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Three-Dimensional Fabrication of Micro-/Nanostructure Using Scanning Probe Lithography

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Book cover Micro and Nano Fabrication Technology

Part of the book series: Micro/Nano Technologies ((MNT))

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Abstract

As one of the tip-based nanofabrication approaches, the atomic force microscope (AFM) tip-based nanomechanical machining method has been successfully utilized to fabricate three-dimensional (3D) nanostructure. First, the principle of AFM tip-based mechanical nanomachining is introduced, which includes contact and tapping modes. Second, fabrication of 3D nanostructure by material removal is presented. This part contains force- and feed-control approaches. Third, ripple-type nanostructure machined with stick-slip process is described. This method is usually implemented on the polymer materials. Finally, a novel machining method combining the material pileup and the machined groove to form a 3D nanostructure is presented. It is expected that this chapter will serve to aid in the advance of the fabrication of 3D nanostructure and expand its applications in various fields.

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Authors and Affiliations

  1. Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, China

    Yanquan Geng & Yongda Yan

Authors
  1. Yanquan Geng
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  2. Yongda Yan
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Corresponding author

Correspondence to Yongda Yan .

Editor information

Editors and Affiliations

  1. Department of Mechanical Engineering, Keio University, Yokohama, Japan

    Jiwang Yan

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Geng, Y., Yan, Y. (2018). Three-Dimensional Fabrication of Micro-/Nanostructure Using Scanning Probe Lithography. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies. Springer, Singapore. https://doi.org/10.1007/978-981-13-0098-1_13

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