CIRP Encyclopedia of Production Engineering

2014 Edition
| Editors: The International Academy for Production Engineering, Luc Laperrière, Gunther Reinhart

Ion Beam Machining

  • Fengzhou Fang
  • Zongwei Xu
Reference work entry



Ion beam machining is an important nonconventional manufacturing technology used in Micro/Nanofabrication, using a stream of accelerated ions to remove the atoms on the surface of the object.

Theory and Application

Ion Beams Machining (IBM) is an important nonconventional manufacturing technology (Hellborg et al. 2009), which uses a stream of accelerated ions by electrical means in a vacuum to remove, add, or modify atoms on the surface of the object. IBM can be classified into two main categories, that is, Large-area Ion Beam Machining (LIBM) technology and Focused Ion Beam Machining (FIBM) technology (Fig. 1).
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  1. Allen DM, Shore P, Evans RW, Fanara C, O’Brien W, Marson S, O’Neill W (2009) Ion beam, focused ion beam, and plasma discharge machining. CIRP Ann Manuf Technol 58:647–662CrossRefGoogle Scholar
  2. Hellborg R, Whitlow HJ, Zhang YW (2009) Ion beams in nanoscience and technology (particle acceleration and detection). Springer, BerlinGoogle Scholar
  3. Reyntjens S, Puers R (2001) A review of focused ion beam applications in microsystem technology. J Micromech Microeng 11:287–300CrossRefGoogle Scholar
  4. Zhang SJ, Fang FZ, Xu ZW, Hu XT (2009) Controlled morphology of micro tools shaped using focused ion beam milling technique. J Vac Sci Technol B 27(3):1304–1309CrossRefGoogle Scholar
  5. Ziegler JF (2004) SRIM-2003. Nucl Instrum Methods Phys Res B 219–220:1027–1036CrossRefGoogle Scholar

Copyright information

© CIRP 2014

Authors and Affiliations

  1. 1.College of Precision Instruments and Opto-electronics EngineeringTianjin UniversityTianjinChina