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Encyclopedia of Nanotechnology pp 422–427Cite as

Chemical Vapor Deposition (CVD)

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Synonyms

Aerosol-assisted chemical vapor deposition (AACVD); Atmospheric pressure chemical vapor deposition (APCVD); Atomic layer chemical vapor deposition (ALCVD); Atomic layer deposition (ALD); Atomic layer epitaxial (ALE); Boron nitride nanotubes (BNNTs); Carbon nanotubes (CNTs); Carbon nanowalls; Catalyst; Catalytic chemical vapor deposition (CCVD); Cold-wall thermal chemical vapor deposition; Dissociated adsorption; Double-walled carbon nanotubes (DWCNTs); High-pressure carbon monoxide (HiPCO); Hot filament chemical vapor deposition (HFCVD); Hot-wall thermal chemical vapor deposition; Inductively coupled-plasma chemical vapor deposition (ICP-CVD); Low-pressure chemical vapor deposition (LPCVD); Metalorganic chemical vapor deposition (MOCVD); Multiwalled carbon nanotubes (MWCNTs); Nanobelts; Nanocombs; Nanoparticles; Nanotubes; Nanowires; Plasma-enhanced chemical vapor deposition (PECVD); Single-walled carbon nanotubes (SWCNTs); Thermal chemical vapor deposition; Ultrahigh vacuum...

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Chemical Vapor Deposition (CVD), Fig. 1
Chemical Vapor Deposition (CVD), Fig. 2

References

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Authors and Affiliations

  1. Department of Physics, Michigan Technological University, 1400 Townsend Drive, Houghton, MI, 49931-1295, USA

    Dr. Yoke Khin Yap

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  1. Dr. Yoke Khin Yap
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Correspondence to Yoke Khin Yap .

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Editors and Affiliations

  1. Ohio Eminent Scholar and The Howard D. Winbigler Professor, Director, Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics (NLB2), Ohio State University, 201 W. 19th Avenue, Columbus, Ohio, 43210-1142, USA

    Professor Bharat Bhushan

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Yap, Y.K. (2012). Chemical Vapor Deposition (CVD). In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9751-4_345

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