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Porous Silicon for Microdevices and Microsystems

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Handbook of Porous Silicon

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Abstract

An updated literature survey is provided of the various uses of both macroporous and mesoporous silicon in individual microdevices and complex microsystems. The material has been used (a) as a silicon wafer processing tool wherein it is sacrificial (b) in a passive role where it can provide thermal or electrical isolation and (c) in an active role where it can perform a number of diverse functions. Examples of active functions available for microsystems include culturing cells, sensing, delivering drugs, providing sources of energy for microactuators, or having a catalytic role in microelectrodes.

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Authors and Affiliations

  1. Institute for Microelectronics and Microsystems, Naples, 80131, Italy

    Luca De Stefano & Ilaria Rea

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  1. Luca De Stefano
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  2. Ilaria Rea
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Correspondence to Luca De Stefano .

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Editors and Affiliations

  1. Malvern Hills Science Park, Chief Scientific Officer, Intrinsiq Mate, Malvern, Worcestershire, United Kingdom

    Leigh Canham

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De Stefano, L., Rea, I. (2016). Porous Silicon for Microdevices and Microsystems. In: Canham, L. (eds) Handbook of Porous Silicon. Springer, Cham. https://doi.org/10.1007/978-3-319-04508-5_81-2

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  • DOI: https://doi.org/10.1007/978-3-319-04508-5_81-2

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-04508-5

  • Online ISBN: 978-3-319-04508-5

  • eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

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Chapter history

  1. Latest

    Porous Silicon for Microdevices and Microsystems
    Published:
    26 December 2016

    DOI: https://doi.org/10.1007/978-3-319-04508-5_81-2

  2. Original

    Porous Silicon for Microdevices and Microsystems
    Published:
    07 May 2014

    DOI: https://doi.org/10.1007/978-3-319-04508-5_81-1

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