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Ellipsometry

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CIRP Encyclopedia of Production Engineering
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References

  • Azzam RMA, Bashara NM (1977) Ellipsometry and polarized light. North Holland Physics, Amsterdam

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  • Haitjema H, Woerlee GF (1989) Analysis of tin dioxide coatings by multiple angle of incidence ellipsometry. Thin Solid Films 169(1):1–16

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  • Heavens OS (1991) Optical properties of thin solid films, 2nd edn. Dover, New York

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  • Jackson JD (1998) Classical electrodynamics, 3rd edn. Wiley, New York

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Correspondence to Han Haitjema .

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Haitjema, H. (2014). Ellipsometry. In: Laperrière, L., Reinhart, G. (eds) CIRP Encyclopedia of Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-20617-7_16705

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