This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Wendel, M., Lorenz, H., Kotthaus, J.P.: Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging. Appl. Phys. Lett. 67, 3732–3734 (1995)
Yan, Y., Sun, T., Liang, Y., Dong, S.: Investigation on AFM-based micro/nano-CNC machining system. Int. J. Mach. Tool Manuf. 47, 1651–1659 (2007)
Göbel, H., Von Blanckenhagen, P.: Atomic force microscope as a tool for metal surface modification. J. Vacuum Sci. Technol. B. 13, 1247–1251 (1995)
Li, X., Wang, X., Xiong, Q., Eklund, P.C.: Top-down structure and device fabrication using in situ nanomachining. Appl. Phys. Lett. 87, 233113 (2005)
Yan, Y., Hu, Z., Zhao, X., Sun, T., Dong, S., Li, X.: Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy. Small 6, 724–728 (2010)
Hu, S., Altmeyer, S., Hamidi, A., Spangenberg, B., Kurz, H.: Novel approach to atomic force lithography. J. Vacuum Sci. Technol. B. 16, 1983–1986 (1998)
Gozen, B.A., Ozdoganlar, O.B.: A rotating-tip-based mechanical nano-manufacturing process. Nanoscale Res. Lett. 5, 1403–1407 (2010)
Schmid, S.R., Hector, L.G.: Simulation of asperity plowing in an atomic force microscope. Part II – plowing of aluminum alloys. Wear 215, 257–266 (1998)
Heyde, M., Rademann, K., Cappella, B., Geuss, M., Sturm, H., Spangenberg, T., Niehus, H.: Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope. Rev. Sci. Instrum. 72, 136–141 (2001)
Klehn, B., Kunze, U.: Nanolithography with an atomic force microscope by means of vector-scan controlled dynamic plowing. J. Appl. Phys. 85, 3897–3903 (1999)
Kolosov, O., Yamanaka, K.: Nonlinear detection of ultrasonic vibrations in an atomic force microscope. Jpn. J. Appl. Phys. 32, 1095–1098 (1993)
Yamanaka, K., Ogiso, H., Kolosov, O.: Ultrasonic force microscopy for nanometer resolution subsurface imaging. Appl. Phys. Lett. 64, 178–180 (1994)
Shekhawat, G.S., Dravid, V.P.: Nanoscale imaging of buried structures via scanning near-field ultrasound holography. Science 310, 89–92 (2005)
Cuberes, M.T., Briggs, G.A.D., Kolosov, O.: Nonlinear detection of ultrasonic vibration of AFM cantilevers in and out of contact with the sample. Nanotechnology 12, 53–59 (2001)
Zhang, L., Dong, J.: High-rate tunable ultrasonic force regulated nanomachining lithography with an atomic force microscope. Nanotechnology 23(8), 085303 (2012)
Zhang, L., Dong, J., Cohen, P.H.: Material-insensitive feature depth control and machining force reduction by ultrasonic vibration in AFM-based nanomachining. IEEE Trans. Nanotechnol. 12(5), 743–750 (2013)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2016 Springer Science+Business Media Dordrecht
About this entry
Cite this entry
Dong, J. (2016). Ultrasonic Vibration-Assisted Nanomachining. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-9780-1_100921
Download citation
DOI: https://doi.org/10.1007/978-94-017-9780-1_100921
Published:
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-017-9779-5
Online ISBN: 978-94-017-9780-1
eBook Packages: Chemistry and Materials ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics