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MEMS Adaptive Optics

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Encyclopedia of Nanotechnology

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Definition

MEMS: Micro-electro-mechanical Systems

MEMS are small silicon-based mechanical devices that employ semiconductor fabrication techniques in their construction. MEMS devices may take various forms: from pressure, chemical, and vibration sensors, to optical switches and mirrors through to inkjet printer heads. MOEMS – Micro-Opto-Electromechanical Systems – are a subset of MEMS devices that in addition employ optical components; an example could be a photon detector mounted on a silicon chip.

Note: MEMS/MOEMS devices have structures that can be measured at the micrometer level, whereas nanotechnology deals with scales at the level of an individual molecule (generally taken to be in the 1–100 nm range).

Adaptive Optics

Adaptive Optics (AO) are optical systems that can both measure and correct optical wavefront aberrations in real time. Real time depends on the particular AO application: in astronomy closed loop bandwidths of several hundred Hertz are required to correct the...

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Acknowledgments

The author would like to thank Drs. John S. Werner, Robert Zawadski (UC Davis), and Stephen Burns (Indiana University) for their support. Figure permission from Iris AO Inc., Boston Micromachines Corp, OKO Technologies, and Thorlabs is gratefully acknowledged.

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Authors and Affiliations

  1. The New England College of Optometry, 424 Beacon Street, Boston, MA, 02115, USA

    Nathan Doble

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  1. Nathan Doble
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Correspondence to Nathan Doble .

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Editors and Affiliations

  1. Nanoprobe Laboratory for Bio- and Nanotechnology and Biomimetics, The Ohio State University, Columbus, OH, USA

    Bharat Bhushan

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Doble, N. (2016). MEMS Adaptive Optics. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-9780-1_298

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