Abstract
Micro-probing system has become a remarkable technique for the dimensional measurement of complex micrometric features on the micro-parts and precision tools. In especial, the tactile micro-probes are one of the most effective micro-probing systems since the miniaturized micro-stylus and high-sensitive probing sensor of the micro-probing systems allows both the capability of three-dimensional accessibility and nanometric resolution for the complex micrometric features. Therefore, there have been many efforts for the miniaturization of the stylus size with high-accuracy tip shape. In addition, since high sensitivity of the tactile micro-probing system is influenced by the external interaction force which has been ignored in the previous probing systems, new principle of the probing sensor and novel calibration method of the micro-probing system have been required.
On the other hand, the probe tip ball of the micro-probing systems is composed with the high-accuracy microsphere, so that their diameter is smaller than the micrometric features of the measuring workpiece generally in order to realize good accessibility for complex features. Therefore, precise qualification of the probe tip dimension is also important issues for the calibration of the micro-probing system because the uncertainty of the dimensional measurement is also affected by the geometrical tolerance of the probe tip shape. The uncertainty of the micro-dimensional measurement is dominated not only by the reliability of the micro-probe and the probe positioning instruments as well as the conventional probing system but also by the nanometer-scale deformation of the surface and the nanometric dimension of probe tip. In this chapter, a high-sensitive micro-probing system utilizing the local interaction force has been described. With respect to the compensation of the geometrical tolerance of the tip of the micro-probing system, an online qualification method has been introduced. Finally, dimensional measurement of micrometric feature by a micro-probing system is described, and its measurement results are investigated according to the uncertainty analysis.
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Ito, S. (2019). Micro-dimensional Measurement by a Micro-probing System. In: Gao, W. (eds) Metrology. Precision Manufacturing. Springer, Singapore. https://doi.org/10.1007/978-981-10-4912-5_11-1
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DOI: https://doi.org/10.1007/978-981-10-4912-5_11-1
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