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MEMS Resonant Infrared Sensors

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Encyclopedia of Nanotechnology

Synonyms

MEMS resonant infrared detectors; MEMS resonant thermal detectors; MEMS resonant thermal sensors

Definition

A microelectromechanical system (MEMS) resonant infrared (IR) sensor is a particular class of thermal detectors that relies on a transduction scheme based on the change in vibration frequency of a microelectromechanical resonator with a temperature dependent mechanical resonance frequency. The incident IR radiation heats the MEMS resonator changing its resonance frequency. By monitoring such resonance frequency shift, the incident IR power is detected. Unlike other IR sensors, MEMS resonant IR sensors do not require cooling and are suitable for the implementation of high performance, miniaturized, and power efficient thermal imagers and spectrometers.

Principle of Operation

The core of a MEMS resonant IR detector is a microelectromechanical resonator whose resonance frequency is highly sensitive to temperature. An IR absorbing material is typically integrated on the...

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Author information

Authors and Affiliations

  1. Department of Electrical and Computer Engineering, Northeastern University, 360 Huntington Avenue, Room: 331 Dana, Boston, MA, 02115, USA

    Yu Hui & Matteo Rinaldi

Authors
  1. Yu Hui
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  2. Matteo Rinaldi
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Corresponding author

Correspondence to Yu Hui .

Editor information

Editors and Affiliations

  1. Biomimetics (NLB²), Ohio State University Nanoprobe Lab. for Bio- & Nanotechnology, Columbus, Ohio, USA

    Bharat Bhushan

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Hui, Y., Rinaldi, M. (2016). MEMS Resonant Infrared Sensors. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_100962-1

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  • DOI: https://doi.org/10.1007/978-94-007-6178-0_100962-1

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  • Online ISBN: 978-94-007-6178-0

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