Based upon a strict definition, a CMOS-MEMS resonator is fabricated using a CMOS foundry orientated process to realize MEMS/IC integration for resonator applications, such as oscillators and filters. The integrated CMOS-MEMS fabrication platform is a key technology to reduce the form factor, enhance the performance, increase the functionality, and facilitate circuit integration for portable sensing devices and Internet of Things (IoTs). The integrated CMOS-MEMS circuits greatly reduce the parasitic stray capacitances at the MEMS-circuit interface so that it not only improves the system responses at high frequencies but also reduces the power consumption of the electronic circuits. This platform benefits the future portable/wearable electronic products for smaller size and longer standby time.
Principle of Operation
KeywordsResonator Structure Squeeze Film Electromechanical Coupling Coefficient Beam Resonator Phase Noise Performance
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