Synonyms
Definition
A process used to fabricate miniaturized glass-like carbon structures through the carbonization of previously shaped organic precursors.
Overview
Carbon MEMS combines different patterning techniques with carbonization to derive miniaturized glass-like carbon features from an organic precursor. Since glass-like carbon is a brittle material, the carbonization of an already patterned precursor compares advantageously against subtractive manufacturing of glass-like carbon bulk. To date, the most common precursor patterning technique used in C-MEMS has been conventional photolithography, but many other techniques could be used. These cover a wide range: from relatively inexpensive like electrospinning, stamping, molding, polymer machining, and casting to next-generation lithography (NGL) techniques such as nanoimprint lithography (NIL) and electron beam lithography. The choice of precursor patterning technique is dictated by...
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References
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Martinez-Duarte, R., Islam, M., Natu, R. (2015). Carbon MEMS. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_101022-1
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DOI: https://doi.org/10.1007/978-94-007-6178-0_101022-1
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