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Encyclopedia of Nanotechnology pp 2069–2075Cite as

Physical Vapor Deposition

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Synonyms

Anodic arc deposition; Arc discharge; Boron nitride nanotubes (BNNTs); Carbon nanotubes (CNTs); Catalyst; Cathodic arc deposition; Chemical beam epitaxial (CBE); Electron beam evaporation; Electron beam physical vapor deposition (EBPVD); Gallium arsenide (GaAs); Gas-phase molecular beam epitaxy (gas-phase MBE); Graphene; Ion beam; Magnetron sputtering; Metal-organic molecular beam epitaxy (MOMBE); Molecular beam epitaxy (MBE); Nanorods; Nanotubes; Nanowires; Plasma; Pulsed-laser deposition (PLD); Si nanotubes; Sputtering; Thermal evaporation

Definition

Physical vapor deposition (PVD) is referred to deposition processes of thin films and nanostructures through the evaporation of solid precursors into their vapor phase by physical approaches followed by the condensation of the vapor phase on substrates. The whole process consists of three stages: (1) evaporation of the solid source, (2) vapor phase transport from the source to the substrates, and (3) vapor condensation on the...

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Physical Vapor Deposition, Fig. 1
Physical Vapor Deposition, Fig. 2

References

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Authors and Affiliations

  1. Department of Physics, Michigan Technological University, 1400 Townsend Drive, Houghton, MI, 49931-1295, USA

    Dr. Yoke Khin Yap

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  1. Dr. Yoke Khin Yap
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Correspondence to Yoke Khin Yap .

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Editors and Affiliations

  1. Ohio Eminent Scholar and The Howard D. Winbigler Professor, Director, Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics (NLB2), Ohio State University, 201 W. 19th Avenue, Columbus, Ohio, 43210-1142, USA

    Professor Bharat Bhushan

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Yap, Y.K. (2012). Physical Vapor Deposition. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9751-4_362

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