Encyclopedia of Nanotechnology

Living Edition
| Editors: Bharat Bhushan

CMOS-MEMS Resonators

  • Sheng-Shian Li
Living reference work entry
DOI: https://doi.org/10.1007/978-94-007-6178-0_100960-1

Synonyms

Definition

Based upon a strict definition, a CMOS-MEMS resonator is fabricated using a CMOS foundry orientated process to realize MEMS/IC integration for resonator applications, such as oscillators and filters. The integrated CMOS-MEMS fabrication platform is a key technology to reduce the form factor, enhance the performance, increase the functionality, and facilitate circuit integration for portable sensing devices and Internet of Things (IoTs). The integrated CMOS-MEMS circuits greatly reduce the parasitic stray capacitances at the MEMS-circuit interface so that it not only improves the system responses at high frequencies but also reduces the power consumption of the electronic circuits. This platform benefits the future portable/wearable electronic products for smaller size and longer standby time.

Principle of Operation

CMOS-M...

Keywords

Resonator Structure Squeeze Film Electromechanical Coupling Coefficient Beam Resonator Phase Noise Performance 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer Science+Business Media Dordrecht 2015

Authors and Affiliations

  1. 1.Institute of NanoEngineering and MicroSystemsNational Tsing Hua UniversityHsinchuTaiwan