“Ultraprecision” is defined as the state, quality, or condition of being extremely precise. Therefore, an ultraprecision machine is characterized by extremely accurate motion, dimensions, or machining capability. Technical terms with “ultraprecision” include ultraprecision machine tool, ultraprecision diamond turning machine, ultraprecision machining technology, ultraprecision metrology, etc.
Theory and Application
A long history of production engineering has shown that the realization of ultraprecision machine is one of the most attractive subjects. As a typical example of ultraprecision machine, ultraprecision machine tools will be described here.
State-of-the-Art Industrial Requirements
Demands for ultraprecision machining technologies have recently increased in a wide range of industries, i.e., aerospace, semiconductor, optics, energy, etc. In particular, structured surfaces with micro- and nano-sized patterns have recently...
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