Abstract
Copper lines with widths varying from 150 to 1500 μm were deposited onto crystalline silicon wafers and soda-lime glass plates by cold spraying copper particles with 1 μm average diameter through a mask. This direct deposition method yielded high-aspect-ratio electrodes with minimum shadowing effects and maximum electrode-to-silicon contact area. The copper lines had triangular cross sections with aspect ratios (height/width) ranging from 0.1 to 1.1, depending on the number of spray gun passes. Copper particles were densely packed with increasing the width of the masking slit. This study presents the potential use of the cold spray technology in printing lines as front electrodes in solar cell applications.
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R. Dykhuizen and M. Smith, Gas Dynamic Principles of Cold Spray, J. Therm. Spray Technol., 1998, 7(2), p 205-212
F. Gartner, T. Stoltenhoff, T. Schmidt, and H. Kreye, The Cold Spray Process and Its Potential for Industrial Applications, J. Therm. Spray Technol., 2006, 15(2), p 223-232
T. Schmidt, H. Assadi, F. Gartner, H. Richter, T. Stoltenhoff, H. Kreye, and T. Klassen, From Particle Acceleration to Impact and Bonding in Cold Spraying, J. Therm. Spray Technol., 2009, 18(5), p 794-808
H. Assadi, F. Gärtner, T. Stoltenhoff, and H. Kreye, Bonding Mechanism in Cold Gas Spraying, Acta Mater., 2003, 51(15), p 4379-4394
T. Schmidt, F. Gartner, H. Assadi, and H. Kreye, Development of a Generalized Parameter Window for Cold Spray Deposition, Acta Mater., 2006, 54(3), p 729-742
P. Sudharshan Phani, V. Vishnukanthan, and G. Sundararajan, Effect of Heat Treatment on Properties of Cold Sprayed Nanocrystalline Copper Alumina Coatings, Acta Mater., 2007, 55(14), p 4741-4751
L. Dobrzański and M. Musztyfaga, Effect of the Front Electrode Metallisation Process on Electrical Parameters of a Silicon Solar Cell, J. Achiev. Mater. Manuf. Eng., 2011, 48(2), p 115-144
F.C. Krebs, Polymer Solar Cell Modules Prepared Using Roll-to-Roll Methods: Knife-Over-Edge Coating, Slot-Die Coating and Screen Printing, Sol. Energy Mater. Sol. Cells, 2009, 93(4), p 465-475
L. Dobrzański, M. Musztyfaga, A. Drygała, and P. Panek, Investigation of the Screen Printed Contacts of Silicon Solar Cells Using Transmission Line Model, J. Achiev. Mater. Manuf. Eng., 2010, 41, p 57-65
A.S. Ionkin, B.M. Fish, Z.R. Li, M. Lewittes, P.D. Soper, J.G. Pepin, and A.F. Carroll, Screen-Printable Silver Pastes with Metallic Nano-Zinc and Nano-Zinc Alloys for Crystalline Silicon Photovoltaic Cells, ACS Appl. Mater. Interfaces, 2011, 3(2), p 606-611
M. Ju, Y.-J. Lee, J. Lee, B. Kim, K. Ryu, K. Choi, K. Song, K. Lee, C. Han, Y. Jo, and J. Yi, Double screen printed metallization of crystalline silicon solar cells as low as 30 μm metal line width for mass production, Sol. Energy Mater. Sol. Cells, 2012, 100, p 204-208
S. Gamerith, A. Klug, H. Scheiber, U. Scherf, E. Moderegger, and E.J.W. List, Direct Ink-Jet Printing of Ag-Cu Nanoparticle and Ag-Precursor Based Electrodes for OFET Applications, Adv. Funct. Mater., 2007, 17(16), p 3111-3118
M. Hörteis and S.W. Glunz, Fine Line Printed Silicon Solar Cells Exceeding 20% Efficiency, Prog. Photovolt. Res. Appl., 2008, 16(7), p 555-560
D.Y. Shin, Fabrication of an Inkjet-Printed Seed Pattern with Silver Nanoparticulate Ink on a Textured Silicon Solar Cell Wafer, J. Micromech. Microeng., 2010, 20, p 125003-125012
H.G. Kim, S.B. Cho, B.M. Chung, J.Y. Huh, and S.S. Yoon, Fire-Through Ag Contact Formation for Crystalline Si Solar Cells Using Single-Step Inkjet Printing, J. Nanosci. Nanotechnol., 2012, 12(4), p 3620-3623
M.W. Lee, D.K. Kang, S.S. Yoon, and A.L. Yarin, Coalescence of Two Drops on Partially Wettable Substrates, Langmuir, 2012, 28(8), p 3791-3798
M. Lee, J. Park, D. Kim, S. Yoon, H. Kim, D. Kim, S. James, S. Chandra, T. Coyle, and J. Ryu, Optimization of Supersonic Nozzle Flow for Titanium Dioxide Thin-Film Coating by Aerosol Deposition, J. Aerosol Sci., 2011, 42(11), p 771-780
W.Y. Li, C.J. Li, and H. Liao, Effect of Annealing Treatment on the Microstructure and Properties of Cold-Sprayed Cu Coating, J. Therm. Spray Technol., 2006, 15(2), p 206-211
E. Calla, D. McCartney, and P. Shipway, Effect of Deposition Conditions on the Properties and Annealing Behavior of Cold-Sprayed Copper, J. Therm. Spray Technol., 2006, 15(2), p 255-262
S.H. Zahiri, D. Fraser, S. Gulizia, and M. Jahedi, Effect of Processing Conditions on Porosity Formation in Cold Gas Dynamic Spraying of Copper, J. Therm. Spray Technol., 2006, 15(3), p 422-430
T. Stoltenhoff, C. Borchers, F. Gärtner, and H. Kreye, Microstructures and Key Properties of Cold-Sprayed and Thermally Sprayed Copper Coatings, Surf. Coat. Technol., 2006, 200(16), p 4947-4960
F. Gartner, T. Stoltenhoff, J. Voyer, H. Kreye, S. Riekehr, and M. Kocak, Mechanical Properties of Cold-Sprayed and Thermally Sprayed Copper Coatings, Surf. Coat. Technol., 2006, 200(24), p 6770-6782
P. Sudharshan Phani, D. Srinivasa Rao, S. Joshi, and G. Sundararajan, Effect of Process Parameters and Heat Treatments on Properties of Cold Sprayed Copper Coatings, J. Therm. Spray Technol., 2007, 16(3), p 425-434
T. Kairet, M. Degrez, F. Campana, and J.P. Janssen, Influence of the Powder Size Distribution on the Microstructure of Cold-Sprayed Copper Coatings Studied by X-ray Diffraction, J. Therm. Spray Technol., 2007, 16(5), p 610-618
M. Fukumoto, H. Wada, K. Tanabe, M. Yamada, E. Yamaguchi, A. Niwa, M. Sugimoto, and M. Izawa, Effect of Substrate Temperature on Deposition Behavior of Copper Particles on Substrate Surfaces in the Cold Spray Process, J. Therm. Spray Technol., 2007, 16(5), p 643-650
P.C. King, G. Bae, S.H. Zahiri, M. Jahedi, and C. Lee, An Experimental and Finite Element Study of Cold Spray Copper Impact onto Two Aluminum Substrates, J. Therm. Spray Technol., 2010, 19(3), p 620-634
D. Gilmore, R. Dykhuizen, R. Neiser, M. Smith, and T. Roemer, Particle Velocity and Deposition Efficiency in the Cold Spray Process, J. Therm. Spray Technol., 1999, 8(4), p 576-582
H. Koivuluoto, J. Lagerbom, M. Kylmalahti, and P. Vuoristo, Microstructure and Mechanical Properties of Low-Pressure Cold-Sprayed (LPCS) Coatings, J. Therm. Spray Technol., 2008, 17(5), p 721-727
T. Stoltenhoff, H. Kreye, and H. Richter, An Analysis of the Cold Spray Process and Its Coatings, J. Therm. Spray Technol., 2002, 11(4), p 542-550
H.-J. Kim, C.-H. Lee, and S.-Y. Hwang, Fabrication of WC-Co Coatings by Cold Spray Deposition, Surf. Coat. Technol., 2005, 191(2-3), p 335-340
A. Alkhimov, V. Kosarev, and S. Klinkov, The Features of Cold Spray Nozzle Design, J. Therm. Spray Technol., 2001, 10(2), p 375-381
F. Raletz, M. Vardelle, and G. Ezo’o, Critical Particle Velocity Under Cold Spray Conditions, Surf. Coat. Technol., 2006, 201(5), p 1942-1947
R. Dykhuizen, M. Smith, D. Gilmore, R. Neiser, X. Jiang, and S. Sampath, Impact of High Velocity Cold Spray Particles, J. Therm. Spray Technol., 1999, 8(4), p 559-564
C. Borchers, F. Gartner, T. Stoltenhoff, H. Assadi, and H. Kreye, Microstructural and Macroscopic Properties of Cold Sprayed Copper Coatings, J. Appl. Phys., 2003, 93, p 10064
C. Borchers, F. Gärtner, T. Stoltenhoff, and H. Kreye, Formation of Persistent Dislocation Loops by Ultra-high Strain-Rate Deformation During Cold Spraying, Acta Mater., 2005, 53(10), p 2991-3000
J. Wu, H. Fang, S. Yoon, H. Kim, and C. Lee, The Rebound Phenomenon in Kinetic Spraying Deposition, Scripta Mater., 2006, 54(4), p 665-669
K. Kim, M. Watanabe, J. Kawakita, and S. Kuroda, Grain Refinement in a Single Titanium Powder Particle Impacted at High Velocity, Scripta Mater., 2008, 59(7), p 768-771
K.H. Kim, M. Watanabe, K. Mitsuishi, K. Iakoubovskii, and S. Kuroda, Impact Bonding and Rebounding Between Kinetically Sprayed Titanium Particle and Steel Substrate Revealed by High-Resolution Electron Microscopy, J. Phys. D Appl. Phys., 2009, 42, p 065304
K.H. Kim, M. Watanabe, and S. Kuroda, Jetting-Out Phenomenon Associated with Bonding of Warm-Sprayed Titanium Particles onto Steel Substrate, J. Therm. Spray Technol., 2009, 18(4), p 490-499
K.H. Kim, M. Watanabe, and S. Kuroda, Thermal Softening Effect on the Deposition Efficiency and Microstructure of Warm Sprayed Metallic Powder, Scripta Mater., 2009, 60(8), p 710-713
J. Pattison, S. Celotto, A. Khan, and W. O’Neill, Standoff Distance and Bow Shock Phenomena in the Cold Spray Process, Surf. Coat. Technol., 2008, 202(8), p 1443-1454
B. Jodoin, Cold Spray Nozzle Mach Number Limitation, J. Therm. Spray Technol., 2002, 11(4), p 496-507
J.J. Park, M.W. Lee, S.S. Yoon, H.Y. Kim, S.C. James, S.D. Heister, S. Chandra, W.H. Yoon, D.S. Park, and J. Ryu, Supersonic Nozzle Flow Simulations for Particle Coating Applications: Effects of Shockwaves, Nozzle Geometry, Ambient Pressure, and Substrate Location upon Flow Characteristics, J. Therm. Spray Technol., 2011, 20, p 514-522
P. Benjamin and C. Weaver, Adhesion of Metal Films to Glass, Proc. R. Soc. Lond. A, 1960, 254(1277), p 177-183
P. Benjamin and C. Weaver, The Adhesion of Evaporated Metal Films on Glass, Proc. R. Soc. Lond. A, 1961, 261(1307), p 516-531
C. Li, W. Li, and H. Liao, Examination of the Critical Velocity for Deposition of Particles in Cold Spraying, J. Therm. Spray Technol., 2006, 15(2), p 212-222
P. Chernavskii, N. Peskov, A. Mugtasimov, and V. Lunin, Oxidation of Metal Nanoparticles: Experiment and Model, Russ. J. Phys. Chem. B, 2007, 1(4), p 394-411
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This work was supported by the Human Resources Development of the Korea Institute of Energy Technology Evaluation and Planning (KETEP, No. 20104010100640), and the Converging Research Center Program through the Ministry of Education, Science and Technology (2010K000969).
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Kim, DY., Park, JJ., Lee, JG. et al. Cold Spray Deposition of Copper Electrodes on Silicon and Glass Substrates. J Therm Spray Tech 22, 1092–1102 (2013). https://doi.org/10.1007/s11666-013-9953-4
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DOI: https://doi.org/10.1007/s11666-013-9953-4