Zusammenfassung
In diesem Kapitel werden die Pumpweise und Kenndaten von Adsorptionspumpen, Titansublimationspumpen, Getterpumpen und NEG-Pumpen beschrieben. Diese Pumpen gehören zu den sogennnaten passiven Sorptionspumpen, bei denen die auf sie auftreffenden Gasteilchen durch Physi- oder Chemisorption gebunden werden. Bei Volumengetter wird zusätzlich der Effekt der Diffusion in das Absorbermaterial genutzt.
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Jousten, K., Manini, P. (2017). Passive Sorptionspumpen. In: Jousten, K. (eds) Handbuch Vakuumtechnik. Springer Reference Technik . Springer Vieweg, Wiesbaden. https://doi.org/10.1007/978-3-658-13403-7_22-1
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