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Ellipsometry

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CIRP Encyclopedia of Production Engineering

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Definition

Collective name for a number of techniques dealing with the measurement and interpretation of the change in the polarization state of a polarized beam of radiation which is reflected from a surface.

From this change, optical properties of the reflecting surface can be derived.

Theory and Application

Basic Theory for Reflection and Transmission at an Interface and the Basic Ellipsometry Equation

In Fig. 1 the beam trajectories are sketched for a wave incident on a plane interface between two media having a real refractive index n 1 and n 2 , respectively. The incoming beam with amplitude E 1 is reflected by the interface, giving a reflected beam with amplitude E 2 and a transmitted beam with amplitude E 3 .

Fig. 1
figure 1

Reflection and refraction at a plane interface

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References

  • Azzam RMA, Bashara NM (1977) Ellipsometry and polarized light. North Holland Physics, Amsterdam

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  • Haitjema H, Woerlee GF (1989) Analysis of tin dioxide coatings by multiple angle of incidence ellipsometry. Thin Solid Films 169(1):1–16

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  • Heavens OS (1991) Optical properties of thin solid films, 2nd edn. Dover, New York

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  • Jackson JD (1998) Classical electrodynamics, 3rd edn. Wiley, New York

    MATH  Google Scholar 

  • Vroman L, Lukosevicius A (1964) Ellipsometer recordings of changes in optical thickness of adsorbed films associated with surface activation of blood clotting. Nature 204:701–703

    Article  Google Scholar 

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Author information

Authors and Affiliations

  1. Mitutoyo RCE, De Rijn 18, 5684PJ, Best, The Netherlands

    Han Haitjema

Authors
  1. Han Haitjema
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Correspondence to Han Haitjema .

Editor information

Editors and Affiliations

  1. CIRP Office Intern. Institution for, Paris, France

    The International Academy for Produ

  2. Université du Québec à Trois-Rivières, Mechanical Engineering Department, Trois-Rivieres, Québec, Canada

    Luc Laperrière

  3. Technische Universität München, Garching, Germany

    Gunther Reinhart

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© 2016 CIRP

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Haitjema, H. (2016). Ellipsometry. In: The International Academy for Produ, Laperrière, L., Reinhart, G. (eds) CIRP Encyclopedia of Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-35950-7_16705-3

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  • DOI: https://doi.org/10.1007/978-3-642-35950-7_16705-3

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Online ISBN: 978-3-642-35950-7

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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