Ion Beam Machining
Reference work entry
Ion beam machining is an important nonconventional manufacturing technology used in Micro/Nanofabrication, using a stream of accelerated ions to remove the atoms on the surface of the object.
Theory and Application
Ion Beams Machining (IBM) is an important nonconventional manufacturing technology (Hellborg et al. 2009), which uses a stream of accelerated ions by electrical means in a vacuum to remove, add, or modify atoms on the surface of the object. IBM can be classified into two main categories, that is, Large-area Ion Beam Machining (LIBM) technology and Focused Ion Beam Machining (FIBM) technology (Fig. 1).
- Hellborg R, Whitlow HJ, Zhang YW (2009) Ion beams in nanoscience and technology (particle acceleration and detection). Springer, BerlinGoogle Scholar
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