CIRP Encyclopedia of Production Engineering

2014 Edition
| Editors: The International Academy for Production Engineering, Luc Laperrière, Gunther Reinhart

Ultraprecision Grinding

  • Ekkard Brinksmeier
Reference work entry



In general, the term “ultraprecision grinding” (UP-grinding) is used in literature for a grinding process for the generation of parts with low surface roughness, high form accuracy, and high surface integrity. This process is based on the material removal mechanism, which is at the borderline of brittle-to-ductile transition implying the transition from ductile material removal with no or little subsurface damage to brittle material removal with material cracks and outbreaks.

In summary, it can be stated that a simple characterization of ultraprecision grinding is neither known nor obvious. But, all known processes summarized under the brand “ultraprecision grinding” have certain aspects in common. Part quality and the mechanical properties of the workpiece material serve as a starting point for a characterization and lead to a selection of an abrasive process...

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  1. Anderson J, Hollman P, Jakobson S (2001) Abrasive capacity of thin film diamond structures. Key Eng Mat 196:141–148CrossRefGoogle Scholar
  2. Aurich JC, Engmann J, Schueler G, Haberland R (2009) Micro grinding tool for manufacture of complex structures in brittle materials. Ann CIRP 58(1):311–314CrossRefGoogle Scholar
  3. Braun O, Warnecke G, Aurich JC (2005) Simulation-based development of superabrasive grinding wheels with defined grain structure. In: Transactions of North American Manufacturing Research Institution, vol 33, pp 351–358Google Scholar
  4. Chen X, Rowe WB, Cai R (2002) Precision grinding using CBN wheels. Int J Mach Tools Manuf 42:585–593CrossRefGoogle Scholar
  5. Gäbler J, Schäfer L, Menze B, Hoffmeister HW (2003) Micro abrasive pencils with CVD diamond coating. Diamond Relat Mater 12:707–710CrossRefGoogle Scholar
  6. Grimme D (2010) Ultrapräzisionsschleifen von Stahl und neu synthetisierten PVD-Hartstoffschichten. German Ph.D. Thesis, Universität Bremen, Shaker-Verlag: Aachen, ISBN 978-3-8322-9901-9Google Scholar
  7. Kármán Th v (1911) Festigkeitslehre unter allseitigem Druck. Zeitschrift des Vereins deutscher Ingenieure 55/42: 1749–1757Google Scholar
  8. König W, Klocke F (2005) Fertigungsverfahren 2 - Schleifen, Honen, Läppen, 4th edn. VDI-Verlag, Düsseldorf. ISBN 3-540-23496-9Google Scholar
  9. Lee SB, Tani Y, Enomoto T, Sato H (2005) Development of a dicing blade with photopolymerizable resins for improving machinability. Ann of the CIRP 54(1):293–296CrossRefGoogle Scholar
  10. Liu JH, Pei ZJ, Fisher GR (2007) Grinding wheels for manufacturing of silicon wafers: a literature review. Int J Mach Tools Manuf 47:1–13CrossRefGoogle Scholar
  11. Sinhoff VR (1997) Feinbearbeitung optischer Gläser in der Kleinserie. German Ph.D. Thesis, Rheinisch-Westfälische Technische Hochschule Aachen, Shaker-Verlag: Aachen, ISBN 3-8265-2330-XGoogle Scholar

Copyright information

© CIRP 2014

Authors and Affiliations

  1. 1.LFM – Labor für MikrozerspanungBremenGermany