Abstract
In this chapter a mechanical method of porous silicon formation is described. By applying high-energy ball milling to polycrystalline silicon powder or single crystalline silicon wafers, highly dispersed and nanocrystalline silicon powders are produced. Pressing and sintering then lead to a porous matrix. The macroporous structures made in this way can then be permeated by meso- and micropores. The sinters have isotropic character of the pore distribution and morphology; this method is not limited by the wafer dimensions, and it is possible to make large-scale porous bodies, which is an advantage in comparison to lithographic methods.
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Jakubowicz, J. (2018). Porous Silicon Formation by Mechanical Means. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-71381-6_9
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DOI: https://doi.org/10.1007/978-3-319-71381-6_9
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