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Handbook of Sol-Gel Science and Technology pp 1–11Cite as

Ellipsometry of Sol–Gel Films

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Abstract

Ellipsometry is an optical method for determining the properties of thin films, using manipulation and measurement of the polarization state of reflected light. This chapter introduces the method, summarizes the optical principles and analysis involved, and describes the basic experimental arrangements. Applications and limitations of the technique are presented. A specific application, the use of ellipsometry to determine the pore size distribution in thin porous films, is then described in some detail.

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Author information

Authors and Affiliations

  1. Faculty of Engineering, Department of Electrical and Electronic Engineering, Imperial College London, London, UK

    Eric Yeatman

Authors
  1. Eric Yeatman
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Correspondence to Eric Yeatman .

Editor information

Editors and Affiliations

  1. Rutgers University, Piscataway, New Jersey, USA

    Lisa Klein

  2. Madrid, Spain

    Mario Aparicio

  3. City University of New York, New York, USA

    Andrei Jitianu

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© 2016 Springer International Publishing Switzerland

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Yeatman, E. (2016). Ellipsometry of Sol–Gel Films. In: Klein, L., Aparicio, M., Jitianu, A. (eds) Handbook of Sol-Gel Science and Technology. Springer, Cham. https://doi.org/10.1007/978-3-319-19454-7_47-1

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  • DOI: https://doi.org/10.1007/978-3-319-19454-7_47-1

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  • Publisher Name: Springer, Cham

  • Online ISBN: 978-3-319-19454-7

  • eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

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