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Behavior Modeling and Simulation of an Inertial Sensor

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Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT,volume 2))

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Abstract

Two macromodeling techniques for inertial sensors are discussed in this chapter. The first one is a parametric model order reduction (PMOR) method based on the implicit moment matching to accommodate the parameter variation. The second one is the trajectory piecewise-linear (TPWL) method which is developed for dealing with the strong nonlinearity. For each technique, its effectiveness is demonstrated by the applications to read devices characterization.

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Authors and Affiliations

  1. MOE Key Laboratory of Micro/Nano Systems for Aerospace, Northwestern Polytechnical University, 710072, Xi’an, China

    Honglong Chang & Jianbing Xie

  2. School of Arts and Sciences, Shaanxi University of Science & Technology, 710021, Xi’an, China

    Ying Liu

Authors
  1. Honglong Chang
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  2. Jianbing Xie
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  3. Ying Liu
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Corresponding author

Correspondence to Honglong Chang .

Editor information

Editors and Affiliations

  1. Southeast University, Nanjing, China

    Qing-An Huang

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© 2017 Springer Nature Singapore Pte Ltd.

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Chang, H., Xie, J., Liu, Y. (2017). Behavior Modeling and Simulation of an Inertial Sensor. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies, vol 2. Springer, Singapore. https://doi.org/10.1007/978-981-10-2798-7_5-1

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  • DOI: https://doi.org/10.1007/978-981-10-2798-7_5-1

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  • Print ISBN: 978-981-10-2798-7

  • Online ISBN: 978-981-10-2798-7

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