Encyclopedia of Nanotechnology

Living Edition
| Editors: Bharat Bhushan

SU-8 Photoresist

  • Frederik CeyssensEmail author
  • Robert Puers
Living reference work entry
DOI: https://doi.org/10.1007/978-94-007-6178-0_360-2

Synonyms

Definition

SU-8 is a high aspect ratio epoxy-based negative photoresist commonly used as structural material in lithographic fabrication.

Introduction

SU-8 was developed by IBM as a thick negative photoresist targeted to the fabrication of molds for electroplating. The epoxy-based negative photoresist has some remarkable properties. First of all, it has a wide range of coating thicknesses: layers from several hundreds of nanometers up to several hundreds of microns can be deposited by a single standard spin coating step, using the appropriate dilution of the SU-8 resin. Even thicker layers can be deposited and photopatterned successfully as will be discussed later. Second, structures featuring...

Keywords

Sacrificial Layer Exposure Energy Carrier Wafer Propylene Glycol Methyl Ether Acetate Propylene Glycol Methyl Ether Acetate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer Science+Business Media Dordrecht 2015

Authors and Affiliations

  1. 1.Department ESAT-MICASKULeuvenLeuvenBelgium