Precision Grinding for Functional Microstructured Surface

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Part of the Micro/Nano Technologies book series (MNT, volume 1)


The microstructure surface can produce new functions and features compared to smooth surface in industry. Accordingly, the accurate and smooth microstructures may display predominant surface function on high-performance materials such as silicon, optical glass, ceramics, and so on. However, it is difficult to control the micron-scale structured profiles in micro-machining of these difficult-to-cut materials. Hence, the micro-grinding with a superhard diamond wheel micro-tip is proposed to fabricate the microgroove array on silicon and glass. In order to assure the profile accuracy of diamond wheel micro-tip, the mechanical truing and the electro-contact discharge (ECD) truing were developed to control the form accuracy and the micro grain protrusions of diamond wheel micro-tip on machine, respectively. ECD truing can improve the truing efficiency by about 59 times against mechanical truing. Then, the on-machine micro truing was employed in micro-grinding of microgroove array on optic glass, silicon, and quartz glass, respectively. In the micro-grinding, the accurate and smooth microstructured array may be achieved through on-machine dressing and ductile-mode grinding. The micro-ground form error, surface roughness, and micro-tip radius may reach 0.7–6%,40–60 nm, and 4–8 μm, respectively. When the microlens array were ground on macro curved optical glass, it may increase the electricity generation by 260–419% against traditional plane surface and by 119–106% against general microlens array, respectively. Through micro-grinding, the accurate microgroove array on silicon may enhance the contact angle by 106% against the irregular microgrooved surface. Moreover, the accurate and gradient microgroove array may lead to the droplet self-movement. In micro-grinding of accurate microchannels on microfluidic chip of quartz glass, large microchannel gradient, small microchannel angle, and small surface roughness may increase the microfluidic flowing speed. Moreover, the glass microchannel with nano-scale cracks may improve the flowing speed by about 40 times against the polymer one without any cracks.


Micro-grinding Diamond wheel Microstructure Surface function 


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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.School of Mechanical & Automotive EngineeringSouth China University of TechnologyGuangzhouChina

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