011)

    ADS  Google Scholar 

  97. K. Narayanan, S.F. Preble, Optical nonlinearities in hydrogenated-amorphous silicon waveguides. Opt. Express 18(9), 8998–9005 (2010)

    ADS  Google Scholar 

  98. Y. Shoji, T. Ogasawara, T. Kamei, Y. Sakakibara, S. Suda, K. Kintaka, H. Kawashima, M. Okano, T. Hasama, H. Ishikawa, M. Mori, Ultrafast nonlinear effects in hydrogenated amorphous silicon wire waveguide. Opt. Express 18(6), 5668–5673 (2010)

    ADS  Google Scholar 

  99. K.-Y. Wang, A.C. Foster, Ultralow power continuous-wave frequency conversion in hydrogenated amorphous silicon waveguides. Opt. Lett. 37(8), 1331–1333 (2012)

    ADS  Google Scholar 

  100. A. Gondarenko, J.S. Levy, M. Lipson, High confinement micron-scale silicon nitride high Q ring resonator. Opt. Express 17(14), 11366–11370 (2009)

    ADS  Google Scholar 

  101. J.S. Levy, A. Gondarenko, M.A. Foster, A.C. Turner-Foster, A.L. Gaeta, M. Lipson, CMOS-compatible multiple wavelength oscillator for on-chip optical interconnects. Nat. Photonics 4(1), 37–40 (2010)

    ADS  Google Scholar 

  102. Y. Okawachi, K. Saha, J.S. Levy, Y.H. Wen, M. Lipson, A.L. Gaeta, Octave-spanning frequency comb generation in a silicon nitride chip. Opt. Lett. 36(17), 3398–3400 (2011)

    ADS  Google Scholar 

  103. R.S. Jacobsen, K.N. Andersen, P.I. Borel, J. Fage-Pedersen, L.H. Frandsen, O. Hansen, M. Kristensen, A.V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, A. Bjarklev, Strained silicon as a new electro-optic material. Nature 411, 199–202 (2006)

    ADS  Google Scholar 

  104. W. Bogaerts, M. Fiers, P. Dumon, Design challenges in silicon photonics. IEEE J. Sel. Top. Quantum Electron. 20(4), 8202008 (2014)

    Google Scholar 

  105. S.K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, R. Baets, Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology. IEEE J. Sel. Topics Quantum Electron. 16(1), 316–324 (2010)

    ADS  Google Scholar 

  106. C. Arellano, S. Mingaleev, I. Koltchanov, A. Richter, J. Pomplun, S. Burger, F. Schmidt, Efficient design of photonic integrated circuits (PICS) by combining device-and circuit-level simulation tools. Proc. SPIE 8627, 862711 (2013)

    Google Scholar 

  107. L. Chrostowski, M. Hochberg, Silicon Photonics Design (Cambridge University Press, Cambridge, 2015)

    Google Scholar 

  108. L.-T. Wang, Y.-W. Chang, K.-T.T. Cheng, Electronic Design Automation: Synthesis, Verification, and Test (Morgan Kaufmann, San Mateo, 2009)

    Google Scholar 

  109. D. Melati, F. Morichetti, A. Canciamilla, D. Roncelli, F. Soares, A. Bakker, A. Melloni, Validation of the building-block-based approach for the design of photonic integrated circuits. J. Lightwave Technol. 30(23), 3610–3616 (2012)

    ADS  Google Scholar 

  110. M. Fiers, T. Van Vaerenbergh, K. Caluwaerts, D. Vande Ginste, B. Schrauwen, J. Dambre, P. Bienstman, Time-domain and frequency-domain modeling of nonlinear optical components at the circuit-level using a node-based approach. J. Opt. Soc. Am. B 29(5), 896–900 (2012)

    ADS  Google Scholar 

  111. C. Arellano, S. Mingaleev, E. Sokolov, I. Koltchanov, A. Richter, Time-and-frequency-domain modeling (TFDM) of hybrid photonic integrated circuits. Proc. SPIE 8265, 82650K (2012)

    ADS  Google Scholar 

  112. P. Gunupudi, T. Smy, J. Klein, Z. Jakubczyk, Self-consistent simulation of opto-electronic circuits using a modified nodal analysis formulation. IEEE Trans. Adv. Packaging 33(4), 979–993 (2010)

    Google Scholar 

  113. T. Weng, Z. Zhang, Z. Su, Y. Marzouk, A. Melloni, L. Daniel, Uncertainty quantification of silicon photonic devices with correlated and non-Gaussian random parameters. Opt. Express 23(4), 4242–4254 (2015)

    ADS  Google Scholar 

  114. M. Fiers, E. Lambert, S. Pathak, P. Dumon, B. Maes, P. Bienstman, W. Bogaerts, Improving the design cycle for nanophotonic components. J. Comput. Sci. 4(5), 313–324 (2013)

    Google Scholar 

  115. W. Bogaerts, P. Dumon, D. Taillaert, V. Wiaux, S. Beckx, B. Luyssaert, J. Van Campenhout, D. Van Thourhout, R. Baets, SOI nanophotonic waveguide structures fabricated with deep UV lithography. Photonics Nanostruct. Fundam. Appl. 2(2), 81–86 (2004)

    ADS  Google Scholar 

  116. X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J.F. Young, N.A.F. Jaeger, L. Chrostowski, Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography, in 9th IEEE Conf. Group IV Photonics, San Diego, CA, USA (2012), paper ThP17

    Google Scholar 

  117. E. Kleijn, M. Smit, X. Leijtens, Analysis of parasitic effects in PICs using circuit simulation. Proc. SPIE 8781, 878104 (2013)

    Google Scholar 

  118. A. Mekis, S. Abdalla, D. Foltz, S. Gloeckner, S. Hovey, S. Jackson, Y. Liang, M. Mack, G. Masini, M. Peterson, T. Pinguet, S. Sahni, M. Sharp, P. Sun, D. Tan, L. Verslegers, B.P. Welch, K. Yokoyama, S. Yu, P.M. De Dobbelaere, A CMOS photonics platform for high-speed optical interconnects, in IEEE Photon. Conf (IPC), San Francisco, CA, USA (2012), pp. 356–357

    Google Scholar 

  119. J. Pond, C. Cone, L. Chrostowski, J. Klein, J. Flueckiger, A. Liu, D. McGuire, X. Wang, A complete design flow for silicon photonics. SPIE Photonics Eur. 9133, 913310 (2014)

    Google Scholar 

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Baets, R. et al. (2017). Silicon Photonic Integrated Circuits. In: Venghaus, H., Grote, N. (eds) Fibre Optic Communication. Springer Series in Optical Sciences, vol 161. Springer, Cham. https://doi.org/10.1007/978-3-319-42367-8_14

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