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Barrier Film Development for Flexible OLED

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Handbook of Organic Light-Emitting Diodes

Abstract

This chapter describes different approaches to make engineered films based on polymeric substrates with ultralow water and oxygen permeation. These films are compatible with encapsulation of OLED devices for display and lighting applications. A survey of current technologies and modes of application of these films is presented. The properties of substrates and planarization layers necessary to achieved ultra-barrier performance are discussed. Advantages and limitation of deposition techniques used in the formation of the inorganic films are discussed by presenting and comparing physical vapor deposition (PVD) by sputtering, plasma-enhanced chemical vapor deposition (PECVD), and atomic layer deposition (ALD). An innovative approach based on the deposition of an inorganic film by wet method is discussed in the last session.

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Author information

Authors and Affiliations

  1. AIXTRON, Sunnyvale, USA

    Lorenza Moro

  2. Applied Materials, Inc., Santa Clara, CA, USA

    Robert J. Visser

  3. Independent consultant, Cleveland, UK

    Bill MacDonald

  4. Tera Barrier, Singapore, Republic of Singapore

    Senthil Ramadas Kumar

  5. Vittriflex, Sunnyvale, USA

    Martin P. Rosenblum

  6. Applied Materials, Darmstadt, Germany

    Neil Morrison

  7. PVA Tepla, Ulm, Germany

    Philipp Maydannik

  8. Beneq, Espoo, Finland

    Mikko Söderlund

  9. Konica Minolta, Hachioji, Tokyo, Japan

    Kazuhiko Hirabayashi

Authors
  1. Lorenza Moro
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  2. Robert J. Visser
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  3. Bill MacDonald
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  4. Senthil Ramadas Kumar
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  5. Martin P. Rosenblum
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  6. Neil Morrison
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  7. Philipp Maydannik
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  8. Mikko Söderlund
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  9. Kazuhiko Hirabayashi
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Corresponding author

Correspondence to Robert J. Visser .

Editor information

Editors and Affiliations

  1. Department of Applied Chemistry and Biochemistry, Kyushu University, Fukuoka, Japan

    Chihaya Adachi

  2. Art, Science and Technology Center for Cooperative Research, Kyushu University KASTEC, Fukuoka, Japan

    Reiji Hattori

  3. Institute for Chemical Research Division of Environmental Chemistry, Kyoto University, Kyoto, Japan

    Hironori Kaji

  4. Konica Minolta Pioneer OLED, Inc., Konica Minolta, Inc., Tokyo, Japan

    Takatoshi Tsujimura

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Moro, L. et al. (2018). Barrier Film Development for Flexible OLED. In: Adachi, C., Hattori, R., Kaji, H., Tsujimura, T. (eds) Handbook of Organic Light-Emitting Diodes. Springer, Tokyo. https://doi.org/10.1007/978-4-431-55761-6_25-1

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  • DOI: https://doi.org/10.1007/978-4-431-55761-6_25-1

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  • Print ISBN: 978-4-431-55761-6

  • Online ISBN: 978-4-431-55761-6

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