Abstract
We investigate the dynamics of electrically actuated Micro and Nano (Carbon nanotube (CNT)) cantilever beams implemented as resonant sensors for mass detection of biological elements. The beams are modeled using an Euler-Bernoulli beam theory including the nonlinear electrostatic forces and the added biological elements, which are modeled as a discrete point mass. A multi-mode Galerkin procedure is utilized to derive a reduced-order model, which is used for the dynamic simulations. The frequency shifts due to added mass of Escherichia coli (E. coli) and Prostate Specific Antigen (PSA) are calculated for the primary and higher order modes of vibrations. Also, analytical expressions of the natural frequency shift under dc voltage and added mass have been developed. We found that using higher-order modes of vibration of MEMS beams or miniaturizing the size of the beam to Nano scale leads to significant improved sensitivity.
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References
Wu, G., Datar, R.H., Hansen, K.M., Thundat, T., Cote, R.J., Majumdar, A.: Bioassay of prostate-specific antigen (PSA) using microcantilevers. Nature Biotechnology (2001), doi:10.1038/nbt0901-85
Park, K., Kim, N., Morisette, D.T., Aluru, N.R., Bashir, R.: Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation. Journal of Microelectromechanical Systems (2010), doi:10.1073/pnas.1011365107
Dohn, S., Sandberg, R., Svendsen, W., Boisen, A.: Enhanced functionality of cantilever based mass sensor using higher modes and functionalized particles. In: 2005 IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (2005)
Souayeh, S., Kacem, N.: Computational models for large amplitude nonlinear vibrations of electrostatically actuated carbon nanotube-based mass sensors. Sensors and Actuators A (2014), doi:10.1016/j.sna.2013.12.015
Elishakoff, I., Versaci, C., Maugeri, N., Muscolino, G.: Clamped-free single-walled carbon nanotube-based mass sensor treated as Bernoulli-Euler beam. Journal of Nanotechnology in Engineering and Medicine (2011), doi:10.1115/1.4003734
Ouakad, H.: Nonlinear Structural Mechanics of Micro and Nano Systems (2010)
Aboelkassem, Y., Nayfeh, A.H., Ghommem, M.: Bio-mass sensor using an electrostatically actuated microcantilever in a vacuum microchannel. Microsyst. Technol. (2010), doi:10.1007/s00542-010-1087-8
Ouakad, H., Younis, M.: The dynamic behavior of MEMS arch resonators actuated electrically. International Journal of Non-Linear Mechanics 45, 704–713 (2010), doi:10.1016/j.ijnonlinmec.2010.04.005
Younis, M.I.: MEMS Linear and Nonlinear statics and dynamics. Springer (2011)
Ouakad, H., Younis, M.: Nonlinear Dynamics of Electrically actuated Carbon Nanotube Resonators. Journal of Computational and Nonlinear Dynamics 5, 011009-1 (2010)
Xu, T., Younis, M.I.: An Efficient Reduced-Order Model for the Nonlinear Dynamics of Carbon Nanotubes. In: IDETC 2014 (2013)
Ouakad, H.M., Younis, M.I.: The dynamic behavior of MEMS arch resonators actuated electrically. International Journal of Non-Linear Mechanics (2010), doi:10.1016/j.ijnonlinmec.2010.04.005
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Bouchaala, A.M., Younis, M.I. (2015). A Model of Electrostatically Actuated MEMS and Carbon Nanotubes Resonators for Biological Mass Detection. In: Chouchane, M., Fakhfakh, T., Daly, H., Aifaoui, N., Chaari, F. (eds) Design and Modeling of Mechanical Systems - II. Lecture Notes in Mechanical Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-17527-0_50
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DOI: https://doi.org/10.1007/978-3-319-17527-0_50
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