Skip to main content
SpringerLink
Log in

CMOS-MEMS Resonators

  • Living reference work entry
  • First Online:
Encyclopedia of Nanotechnology

  • 404 Accesses

Synonyms

MEMS resonators integrated with circuits; MEMS/IC integrated resonator circuits; Micromechanical resonators fabricated using CMOS-MEMS technologies

Definition

Based upon a strict definition, a CMOS-MEMS resonator is fabricated using a CMOS foundry orientated process to realize MEMS/IC integration for resonator applications, such as oscillators and filters. The integrated CMOS-MEMS fabrication platform is a key technology to reduce the form factor, enhance the performance, increase the functionality, and facilitate circuit integration for portable sensing devices and Internet of Things (IoTs). The integrated CMOS-MEMS circuits greatly reduce the parasitic stray capacitances at the MEMS-circuit interface so that it not only improves the system responses at high frequencies but also reduces the power consumption of the electronic circuits. This platform benefits the future portable/wearable electronic products for smaller size and longer standby time.

Principle of Operation

CMOS-M...

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution

Institutional subscriptions

References

  1. Chen, W.-C., Fang, W., Li, S.-S.: A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits. J. Micromech. Microeng. 21(6), 065012 (2011)

    Article  Google Scholar 

  2. Li, C.-S., Hou, L.-J., Li, S.-S.: Advanced CMOS-MEMS resonator platform. IEEE Electron Device Lett. 33(2), 272–274 (2012)

    Article  Google Scholar 

  3. Liu, Y.-C., Tsai, M.-H., Chen, W.-C., Li, M.-H., Li, S.-S., Fang, W.: Temperature-compensated CMOS-MEMS oxide resonators. IEEE/ASME J. Microelectromech. Syst. 22(5), 1054–1065 (2013)

    Article  Google Scholar 

  4. Chen, W.-C., Li, M.-H., Liu, Y.-C., Fang, W., Li, S.-S.: A fully-differential CMOS-MEMS DETF oxide resonator with Q > 4,800 and positive TCF. IEEE Electron Device Lett. 33(5), 721–723 (2012)

    Article  Google Scholar 

  5. Li, C.-S., Li, M.-H., Chin, C.-H., Li, S.-S.: Differentially piezoresistive sensing for CMOS-MEMS resonators. IEEE/ASME J. Microelectromech. Syst. 22(6), 1361–1372 (2013)

    Article  Google Scholar 

  6. Melamud, R., Chandorkar, S.A., Kim, B., Lee, H.K., Salvia, J.C., Bahl, G., Hopcroft, M.A., Kenny, T.W.: Temperature-insensitive composite micromechanical resonators. IEEE/ASME J. Microelectromech. Syst. 18(6), 1409–1419 (2009)

    Article  Google Scholar 

  7. Fedder, G.K., Santhanam, S., Reed, M.L., Eagle, S.C., Guillou, D.F., Lu, M.S.-C., Carley, L.R.: Laminated high-aspect-ratio microstructures in a conventional CMOS process. Sensors Actuators A 57, 103–110 (1996)

    Article  Google Scholar 

  8. Lo, C.-C., Chen, F., Fedder, G.K.: Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism. In: Technical Digest, Transducers’05, pp. 2074–2077. Seoul (2005)

    Google Scholar 

  9. Uranga, A., Teva, J., Verd, J., Lopez, J.L., Torres, F., Esteve, J., Abadal, G., Perez-Murano, F., Barniol, N.: Fully CMOS integrated low voltage 100 MHz MEMS resonator. IEEE Electron. Lett. 41(24), 1327–1328 (2005)

    Article  Google Scholar 

  10. Verd, J., Uranga, A., Teva, J., Lopez, J.L., Torres, F., Esteve, J., Abadal, G., Perez-Murano, F., Barniol, N.: Integrated CMOS-MEMS with on chip read-out electronics for high frequency applications. IEEE Electron Device Lett. 27(6), 495–497 (2006)

    Article  Google Scholar 

  11. Teva, J., Abadal, G., Uranga, A., Verd, J., Torres, F., Lopez, J.L., Esteve, J., Pérez-Murano, F., Barniol, N.: From VHF to UHF CMOS-MEMS monolithically integrated resonators. In: Technical Digest, 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS’08), pp. 82–85. Tucson. (2008)

    Google Scholar 

  12. Pourkamali, S., Hao, Z., Ayazi, F.: VHF single crystal silicon elliptic bulk-mode capacitive disk resonators, part II: implementation and characterization. IEEE/ASME J. Microelectromech. Syst. 13(6), 1054–1062 (2004)

    Article  Google Scholar 

  13. Li, M.-H., Chen, W.-C., Li, S.-S.: Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with enhanced power handling capability. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 59(3), 346–357 (2012)

    Article  Google Scholar 

  14. Chen, W.-C., Fang, W., Li, S.-S.: High-Q integrated CMOS-MEMS resonators with deep-submicron gaps and quasi-linear frequency tuning. IEEE/ASME J. Microelectromech. Syst. 21(3), 688–701 (2012)

    Article  Google Scholar 

  15. Chen, C.-Y., Li, M.-H., Li, C.-S., Li, S.-S.: Design and characterization of mechanically-coupled CMOS-MEMS filters for channel-select applications. Sensors Actuators A Phys. 216, 394–404 (2014)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Road, 30013, Hsinchu, Taiwan

    Sheng-Shian Li

Authors
  1. Sheng-Shian Li
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Sheng-Shian Li .

Editor information

Editors and Affiliations

  1. Biomimetics (NLB²), Ohio State University Nanoprobe Lab. for Bio- & Nanotechnology, Columbus, Ohio, USA

    Bharat Bhushan

Rights and permissions

Reprints and permissions

Copyright information

© 2015 Springer Science+Business Media Dordrecht

About this entry

Cite this entry

Li, SS. (2015). CMOS-MEMS Resonators. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_100960-1

Download citation

  • DOI: https://doi.org/10.1007/978-94-007-6178-0_100960-1

  • Received:

  • Accepted:

  • Published:

  • Publisher Name: Springer, Dordrecht

  • Online ISBN: 978-94-007-6178-0

  • eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

Publish with us

Policies and ethics

Search

Navigation