CIRP Encyclopedia of Production Engineering

2014 Edition
| Editors: The International Academy for Production Engineering, Luc Laperrière, Gunther Reinhart

Atomic Force Microscopy

Reference work entry
DOI: https://doi.org/10.1007/978-3-642-20617-7_6577

Synonyms

Definition

Atomic force microscopy, often abbreviated as AFM, is one of the elected techniques for fine surface and geometrical characterization. Atomic force microscopes provide three-dimensional reconstruction of surface topographies with sub-nanometer vertical and lateral resolution, over a range which is typically no larger than a few tens or hundreds of micrometers.

Atomic force microscopes belong to the family of scanning probe microscopy (SPM), a branch of microscopy allowing imaging of surfaces by means of a physical probe scanning the sample surface. SPMs monitor the interaction between the probe and the surface to produce an image or a three-dimensional reconstruction of the surface. SPMs classification is based on the specific physical principles causing the interaction. When such interaction is a force (magnetic, electrostatic, friction, etc.), the scanning probe microscopes are also classified as scanning force microscopes (SFMs). Atomic...

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References

  1. Binnig G, Quate CF, Gerber C (1986) Atomic force microscope. Phys Rev Lett 55(9):930–933CrossRefGoogle Scholar
  2. Danzebrink HU, Koenders L, Wilkening G, Yacoot A, Kunzmann H (2006) Advances in scanning force microscopy for dimensional metrology. Ann CIRP 55(2):841–878CrossRefGoogle Scholar
  3. Giessibl FJ (2004) Advances in atomic force microscopy. Rev Mod Phys 75(3):949–983CrossRefGoogle Scholar
  4. Marinello F, Bariani P, Carmignato S, Savio E (2009) Geometrical modelling of scanning probe microscopes and characterization of errors. Meas Sci Technol 20(8):084013.CrossRefGoogle Scholar
  5. Morita S, Wiesendanger R, Meyer E (2002) Noncontact atomic force microscopy. Springer, BerlinCrossRefGoogle Scholar

Copyright information

© CIRP 2014

Authors and Affiliations

  1. 1.TeSAF, Dipartimento Territorio e Sistemi Agro-ForestaliUniversity of PadovaLegnaroItaly