CIRP Encyclopedia of Production Engineering

2014 Edition
| Editors: The International Academy for Production Engineering, Luc Laperrière, Gunther Reinhart


  • Hidenori Shinno
Reference work entry



“Ultraprecision” is defined as the state, quality, or condition of being extremely precise. Therefore, an ultraprecision machine is characterized by extremely accurate motion, dimensions, or machining capability. Technical terms with “ultraprecision” include ultraprecision machine tool, ultraprecision diamond turning machine, ultraprecision machining technology, ultraprecision metrology, etc.

Theory and Application

A long history of production engineering has shown that the realization of ultraprecision machine is one of the most attractive subjects. As a typical example of ultraprecision machine, ultraprecision machine tools will be described here.

State-of-the-Art Industrial Requirements

Demands for ultraprecision machining technologies have recently increased in a wide range of industries, i.e., aerospace, semiconductor, optics, energy, etc. In particular, structured surfaces with micro- and nano-sized patterns have recently...

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  1. Shinno H (2010) Various remedies for reduction of thermal deformation, Chapter 4. In: Ito Y (ed) Thermal deformation in machine tools. McGraw-Hill, New YorkGoogle Scholar
  2. Shinno H, Hashizume H, Ito Y, Sato C (1992) Structural configuration and performances of machining environment-controlled ultraprecision diamond turning machine “capsule”. Ann CIRP 41(1):425–428CrossRefGoogle Scholar
  3. Shinno H, Hashizume H, Yoshioka H (2003) Sensor-less monitoring of cutting force during ultraprecision machining. Ann CIRP 52(1):303–306CrossRefGoogle Scholar
  4. Shinno H, Yoshioka H, Taniguchi K (2007) A newly developed linear motor-driven aerostatic X-Y planar motion table system for nano-machining. Ann CIRP 56(1):369–372CrossRefGoogle Scholar
  5. Shinno H, Yoshioka H, Sawano H (2011) A newly developed long range positioning table system with a sub-nanometer resolution. CIRP Ann 60(1):403–406CrossRefGoogle Scholar

Copyright information

© CIRP 2014

Authors and Affiliations

  1. 1.Precision and Intelligence LaboratoryTokyo Institute of TechnologyYokohamaJapan