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Optics for Spatially Tailored Ultrashort Pulse Laser Beam Micro-/Nanoprocessing

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Handbook of Laser Micro- and Nano-Engineering

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Abstract

Spatial beam shaping is very important to perform material laser processing with higher quality and higher throughput. The spatial beam shaping can be performed by passive and active optical components. The passive optical components including refractive optical elements such as ordinary lens, microlens array, cylindrical lens, axicon lens, diffractive optical elements, and apertures are described for specially designed shapes. The active optical components as typified by a liquid crystal spatial light modulator (LCSLM) is very useful to perform an arbitrary and variable spatial beam shaping, especially the beam shaping by a computer-generated hologram (CGH) displayed on an LCSLM is powerful and has been widely used in many applications such as two-photon polymerization, optical waveguide fabrication, fabrication of volume phase gratings in glass and polymer, and surface nanostructuring. In this chapter, the principle, features, useful techniques of the passive, and active beam-shaping optical components will be described, and some experimental results for the holographic laser processing implemented with the LCSLM will be demonstrated.

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Authors and Affiliations

  1. Center for Optical Research and Education (CORE), Utsunomiya University, Utsunomiya, Japan

    Yoshio Hayasaki & Satoshi Hasegawa

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  1. Yoshio Hayasaki
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  2. Satoshi Hasegawa
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Correspondence to Yoshio Hayasaki .

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Editors and Affiliations

  1. RIKEN-SIOM Joint Research Unit, RIKEN Center for Advanced Photonics RIKEN-SIOM Joint Research Unit, Wako, Saitama, Japan

    Koji Sugioka

Section Editor information

  1. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China

    Ya Cheng

  2. Paradigm Laser Research Limited, Tokyo, Japan

    Kunihiko Washio

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Hayasaki, Y., Hasegawa, S. (2020). Optics for Spatially Tailored Ultrashort Pulse Laser Beam Micro-/Nanoprocessing. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-69537-2_9-1

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  • DOI: https://doi.org/10.1007/978-3-319-69537-2_9-1

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  • Print ISBN: 978-3-319-69537-2

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