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Nonlinear and Parametric NEMS Resonators

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Encyclopedia of Nanotechnology

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Synonyms

Chaos; Coupling; Duffing; Nanoelectromechanical systems; Nanomechanical; NEMS; Nonlinearity; Oscillator; Parametric; Synchronization

Definition

Nonlinear NEMS resonators are nanoelectromechanical system resonators that operate at excitation levels exceeding their linear range. Parametric NEMS resonators are NEMS resonators that are actuated parametrically, i.e., by means of modulating a system parameter at a rate proportional to the resonance frequency.

Introduction: Nonlinearity in NEMS

One of the astonishing examples of miniaturization in recent decades involves the development of micro- and nanoelectromechanical systems (MEMS and NEMS) – tiny moving structures with the sizes down to few atoms across [1]. An important subclass of already diverse field of MEMS and NEMS involves resonant electromechanical systems, which have already shown an unprecedented performance in their ability to sense important physical parameters, probe or manipulate the surfaces of materials, and...

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Authors and Affiliations

  1. TowerJazz Semiconductors, 4321 Jamboree Rd, Newport Beach, CA, 92660, USA

    Rassul Karabalin

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  1. Rassul Karabalin
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Correspondence to Rassul Karabalin .

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Editors and Affiliations

  1. Biomimetics (NLB²), Ohio State University Nanoprobe Lab. for Bio- & Nanotechnology, Columbus, Ohio, USA

    Bharat Bhushan

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Karabalin, R. (2015). Nonlinear and Parametric NEMS Resonators. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_101003-1

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  • DOI: https://doi.org/10.1007/978-94-007-6178-0_101003-1

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  • Online ISBN: 978-94-007-6178-0

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