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Tunable RF MEMS Filters: A Review

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Synonyms

Band pass filters; Bandpass tunable filter; LC filters; RF filters; RF MEMS reconfigurable filter; Tunable filter

Definition

Tunable RF MEMS filters are defined as microelectromechanical filters for radio frequency (RF) applications that (a) are capable of tuning or reconfiguring and (b) may use microelectromechanical systems (MEMS) switches or capacitors for realizing the tuning, e.g., the frequency or bandwidth.

Introduction

The need for tunable or reconfigurable filters is becoming more apparent as the radio technologies advance and the radio spectrum becomes more crowded. Bandpass filters, specifically, can improve the radio performance by improving the signal to noise ratio, avoiding any saturation due to out-of-band noise contributions [1]. Low-loss tunable filters can replace several surface acoustic wave (SAW) filters currently used in the radios operating in the ultra high frequency (UHF) band, defined as frequencies between 300 MHz and 3 GHz by the International...

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References

  1. Lucyszyn, S.: Review of radio frequency microelectromechanical systems technology. IEE Proc.-Sci. Meas. Technol. 151(2), 93–103 (2004)

    Article  Google Scholar 

  2. Shim, Y.: Fully integrated high-performance MEMS lumped element filters for reconfigurable radios. Ph.D. thesis, 2013, University of Michigan (2013)

    Google Scholar 

  3. Rais-Zadeh, M., Lavasani, H.M., Kapoor, A., Ayazi, F.: An integrated 800-MHz coupled-resonator tunable bandpass filter in silver with a constant bandwidth. J. Microelectromech. Syst. 18(4), 942–949 (2009)

    Article  Google Scholar 

  4. Brown, A.R., Rebeiz, G.M.: A varactor-tuned RF filter. IEEE Trans. Microwave Theory Tech. 48(7), 1157–1160 (2000)

    Article  Google Scholar 

  5. Sigmarsson, H. H. et al.: In-situ control of tunable evanescent-mode cavity filters using differential mode monitoring. In: IEEE MTT-S International Microwave Symposium, Boston, MA, pp. 633–636 (2009)

    Google Scholar 

  6. Kim, H.-T., Park, J.-H., Kim, Y.-K., Kwon, Y.: Low-loss and compact V-band MEMS-based analog tunable bandpass filters. IEEE Microw. Wireless Compon. Lett. 12(11), 432–434 (2002)

    Article  Google Scholar 

  7. “MEMS Tunable Filter (Type B),” DiCon [online]. http://www.diconfiberoptics.com/products/?prod=0172&menu=ftr&sub=0. Accessed 7 Oct 2014

  8. Entesari, K., Rebeiz, G.: A 12–18-GHz three-pole RF MEMS tunable filter. IEEE Trans. Microw. Theory Tech. 53(8), 2566–2571 (2005)

    Article  Google Scholar 

  9. Rais-Zadeh, M., Fox, J., Wentzloff, D., Gianchandani, Y.: Reconfigurable radios: a possible solution to reduce entry costs in wireless phones. In: Proceedings of IEEE, submitted, 2014

    Google Scholar 

  10. Park, S.-J., Rebeiz, G.M.: Low-loss two-pole tunable filters with three different predefined bandwidth characteristics. IEEE Trans. Microwave Theory Tech. 56(5), 1137–1148 (2008)

    Article  Google Scholar 

  11. Zhang, X.Y., Xue, Q., Chan, C.H., Hu, B.-J.: Low-loss frequency-agile bandpass filters with controllable bandwidth and suppressed second harmonic. IEEE Trans. Microwave Theory Tech. 58(6), 1557–1564 (2010)

    Article  Google Scholar 

  12. Wang, X.-G., Cho, Y.-H., Yun, S.-W.: A tunable combline bandpass filter loaded with series resonator. IEEE Trans. Microwave Theory Tech. 60(6), 1569–1576 (2012)

    Article  Google Scholar 

  13. Tombak, A., et al.: Voltage-controlled RF filters employing thin-film barium-strontium-titanate tunable capacitors. IEEE Trans. Microwave Theory Tech. 51(2), 462–467 (2003)

    Article  Google Scholar 

  14. York, R.: Tunable dielectrics for RF circuits. In: Steer, M. (ed.) Chapter 6 of Multifunctional Adaptive Microwave Circuits and Systems. Raleigh, NC, Wiley (2009)

    Google Scholar 

  15. Liu, X., Katehi, L.P.B., Chappell, W.J., Peroulis, D.: High-tunable microwave cavity resonators and filters using SOI-based RF MEMS tuners. J. Microelectromech. Syst. 19(4), 774–784 (2010)

    Article  Google Scholar 

  16. Joshi, H., Sigmarsson, H.H., Moon, S., Peroulis, D., Chappell, W.J.: High-Q fully reconfigurable tunable band pass filters. IEEE Trans. Microwave Theory Tech. 57(12), 3525–3533 (2009)

    Article  Google Scholar 

  17. Psychogiou, D., Peroulis, D.: Tunable VHF miniaturized helical filters. IEEE Trans. Microwave Theory Tech. 62(2), 282–289 (2014)

    Article  Google Scholar 

  18. Park, S.J., Reines, I., Patel, C., Rebeiz, G.M.: High-Q RF-MEMS 4–6 GHz tunable evanescent-mode cavity filter. IEEE Trans. Microwave Theory Tech. 58(2), 381–389 (2010)

    Article  Google Scholar 

  19. Anand, A., Small, J., Peroulis, D., Liu, X.: Theory and design of octave tunable filters with lumped tuning elements. IEEE Trans. Microwave Theory Tech. 61(12), 4353–4364 (2013)

    Article  Google Scholar 

  20. Sekar, V., Armendariz, M., Entesari, K.: A 1.2–1.6-GHz substrate-integrated-waveguide RF MEMS tunable filter. IEEE Trans. Microwave Theory Tech. 59(4), 866–876 (2011)

    Article  Google Scholar 

  21. Fouladi, S., et al.: High-Q narrowband tunable combline bandpass filters using MEMS capacitor banks and piezomotors. IEEE Trans. Microwave Theory Tech. 61(1), 393–402 (2013)

    Article  Google Scholar 

  22. Xu-Guang, W., Young-Ho, C., Sang-Won, Y.: A tunable combline bandpass filter loaded with series resonator. IEEE Trans. Microwave Theory Tech. 60(6), 1569–1576 (2012)

    Article  Google Scholar 

  23. El-Tanani, M.A., Rebeiz, G.M.: High performance 1.5–2.5 GHz RF MEMS tunable filters for wireless applications. IEEE Trans. Microwave Theory Tech. 58(6), 1629–1637 (2010)

    Article  Google Scholar 

  24. Reines, I., Brown, A., El-Tanani, M., Grichener, A., Rebeiz, G.: 1.6–2.4 GHz RF MEMS tunable 3-pole suspended combline filter. In: IEEE MTT-S International Microwave Symposium, Atlanta, GA, pp. 133–136 (2008)

    Google Scholar 

  25. Rais-Zadeh, M.: Design and fabrication considerations in developing high-Q MEMS capacitors and inductors. In: IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF'11), Phoenix, pp. 161–164 (2011)

    Google Scholar 

  26. Palego, C., et al.: A two-pole lumped-element programmable filter with MEMS pseudodigital capacitor banks. IEEE Trans. Microwave Theory Tech. 56(3), 729–735 (2008)

    Article  Google Scholar 

  27. Shim, Y., Tabrizian, R., Ayazi, F., Rais-Zadeh, M.: Low-loss MEMS filters with improved out-of-band rejection by exploiting inductive parasitics. In: IEEE International Electron Device Meeting (IEDM'09), Baltimore, pp. 1–4 (2009)

    Google Scholar 

  28. Shim, Y., Wu, Z., Rais-Zadeh, M.: A high-performance continuously tunable MEMS bandpass filter at 1 GHz. IEEE Trans. Microwave Theory Tech. 60(8), 2439–2447 (2012)

    Article  Google Scholar 

  29. Ozkeskin, F.M., Choi, S., Sarabandi, K., Gianchandani, Y.B.: Batch-fabricated high-power RF microrelays with direct on-PCB packages. J. Microelectromech. Syst. 21(4), 990–1001 (2012)

    Article  Google Scholar 

  30. Borwick, R.L., Stupar, P.A., DeNatale, J.F., Anderson, R., Erlandson, R.: Variable MEMS capacitors implemented into RF filter systems. IEEE Trans. Microwave Theory Tech. 51(1), 315–319 (2003)

    Article  Google Scholar 

  31. Sanchez-Renedo, M., Gomez-Garcia, R., Alonso, J.I., Briso-Rodriguez, C.: Tunable combline filter with continuous control of center frequency and bandwidth. IEEE Trans. Microwave Theory Tech. 53(1), 191–199 (2005)

    Article  Google Scholar 

  32. Lee, T. C., Park, J. Y.: Compact PCB embedded tunable filter for UHF TV broadcasting. In: IEEE MTT-S International Microwave Symposium, Boston, pp. 505–508 (2009)

    Google Scholar 

  33. Rais-Zadeh, M., Ayazi, F.: Small-bandwidth integrated tunable bandpass filters for GSM applications. In: IEEE International Conference on Microelectromechanical Systems (MEMS), Tucson, pp. 1032–1035 (2008)

    Google Scholar 

  34. Cho, Y.-H., Rebeiz, G.: 0.73–1.03-GHz tunable bandpass filter with a reconfigurable 2/3/4-pole response. IEEE Trans. Microwave Theory Tech. 62(2), 290–296 (2014)

    Article  Google Scholar 

  35. Kraus, G. M., Goldsmith, C. L., Nordquist, C. D., Dyck, C. W., Finnegan, P. S., Austin, F., IV, Muyshondt, A., Sullivan, C. T.: A widely tunable RF MEMS end-coupled filter. In: IEEE MTT-S International Microwave Symposium, Dallas, pp. 429–432 (2004)

    Google Scholar 

  36. Courrèges, S., Li, Y., Zhao, Z., Choi, K., Hunt, A., Papapolymerou, J.: A low-loss X-band quasi-elliptic ferroelectric tunable filter. IEEE Microw. Wireless Compon. Lett. 19(4), 203–205 (2009)

    Article  Google Scholar 

  37. Zhu, Y., Qiu, G., Chi, K.H., Wang, B.T., Tsai, C.S.: A tunable X-band band-pass filter module using YIG/GGG layer on RT/duroid substrate. IEEE Trans. Magn. 45(10), 4195–4199 (2009)

    Article  Google Scholar 

  38. Cheng, C.-C., Rebeiz, G.M.: High- 4–6-GHz suspended stripline RF MEMS tunable filter with bandwidth control. IEEE Trans. Microwave Theory Tech. 59(10), 2469–2476 (2011)

    Article  Google Scholar 

  39. Fengxi, H., Fouladi, S., Mansour, R.R.: High-Q tunable dielectric resonator filters using MEMS technology. IEEE Trans. Microwave Theory Tech. 59(12), 3401–3409 (2011)

    Article  Google Scholar 

  40. Yu, M., Ward, R. J., Hegazi, G. M.: High power RF switch MMICs development in GaN-on-Si HFET technology. In: IEEE Radio Wireless Symposium, Orlando, FL, pp. 855–858 (2008)

    Google Scholar 

  41. El-Hinnawy, N., et al.: Low-loss latching microwave switch using thermally pulsed non-volatile chalcogenide phase change materials. Appl. Phys. Lett. 105, 013501 (2014) (4 pp)

    Article  Google Scholar 

  42. Shim, Y., Hummel, G., Rais-Zadeh, M.: RF switches using phase change materials. In: IEEE International Conference on Microelectromechanical Systems (MEMS), Taipei, pp. 237–240 (2013)

    Google Scholar 

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Lin, F., Rais-Zadeh, M. (2015). Tunable RF MEMS Filters: A Review. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_100959-1

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  • DOI: https://doi.org/10.1007/978-94-007-6178-0_100959-1

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