Micro Cylindrical Turning of Calcium Fluoride

  • Yasuhiro Kakinuma
  • Yuta Mizumoto
Living reference work entry

Later version available View entry history

Part of the Micro/Nano Technologies book series (MNT, volume 1)


Single-crystalline CaF2 is one of the key materials for next-generation micro-optical devices, such as optical microcavities, because of its excellent performance in a wide range of wavelength regimes. Nevertheless, typical chemical processes such as etching are not applicable to the fabrication process in this case, because the material has crystal anisotropy and a complex shape is required. The most feasible and promising approach is ultra-precision cutting. Here, the machinability of CaF2 in micro cylindrical turning and its influence on surface integrity are described based on detailed experimental results. It is clarified that the machined surface integrity varies in dependency with cutting crystalline planes and directions, and the surface morphology, surface roughness, and critical depth of cut change according to its crystalline structure.


Single-crystalline CaF2 Ultra-precision cutting Cylindrical turning Crystal anisotoropy Subsurface damage 


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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of System Design EngineeringKeio UniversityYokohamaJapan

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