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Transport and Reaction in Inductively Coupled Plasmas for Microelectronics

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Electron Kinetics and Applications of Glow Discharges

Part of the book series: NATO Science Series: B ((NSSB,volume 367))

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Author information

Authors and Affiliations

  1. Plasma Processing Laboratory Department of Chemical Engineering, University of Houston, Houston, TX, 77204-4792, USA

    D. J. Economou, J. Feldsien & R. S. Wise

Authors
  1. D. J. Economou
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  2. J. Feldsien
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  3. R. S. Wise
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Editors and Affiliations

  1. University of Minnesota, Minneapolis, Minnesota, USA

    Uwe Kortshagen

  2. St. Petersburg State Technical University, St. Petersburg, Russia

    Lev D. Tsendin

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© 2002 Kluwer Academic Publishers

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Economou, D.J., Feldsien, J., Wise, R.S. (2002). Transport and Reaction in Inductively Coupled Plasmas for Microelectronics. In: Kortshagen, U., Tsendin, L.D. (eds) Electron Kinetics and Applications of Glow Discharges. NATO Science Series: B, vol 367. Springer, Boston, MA. https://doi.org/10.1007/0-306-47076-4_22

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  • DOI: https://doi.org/10.1007/0-306-47076-4_22

  • Publisher Name: Springer, Boston, MA

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  • Online ISBN: 978-0-306-47076-9

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