CIRP Encyclopedia of Production Engineering

2014 Edition
| Editors: The International Academy for Production Engineering, Luc Laperrière, Gunther Reinhart

Ellipsometry

Reference work entry
DOI: https://doi.org/10.1007/978-3-642-20617-7_16705

Definition

Collective name for a number of techniques dealing with the measurement and interpretation of the change in the polarization state of a polarized beam of radiation which is reflected from a surface.

From this change, optical properties of the reflecting surface can be derived.

Theory and Application

Basic Theory for Reflection and Transmission at an Interface and the Basic Ellipsometry Equation

In Fig. 1 the beam trajectories are sketched for a wave incident on a plane interface between two media having a real refractive index n 1 and n 2, respectively. The incoming beam with amplitude E 1 is reflected by the interface, giving a reflected beam with amplitude E 2 and a transmitted beam with amplitude E 3.
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References

  1. Azzam RMA, Bashara NM (1977) Ellipsometry and polarized light. North Holland Physics, AmsterdamGoogle Scholar
  2. Haitjema H, Woerlee GF (1989) Analysis of tin dioxide coatings by multiple angle of incidence ellipsometry. Thin Solid Films 169(1):1–16CrossRefGoogle Scholar
  3. Heavens OS (1991) Optical properties of thin solid films, 2nd edn. Dover, New YorkGoogle Scholar
  4. Jackson JD (1998) Classical electrodynamics, 3rd edn. Wiley, New YorkMATHGoogle Scholar

Copyright information

© CIRP 2014

Authors and Affiliations

  1. 1.Mitutoyo RCEBestThe Netherlands