Encyclopedia of Nanotechnology

Living Edition
| Editors: Bharat Bhushan

Surface Dissipations in NEMS/MEMS

  • Jinling YangEmail author
Living reference work entry
DOI: https://doi.org/10.1007/978-94-007-6178-0_101000-1



Surface dissipation is the mechanical energy loss caused by surface defects, such as dangling bonds, absorbates, and crystal termination defects. It becomes dominant as the dimensions of nanoelectromechanical systems (NEMS)/microelectromechanical systems (MEMS) resonators are reduced and the surface-to-volume ratio grows.


Nanoelectromechanical systems (NEMS)/microelectromechanical systems (MEMS) are systems integrating nanometer/micrometer-scale mechanical and electrical components. NEMS/MEMS resonators play an important role in viable commercial technologies and are becoming more and more prevalent in research applications; for example, micromechanical resonators are excellent transducers for force or mass detection [1, 2]. Advances in nanofabrication technology have enabled extreme miniaturization of resonant sensors. As tools for basic...


Mechanical Energy Dissipation Surface Loss Cantilever Surface Dime Atom Short Cantilever 
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© Springer Science+Business Media Dordrecht 2016

Authors and Affiliations

  1. 1.Institute of Semiconductors, Chinese Academy of SciencesBeijingPeople’s Republic of China
  2. 2.State Key Laboratory of Transducer TechnologyShanghaiPeople’s Republic of China