Abstract
As one of the tip-based nanofabrication approaches, the atomic force microscope (AFM) tip-based nanomechanical machining method has been successfully utilized to fabricate three-dimensional (3D) nanostructure. First, the principle of AFM tip-based mechanical nanomachining is introduced, which includes contact and tapping modes. Second, fabrication of 3D nanostructure by material removal is presented. This part contains force- and feed-control approaches. Third, ripple-type nanostructure machined with stick-slip process is described. This method is usually implemented on the polymer materials. Finally, a novel machining method combining the material pileup and the machined groove to form a 3D nanostructure is presented. It is expected that this chapter will serve to aid in the advance of the fabrication of 3D nanostructure and expand its applications in various fields.
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Geng, Y., Yan, Y. (2018). Three-Dimensional Fabrication of Micro-/Nanostructure Using Scanning Probe Lithography. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies. Springer, Singapore. https://doi.org/10.1007/978-981-13-0098-1_13
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DOI: https://doi.org/10.1007/978-981-13-0098-1_13
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