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Bonnet Polishing of Microstructured Surface

  • Lingbao Kong
  • Zhongchen Cao
  • Laiting Ho
Living reference work entry

Later version available View entry history

Part of the Micro/Nano Technologies book series (MNT, volume 1)

Abstract

Microstructured surfaces have been adopted in various and wide applications. Different types of microstructures made of ductile materials can be generated by cutting process, for example, turning and milling with specified diamond cutters. However, these processes generally are not capable to handle with hard and brittle materials which are called difficult-to-machine materials. Computer-controlled ultra-precision polishing with bonnet provides an enabling solution to generate microstructures due to its feasible influence function. With proper machining parameters, specified shape of the tool influence function is hence obtained, and then with aid of tool path planning, microstructured surface topography is generated, especially for those difficult-to-machine materials. In this chapter, research work for generating microstructured surface by computer-controlled ultra-precision bonnet polishing is presented. The material removal characteristics and tool influence function of bonnet polishing are explained, and a multi-scale material removal model and a surface generation model were developed. Surface generation of microstructures by single precess polishing and swing precess polishing is explained in details. A series of simulation and real polishing experimental studies are undertaken based on a seven-axis ultra-precision freeform polishing machine. The generated microstructured surfaces with various patterns have been analyzed. The research results have demonstrated that the proposed bonnet polishing provides an enabling and effective approach for generating microstructured surfaces.

Keywords

Ultra-precision machining Computer controlled polishing Bonnet polishing Microstructured surface Influence function Precess polishing Difficult-to-machine material Multi-scale material removal Surface generation Modelling Simulation 

References

  1. Beaucamp A, Namba Y S-s (2013) finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing. CIRP Ann Manuf Technol 62:315–318CrossRefGoogle Scholar
  2. Bechert DW, Bruse M, Hage W, Meyer R (2000) Fluid mechanics of biological surfaces and their technological application. Naturwissenschaften 87:157–171CrossRefGoogle Scholar
  3. Beckstette K, Kuechel M, Heynacher E (1989) Large mirror figuring and testing. Astrophys Space Sci 160(October (1–2)):207–214CrossRefGoogle Scholar
  4. Besl PJ, Mckay ND (1992) A method for registration of 3-D shapes. IEEE Trans Pattern Anal Mach Intell 14:239–256CrossRefGoogle Scholar
  5. Bingham RG, Walker DD, Kim DH, Brooks D, Freeman R, Riley DA (2000) Novel automated process for aspheric surfaces. Curr Dev Lens Des Opt Sys Eng 4093:445–450Google Scholar
  6. Bingley MS, Schnee S (2005) A study of the mechanisms of abrasive wear for ductile metals under wet and dry three-body conditions. Wear 258:50–61CrossRefGoogle Scholar
  7. Brilliantov NV, Poschel T (1998) Rolling friction of a viscous sphere on a hard plane. Europhys Lett 42:511–516CrossRefGoogle Scholar
  8. Brinkmann S, Bodschwinna H, Lemke HW (2001) Accessing roughness in three-dimensions using Gaussian regression filtering. Int J Mach Tool Manu 41:2153–2161CrossRefGoogle Scholar
  9. Cao ZC, Cheung CF (2016) Multi-scale modeling and simulation of material removal characteristics in computer-controlled bonnet polishing. Int J Mech Sci 106:147–156CrossRefGoogle Scholar
  10. Cao ZC, Cheung CF, Ren MJ (2016) Modelling characterization of surface generation in Fluid Jet Polishing. Precis Eng 43:406–417CrossRefGoogle Scholar
  11. Carter G, Nobes MJ, Katardjiev IV (1993) The theory of ion beam polishing and machining. Vacuum 44(3/4):303–309CrossRefGoogle Scholar
  12. Challen JM, Oxley PLB (1979) An explanation of the different regimes of friction and wear using asperity deformation models. Wear 53:229–243CrossRefGoogle Scholar
  13. Charlton P, Blunt L (2008) Surface and form metrology of polished “freeform” biological surfaces. Wear 264:394–399CrossRefGoogle Scholar
  14. Chen PY, Jywe WY, Wang MS, Wu CH (2016) Application of blue laser direct-writing equipment for manufacturing of periodic and aperiodic nanostructure patterns. Precis Eng 46:263–269CrossRefGoogle Scholar
  15. Cheung CF, Ho LT, Charlton P, Kong LB, To S, Lee WB (2010) Analysis of surface generation in the ultraprecision polishing of freeform surfaces. Proc Inst Mech Eng B J Eng Manuf 224:59–73CrossRefGoogle Scholar
  16. Cheung CF, Kong LB, Ho LT, To S (2011) Modelling and simulation of structure surface generation using computer controlled ultra-precision polishing. Precis Eng 35:574–590CrossRefGoogle Scholar
  17. Egashira K, Kumagai R, Okina R, Yamaguchi K, Ota M (2014) Drilling of microholes down to 10 μm in diameter using ultrasonic grinding. Precis Eng 38:605–610CrossRefGoogle Scholar
  18. Evans CJ, Paul E, Dornfeld D, Lucca DA, Byrne G, Tricard M et al (2003) Material removal mechanisms in lapping and polishing. Cirp Ann Manuf Technol 52:611–633CrossRefGoogle Scholar
  19. Fähnle OW, van Brug H, Frankena HJ (1998) Fluid jet polishing of optical surfaces. Appl Opt 37(28):6771–6773CrossRefGoogle Scholar
  20. Fu GH, Chandra A, Guha S, Subhash G (2001) A plasticity-based model of material removal in chemical-mechanical polishing (CMP). IEEE Trans Semicond Manuf 14:406–417CrossRefGoogle Scholar
  21. Gee AE (1996) Modelling the mechanics of free particulate abrasive polishing from the viewpoint of single-point processes. SPIE 2775:611–618Google Scholar
  22. Greenwood J, Williamson J (1966) Contact of nominally flat surfaces. Proc R Soc Lond A Math Phys Sci 295:300–319CrossRefGoogle Scholar
  23. Hokkirigawa K, Kato K (1988) An experimental and theoretical investigation of ploughing, cutting and wedge formation during abrasive wear. Tribol Int 21:51–57CrossRefGoogle Scholar
  24. Hutchings IM (1992) Tribology: friction and wear of engineering materials. Arnold, LondonGoogle Scholar
  25. Hutchings IM (1993) Mechanisms of wear in powder technology – a review. Powder Technol 76:3–13CrossRefGoogle Scholar
  26. Johansen LS, Ginnerup M, Ravnkilde JT, Tang PT, Lochel B (2000) Electroforming of 3D microstructures on highly structured surfaces. Sensors Actuators A Phys 83:156–160CrossRefGoogle Scholar
  27. Johnson KL (1987) Contact mechanics. Cambridge University Press, CambridgezbMATHGoogle Scholar
  28. Johnson LF, Ingersoll KA (1983) Ion polishing with the aid of a planarizing film. Appl Opt 22(8):1165–1167CrossRefGoogle Scholar
  29. Kim S, Saka N, Chun JH, Shin SH (2013) Modeling and mitigation of pad scratching in chemical–mechanical polishing. CIRP Ann Manuf Technol 62:307–310CrossRefGoogle Scholar
  30. Kim S, Saka N, Chun J-H (2014) The effect of pad-asperity curvature on material removal rate in chemical-mechanical polishing. Procedia CIRP 14:42–47CrossRefGoogle Scholar
  31. Kumar S, Jain VK, Sidpara A (2015) Nanofinishing of freeform surfaces (knee joint implant) by rotational-magnetorheological abrasive flow finishing (R-MRAFF) process. Precis Eng 42:165–178CrossRefGoogle Scholar
  32. Landau LD, Lifshitz EM (1959) Theory of elasticity. Pergamon Press, LondonzbMATHGoogle Scholar
  33. Luo JF, Dornfeld DA (2001) Material removal mechanism in chemical mechanical polishing: theory and modeling. IEEE Trans Semicond Manuf 14:112–133CrossRefGoogle Scholar
  34. Luo JF, Dornfeld DA (2003) Effects of abrasive size distribution in chemical mechanical planarization: modeling and verification. IEEE Trans Semicond Manuf 16:469–476CrossRefGoogle Scholar
  35. Namba Y, Shimomura T, Fushiki A, Beaucamp A, Inasaki I, Kunieda H et al (2008) Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications. Cirp Ann Manuf Technol 57:337–340CrossRefGoogle Scholar
  36. Preston FW (1927) The theory and design of plate glass polishing machines. J Soc Glas Technol 11:214–256Google Scholar
  37. Ren MJ, Cheung CF, Kong LB (2012) A task specific uncertainty analysis method for least-squares-based form characterization of ultra-precision freeform surfaces. Meas Sci Technol 23:054005CrossRefGoogle Scholar
  38. Saka N, Eusner T, Chun JH (2010) Scratching by pad asperities in chemical–mechanical polishing. CIRP Ann Manuf Technol 59:329–332CrossRefGoogle Scholar
  39. Schaller T, Bohn L, Mayer J, Schubert K (1999) Microstructure grooves with a width of less than 50 μm cut with ground hard metal micro end mills. Precis Eng 23:229–235CrossRefGoogle Scholar
  40. Schinhaerl M, Rascher R, Stamp R, Smith G, Smith L, Pitschke E, Sperber P (2007) Filter algorithm for influence functions in the computer controlled polishing of high-quality optical lenses. Int J Mach Tool Manu 47:107–111CrossRefGoogle Scholar
  41. Schinhaerl M, Smith G, Stamp R, Rascher R, Smith L, Pitschke E et al (2008a) Mathematical modelling of influence functions in computer-controlled polishing: part I. Appl Math Model 32(12):2888–2906CrossRefGoogle Scholar
  42. Schinhaerl M, Smith G, Stamp R, Rascher R, Smith L, Pitschke E et al (2008b) Mathematical modelling of influence functions in computer-controlled polishing: part II. Appl Math Model 32(12):2907–2924CrossRefGoogle Scholar
  43. Shen JC, Jywe WY, Wu CH (2014) Control of an equipment for fabricating periodic nanostructure. Precis Eng 38:391–397CrossRefGoogle Scholar
  44. Shiou FJ, Ciou HS (2008) Ultra-precision surface finish of the hardened stainless mold steel using vibration-assisted ball polishing process. Int J Mach Tool Manu 48:721–732CrossRefGoogle Scholar
  45. Stout KJ, Blunt L (2001) A contribution to the debate on surface classifications – random, systematic, unstructured, structured and engineered. Int J Mach Tool Manu 41:2039–2044CrossRefGoogle Scholar
  46. Sudarshan TS (1995) Polishing of diamond films – a review. In: Jeandin TS, Sudarshan M (eds) Surface modification technologies VIII. The Institute of Materials, LondonGoogle Scholar
  47. Tam HY, Cheng HB (2010) An investigation of the effects of the tool path on the removal of material in polishing. J Mater Process Technol 210:807–818CrossRefGoogle Scholar
  48. Tam HY, Lui OCH, Mok ACK (1999) Robotic polishing of free-form surfaces using scanning paths. J Mater Process Technol 95:191–200CrossRefGoogle Scholar
  49. Wakuda M, Yamauchi Y, Kanzaki S, Yasuda Y (2003) Effect of surface texturing on friction reduction between ceramic and steel materials under lubricated sliding contact. Wear 254:356–363CrossRefGoogle Scholar
  50. Walker DD, Brooks D, Freedman R, King A, McCavana G, Morton R, Riley D, Simms J 2000 First aspheric form and texture results from a production machine embodying the precessions process. In: Optical manufacturing and testing IV, Proceedings of SPIE, vol 4451, pp 267–76Google Scholar
  51. Walker DD, Brooks D, Freeman R, King A, McCavana G, Morton R, Riley D, Simms J (2001) The first aspheric form and texture results from a production machine embodying the precession process. In: Optical manufacturing and testing, vol 4451, pp 267–276Google Scholar
  52. Walker DD, Beaucamp ATH, Brooks D, Freeman R, King A, McCavana G, Morten R, Riley D, Simms J (2002a) Novel CNC polishing process for control of form and texture on aspheric surfaces. Curr Dev Lens Des Opt Eng III 4767:99–105Google Scholar
  53. Walker DD, Freeman R, McCavana G, Morton R, Riley D, Simms J, Brooks D, Kim ED, King A (2002b) The Zeeko/UCL process for polishing large lenses and prisms. Large Lens Prism 4411:106–111CrossRefGoogle Scholar
  54. Walker DD, Beaucamp AT, Bingham RG, Brooks D, Freeman R, Kim SW, King AM, McCavana G, Morton R, Riley D, Simms J 2002c Precessions process for efficient production of aspheric optics for large telescopes and their instrumentation. In: Atad-Ettedgui E, D’Odorico S (eds) Specialized optical developments in astronomy, Proceedings of SPIE, vol 4842, pp 73–84Google Scholar
  55. Walker DD, Brooks D, King A, Freeman R, Morton R, McCavana G, Kim S-W (2003) The ‘Precessions’ tooling for polishing and figuring flat, spherical and aspheric surfaces. Opt Express 11(8):958–964CrossRefGoogle Scholar
  56. Williams CK, Rasmussen CE (2006) Gaussian processes for machine learning, vol 2. MIT Press, Cambridge, MA, p 4zbMATHGoogle Scholar
  57. Xi F, Zhou D (2005) Modelling surface roughness in the stone polishing process. Int J Mach Tool Manu 45:365–372CrossRefGoogle Scholar
  58. Zeng SY, Blunt L (2014) Experimental investigation and analytical modelling of the effects of process parameters on material removal rate for bonnet polishing of cobalt chrome alloy. Precis Eng 38:348–355CrossRefGoogle Scholar
  59. Zhao T, Grogan DF, Bovard BG, Macleod HA 1990 Diamond film polishing with argon and oxygen ion beams. In: Diamond optics III, SPIE proceedings, vol 1325, pp 142–51Google Scholar
  60. Zheng QJ, Zhu HP, Yu AB (2011) Finite element analysis of the rolling friction of a viscous particle on a rigid plane. Powder Technol 207:401–406CrossRefGoogle Scholar
  61. Zhou H, Shan HY, Tong X, Zhang ZH, Ren LQ (2006) The adhesion of bionic non-smooth characteristics on sample surfaces against parts. Mater Sci Eng A 417:190–196CrossRefGoogle Scholar
  62. Zhu HT, Huang CZ, Wang J, Li QL, Che CL (2009) Experimental study on abrasive waterjet polishing for hard–brittle materials. Int J Mach Tools Manuf 49(78):569CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Shanghai Engineering Research Center of Ultra-Precision Optical ManufacturingFudan UniversityShanghaiChina
  2. 2.Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of EducationTianjin UniversityTianjinChina
  3. 3.Partner State Key Laboratory of Ultra-Precision Machining TechnologyThe Hong Kong Polytechnic UniversityHung HomHong Kong

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